MEMS at Bosch – Si plasma etch success story, history, applications, and products
1
CR/AR1 CE‐MST (Senior Vice President Applied Research 1 – Advanced Functional Materials and Microsystems)Robert Bosch GmbH Robert‐Bosch‐Campus 171272 Renningen Germany
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2
EPT (Engineering Sensor Process Technology)Robert Bosch GmbH P.O. Box 13 4272703 Reutlingen Germany
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Publication type: Journal Article
Publication date: 2019-02-19
scimago Q2
wos Q1
SJR: 0.513
CiteScore: 6.3
Impact factor: 2.9
ISSN: 16128850, 16128869
Condensed Matter Physics
Polymers and Plastics
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Metrics
31
Total citations:
31
Citations from 2024:
15
(48.39%)
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MLA
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GOST
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Laermer F., Urban A. MEMS at Bosch – Si plasma etch success story, history, applications, and products // Plasma Processes and Polymers. 2019. Vol. 16. No. 9. p. 1800207.
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Laermer F., Urban A. MEMS at Bosch – Si plasma etch success story, history, applications, and products // Plasma Processes and Polymers. 2019. Vol. 16. No. 9. p. 1800207.
Cite this
RIS
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TY - JOUR
DO - 10.1002/ppap.201800207
UR - https://doi.org/10.1002/ppap.201800207
TI - MEMS at Bosch – Si plasma etch success story, history, applications, and products
T2 - Plasma Processes and Polymers
AU - Laermer, Franz
AU - Urban, Andrea
PY - 2019
DA - 2019/02/19
PB - Wiley
SP - 1800207
IS - 9
VL - 16
SN - 1612-8850
SN - 1612-8869
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2019_Laermer,
author = {Franz Laermer and Andrea Urban},
title = {MEMS at Bosch – Si plasma etch success story, history, applications, and products},
journal = {Plasma Processes and Polymers},
year = {2019},
volume = {16},
publisher = {Wiley},
month = {feb},
url = {https://doi.org/10.1002/ppap.201800207},
number = {9},
pages = {1800207},
doi = {10.1002/ppap.201800207}
}
Cite this
MLA
Copy
Laermer, Franz, and Andrea Urban. “MEMS at Bosch – Si plasma etch success story, history, applications, and products.” Plasma Processes and Polymers, vol. 16, no. 9, Feb. 2019, p. 1800207. https://doi.org/10.1002/ppap.201800207.