interest

Electronic lithography

Shishkin Andrey
Moscow Institute of Physics and Technology
Moscow Institute of Physics and Technology
National University of Science & Technology (MISiS)
National University of Science & Technology (MISiS)
Dukhov Research Institute of Automatics
Dukhov Research Institute of Automatics
18 publications,  162 citations
h-index: 7
Research interests
Electronic lithography
Magnetron sputtering
Nanotechnology
Superconductivity
Mandrusova Ekaterina
Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences
Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences
1 publication
h-index: 0
Research interests
Cultural heritage
Electronic lithography