Applied Science and Convergence Technology
,  volume 33 ,  issue 6 ,  pages 181-188

Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis

Publication type: Journal Article
Publication date: 2024-11-30
scimago Q3
wos Q4
SJR: 0.270
CiteScore: 1.8
Impact factor: 0.9
ISSN: 22886559, 12258822
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Lee Y. et al. Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis // Applied Science and Convergence Technology. 2024. Vol. 33. No. 6. pp. 181-188.
GOST all authors (up to 50) Copy
Lee Y., Choi J. E., An S., Hong S. J. Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis // Applied Science and Convergence Technology. 2024. Vol. 33. No. 6. pp. 181-188.
RIS |
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TY - JOUR
DO - 10.5757/asct.2024.33.6.181
UR - http://www.e-asct.org/journal/view.html?doi=10.5757/ASCT.2024.33.6.181
TI - Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis
T2 - Applied Science and Convergence Technology
AU - Lee, Younji
AU - Choi, Jeong Eun
AU - An, Surin
AU - Hong, Sang Jeen
PY - 2024
DA - 2024/11/30
PB - The Korean Vacuum Society
SP - 181-188
IS - 6
VL - 33
SN - 2288-6559
SN - 1225-8822
ER -
BibTex |
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BibTex (up to 50 authors) Copy
@article{2024_Lee,
author = {Younji Lee and Jeong Eun Choi and Surin An and Sang Jeen Hong},
title = {Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis},
journal = {Applied Science and Convergence Technology},
year = {2024},
volume = {33},
publisher = {The Korean Vacuum Society},
month = {nov},
url = {http://www.e-asct.org/journal/view.html?doi=10.5757/ASCT.2024.33.6.181},
number = {6},
pages = {181--188},
doi = {10.5757/asct.2024.33.6.181}
}
MLA
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Lee, Younji, et al. “Machine Learning-Based Integrated Database System for Plasma-Enhanced Chemical Vapor Deposition Fault Diagnosis.” Applied Science and Convergence Technology, vol. 33, no. 6, Nov. 2024, pp. 181-188. http://www.e-asct.org/journal/view.html?doi=10.5757/ASCT.2024.33.6.181.
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