Development and research of microelectromechanical systems and semiconductor sensors
Dukhov Research Institute of Automatics
Since 2012, the laboratory has been engaged in the development, research and production of microelectromechanical systems (MEMS) and converters based on semiconductor structures. The main physical quantities for measurements are pressure (differential, excess and absolute) and temperature. Pressure sensing elements operating in the range from 0.1 to 16,000 kPa and at temperatures from -60 to +80 ° C with a total measurement error of up to 0.5% and temperature sensing elements operating with low energy consumption in the range from -60 to +80 ° C with an error of up to 0.8% can be placed together in a small-sized housing.
Electronics
Microelectronics
Solid State Physics
