Applied Science and Convergence Technology
,  volume 33 ,  issue 5 ,  pages 108-116

Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges

Publication type: Journal Article
Publication date: 2024-09-30
scimago Q3
wos Q4
SJR: 0.270
CiteScore: 1.8
Impact factor: 0.9
ISSN: 22886559, 12258822
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GOST |
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GOST Copy
Kim K. Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges // Applied Science and Convergence Technology. 2024. Vol. 33. No. 5. pp. 108-116.
GOST all authors (up to 50) Copy
Kim K. Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges // Applied Science and Convergence Technology. 2024. Vol. 33. No. 5. pp. 108-116.
RIS |
Cite this
RIS Copy
TY - JOUR
DO - 10.5757/asct.2024.33.5.108
UR - http://www.e-asct.org/journal/view.html?doi=10.5757/ASCT.2024.33.5.108
TI - Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges
T2 - Applied Science and Convergence Technology
AU - Kim, Kyongnam
PY - 2024
DA - 2024/09/30
PB - The Korean Vacuum Society
SP - 108-116
IS - 5
VL - 33
SN - 2288-6559
SN - 1225-8822
ER -
BibTex |
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BibTex (up to 50 authors) Copy
@article{2024_Kim,
author = {Kyongnam Kim},
title = {Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges},
journal = {Applied Science and Convergence Technology},
year = {2024},
volume = {33},
publisher = {The Korean Vacuum Society},
month = {sep},
url = {http://www.e-asct.org/journal/view.html?doi=10.5757/ASCT.2024.33.5.108},
number = {5},
pages = {108--116},
doi = {10.5757/asct.2024.33.5.108}
}
MLA
Cite this
MLA Copy
Kim, Kyongnam. “Cryogenic Etching in Advanced Electronics Manufacturing: Applications and Challenges.” Applied Science and Convergence Technology, vol. 33, no. 5, Sep. 2024, pp. 108-116. http://www.e-asct.org/journal/view.html?doi=10.5757/ASCT.2024.33.5.108.