Journal of Vacuum Science and Technology B
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SCImago
Q3
WOS
Q4
Impact factor
1.2
SJR
0.280
CiteScore
2.4
Categories
Condensed Matter Physics
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Materials Chemistry
Process Chemistry and Technology
Surfaces, Coatings and Films
Areas
Chemical Engineering
Engineering
Materials Science
Physics and Astronomy
Years of issue
1991-1992, 2009-2025
journal names
Journal of Vacuum Science and Technology B
Top-3 citing journals
Journal of Vacuum Science and Technology B
(2667 citations)
Journal of Applied Physics
(1420 citations)
Applied Physics Letters
(1368 citations)
Top-3 organizations
University of Florida
(126 publications)
University of Texas at Austin
(65 publications)
Samsung
(63 publications)
University of Texas at Austin
(22 publications)
University of Chinese Academy of Sciences
(19 publications)
University of Texas at Dallas
(15 publications)
Top-3 researchers by articles count
15 publications in journal
Filippov Sergei
🥼 🤝
PhD in Physics and Mathematics
103 publications,
417 citations,
18 reviews
h-index: 11
Ioffe Physical-Technical Institute of the Russian Academy of Sciences
5 publications in journal
Robert Bruce
39 publications,
1 148 citations
h-index: 18
Watson Research Center
Most cited in 5 years
Found
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Top-100
Citing journals
Citing publishers
Publishing organizations
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University of Florida
126 publications, 2.93%
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University of Texas at Austin
65 publications, 1.51%
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Samsung
63 publications, 1.47%
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Interuniversity Microelectronics Centre
58 publications, 1.35%
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Arizona State University
57 publications, 1.33%
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United States Naval Research Laboratory
56 publications, 1.3%
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Massachusetts Institute of Technology
54 publications, 1.26%
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Tohoku University
51 publications, 1.19%
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Korea University
50 publications, 1.16%
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Lawrence Berkeley National Laboratory
46 publications, 1.07%
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Grenoble Alpes University
43 publications, 1%
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National Institute of Advanced Industrial Science and Technology
43 publications, 1%
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North Carolina State University
42 publications, 0.98%
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Oak Ridge National Laboratory
42 publications, 0.98%
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Kyung Hee University
41 publications, 0.95%
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University of Texas at Dallas
40 publications, 0.93%
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Japan Science and Technology Agency
40 publications, 0.93%
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University of Notre Dame
37 publications, 0.86%
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Georgia Institute of technology
36 publications, 0.84%
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University of Waterloo
34 publications, 0.79%
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Katholieke Universiteit Leuven
32 publications, 0.74%
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Pennsylvania State University
32 publications, 0.74%
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National Institute of Standards and Technology
31 publications, 0.72%
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Watson Research Center
30 publications, 0.7%
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University of Chinese Academy of Sciences
29 publications, 0.67%
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National Tsing Hua University
29 publications, 0.67%
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Osaka University
29 publications, 0.67%
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Agency for Science, Technology and Research
29 publications, 0.67%
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Argonne National Laboratory
28 publications, 0.65%
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Hanyang University
28 publications, 0.65%
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Auburn University
28 publications, 0.65%
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University of Michigan
28 publications, 0.65%
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Institute of Materials Research and Engineering
28 publications, 0.65%
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Seoul National University
27 publications, 0.63%
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Paul Scherrer Institute
26 publications, 0.61%
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National Yang Ming Chiao Tung University
26 publications, 0.61%
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University of Illinois Urbana-Champaign
26 publications, 0.61%
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University of Arkansas at Fayetteville
26 publications, 0.61%
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National University of Singapore
25 publications, 0.58%
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Stanford University
25 publications, 0.58%
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Nagoya University
25 publications, 0.58%
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Ohio State University
24 publications, 0.56%
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Kyoto University
24 publications, 0.56%
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Ilmenau University of Technology
24 publications, 0.56%
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Institute of Microelectronics, Chinese Academy of Sciences
24 publications, 0.56%
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Nanjing University
23 publications, 0.54%
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University of Wuppertal
23 publications, 0.54%
