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Chemical vapor deposition (CVD)
Korepanov Vitaly
🥼
🤝
DSc in Physics and Mathematics
Institute of Microelectronics Technology and High Purity Materials of the Russian Academy of Sciences
61
publications,
658
citations
h
-index:
12
Tarkhov Mikhail
🥼
PhD in Physics and Mathematics
Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences
58
publications,
642
citations
h
-index:
14
Safonov Alexey
🥼
🤝
PhD in Physics and Mathematics
Kutateladze Institute of Thermophysics of the Siberian Branch of the Russian Academy of Sciences
57
publications,
478
citations
h
-index:
12
Bespalova Polina
Peter the Great St. Petersburg Polytechnic University
St Petersburg National Research Academic University of the Russian Academy of Sciences
13
publications,
47
citations
h
-index:
4
Ryabov Vitaliy
5
publications
h
-index:
0
Leksina Uliana
🥼
🤝
Lomonosov Moscow State University
h
-index:
0