The analysis of the errors of the dynamic interferometry method in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts
Publication type: Journal Article
Publication date: 2022-03-11
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ISSN: 23074469, 13147617, 23675632
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Denisov D. et al. The analysis of the errors of the dynamic interferometry method in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts // ADVANCES IN APPLIED PHYSICS. 2022. Vol. 10. No. 1. pp. 71-89.
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Denisov D., Ustyugova M., Frolova V., Mashoshin D., Gafarov I. The analysis of the errors of the dynamic interferometry method in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts // ADVANCES IN APPLIED PHYSICS. 2022. Vol. 10. No. 1. pp. 71-89.
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TY - JOUR
DO - 10.51368/2307-4469-2022-10-1-71-89
UR - https://doi.org/10.51368/2307-4469-2022-10-1-71-89
TI - The analysis of the errors of the dynamic interferometry method in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts
T2 - ADVANCES IN APPLIED PHYSICS
AU - Denisov, D
AU - Ustyugova, M
AU - Frolova, V
AU - Mashoshin, D
AU - Gafarov, I
PY - 2022
DA - 2022/03/11
PB - Joint-Stock Company Scientific and Production Association - ORION
SP - 71-89
IS - 1
VL - 10
SN - 2307-4469
SN - 1314-7617
SN - 2367-5632
ER -
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@article{2022_Denisov,
author = {D Denisov and M Ustyugova and V Frolova and D Mashoshin and I Gafarov},
title = {The analysis of the errors of the dynamic interferometry method in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts},
journal = {ADVANCES IN APPLIED PHYSICS},
year = {2022},
volume = {10},
publisher = {Joint-Stock Company Scientific and Production Association - ORION},
month = {mar},
url = {https://doi.org/10.51368/2307-4469-2022-10-1-71-89},
number = {1},
pages = {71--89},
doi = {10.51368/2307-4469-2022-10-1-71-89}
}
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Denisov, D., et al. “The analysis of the errors of the dynamic interferometry method in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts.” ADVANCES IN APPLIED PHYSICS, vol. 10, no. 1, Mar. 2022, pp. 71-89. https://doi.org/10.51368/2307-4469-2022-10-1-71-89.