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Technische Universität Dresden
22 publications, 0.51%
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Vienna University of Technology
22 publications, 0.51%
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Texas A&M University
22 publications, 0.51%
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University at Albany, State University of New York
22 publications, 0.51%
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National Cheng Kung University
21 publications, 0.49%
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University of California, Santa Barbara
21 publications, 0.49%
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Xi'an Jiaotong University
20 publications, 0.47%
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Eindhoven University of Technology
20 publications, 0.47%
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University of Maryland, College Park
20 publications, 0.47%
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Ioffe Physical-Technical Institute of the Russian Academy of Sciences
19 publications, 0.44%
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State University of New York Polytechnic Institute
19 publications, 0.44%
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Tokyo University of Science
18 publications, 0.42%
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Tokyo Institute of Technology
18 publications, 0.42%
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Sungkyunkwan University
18 publications, 0.42%
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University of Houston
18 publications, 0.42%
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Institute of Rare Metals
17 publications, 0.4%
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Tsinghua University
17 publications, 0.4%
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Autonomous University of Barcelona
17 publications, 0.4%
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Technical University of Denmark
17 publications, 0.4%
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Cornell University
17 publications, 0.4%
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Virginia Tech
17 publications, 0.4%
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University of California, Berkeley
17 publications, 0.4%
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Regensburg University of Applied Sciences
17 publications, 0.4%
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Purdue University
17 publications, 0.4%
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Boise State University
17 publications, 0.4%
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University of Delaware
17 publications, 0.4%
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Texas State University
17 publications, 0.4%
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Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional
17 publications, 0.4%
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Huazhong University of Science and Technology
16 publications, 0.37%
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Chang Gung University
16 publications, 0.37%
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University of California, Los Angeles
16 publications, 0.37%
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Université Paris-Saclay
16 publications, 0.37%
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Université Claude Bernard Lyon 1
16 publications, 0.37%
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Fudan University
15 publications, 0.35%
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Delft University of Technology
15 publications, 0.35%
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Nanyang Technological University
15 publications, 0.35%
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National Institute for Materials Science
15 publications, 0.35%
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University of Glasgow
15 publications, 0.35%
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University of the Free State
15 publications, 0.35%
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Korea Advanced Institute of Science and Technology
15 publications, 0.35%
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Chonbuk National University
15 publications, 0.35%
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Institute of Semiconductors, Chinese Academy of Sciences
15 publications, 0.35%
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Université de Sherbrooke
15 publications, 0.35%
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National Renewable Energy Laboratory
15 publications, 0.35%
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University of Erlangen–Nuremberg
15 publications, 0.35%
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University of Wisconsin–Madison
15 publications, 0.35%
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Osaka Metropolitan University
15 publications, 0.35%
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University of Alabama
15 publications, 0.35%
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Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
15 publications, 0.35%
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National Taiwan University
14 publications, 0.33%
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Brookhaven National Laboratory
14 publications, 0.33%
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Yonsei University
14 publications, 0.33%
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University of Hong Kong
14 publications, 0.33%
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140
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Publishing organizations in 5 years
Publishing countries
Publishing countries in 5 years
5 publications in journal
Robert Bruce
39 publications,
1 148 citations
h-index: 18
Watson Research Center
2 publications in journal
Gutakovskii A
298 publications,
3 821 citations
h-index: 26
2 publications in journal
Shikin A
DSc
185 publications,
5 707 citations
h-index: 35
Saint Petersburg State University
2 publications in journal
Rezvanov Askar
24 publications,
116 citations,
1 review
h-index: 7
1 publication in journal
Zhu Menglin
45 publications,
990 citations
h-index: 15
Ohio State University
Data by ORCID
