Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

American Vacuum Society
American Vacuum Society
ISSN: 21662746, 21662754

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SCImago
Q3
WOS
Q3
Impact factor
1.5
SJR
0.328
CiteScore
2.7
Categories
Condensed Matter Physics
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Materials Chemistry
Process Chemistry and Technology
Surfaces, Coatings and Films
Areas
Chemical Engineering
Engineering
Materials Science
Physics and Astronomy
Years of issue
1991-1992, 2009-2025
journal names
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
J VAC SCI TECHNOL B
Publications
4 156
Citations
36 358
h-index
53
Top-3 organizations
University of Florida
University of Florida (126 publications)
University of Texas at Austin
University of Texas at Austin (63 publications)
Samsung
Samsung (59 publications)
Top-3 countries
USA (1576 publications)
China (499 publications)
Japan (491 publications)

Most cited in 5 years

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Publications found: 0

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Publishing countries

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USA, 1576, 37.92%
China, 499, 12.01%
Japan, 491, 11.81%
Germany, 337, 8.11%
Republic of Korea, 329, 7.92%
France, 165, 3.97%
Canada, 132, 3.18%
Mexico, 127, 3.06%
United Kingdom, 119, 2.86%
India, 100, 2.41%
Russia, 96, 2.31%
Belgium, 77, 1.85%
Italy, 70, 1.68%
Singapore, 63, 1.52%
Netherlands, 54, 1.3%
Switzerland, 50, 1.2%
Sweden, 50, 1.2%
Poland, 49, 1.18%
Spain, 44, 1.06%
Austria, 40, 0.96%
Brazil, 30, 0.72%
Israel, 25, 0.6%
Czech Republic, 22, 0.53%
Turkey, 21, 0.51%
Australia, 20, 0.48%
Denmark, 19, 0.46%
Norway, 17, 0.41%
Philippines, 16, 0.38%
Ukraine, 15, 0.36%
Ireland, 15, 0.36%
New Zealand, 15, 0.36%
Finland, 12, 0.29%
South Africa, 12, 0.29%
Greece, 9, 0.22%
Iraq, 9, 0.22%
Vietnam, 8, 0.19%
Iran, 8, 0.19%
Saudi Arabia, 8, 0.19%
Slovakia, 8, 0.19%
Bulgaria, 7, 0.17%
Malaysia, 7, 0.17%
Azerbaijan, 6, 0.14%
Jordan, 4, 0.1%
Pakistan, 4, 0.1%
Romania, 4, 0.1%
Thailand, 4, 0.1%
Portugal, 3, 0.07%
Hungary, 3, 0.07%
UAE, 3, 0.07%
Slovenia, 3, 0.07%
Croatia, 3, 0.07%
Kazakhstan, 2, 0.05%
Algeria, 2, 0.05%
Argentina, 2, 0.05%
Armenia, 2, 0.05%
Bangladesh, 2, 0.05%
Egypt, 2, 0.05%
Qatar, 2, 0.05%
Colombia, 2, 0.05%
Luxembourg, 2, 0.05%
Sudan, 2, 0.05%
Tunisia, 2, 0.05%
Chile, 2, 0.05%
Belarus, 1, 0.02%
Estonia, 1, 0.02%
Venezuela, 1, 0.02%
Georgia, 1, 0.02%
Kuwait, 1, 0.02%
Liechtenstein, 1, 0.02%
Morocco, 1, 0.02%
Peru, 1, 0.02%
Puerto Rico, 1, 0.02%
Serbia, 1, 0.02%
Ecuador, 1, 0.02%
Kosovo, 1, 0.02%
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Publishing countries in 5 years

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USA, 296, 32.42%
China, 119, 13.03%
Japan, 117, 12.81%
Germany, 66, 7.23%
Republic of Korea, 52, 5.7%
France, 34, 3.72%
Canada, 34, 3.72%
India, 31, 3.4%
Mexico, 27, 2.96%
United Kingdom, 26, 2.85%
Russia, 24, 2.63%
Netherlands, 19, 2.08%
Poland, 13, 1.42%
Italy, 12, 1.31%
Belgium, 10, 1.1%
Brazil, 9, 0.99%
Australia, 6, 0.66%
Singapore, 6, 0.66%
Turkey, 6, 0.66%
Philippines, 6, 0.66%
Sweden, 6, 0.66%
Czech Republic, 5, 0.55%
South Africa, 5, 0.55%
Denmark, 4, 0.44%
Israel, 4, 0.44%
Iran, 4, 0.44%
Switzerland, 4, 0.44%
Austria, 2, 0.22%
Armenia, 2, 0.22%
Bangladesh, 2, 0.22%
Egypt, 2, 0.22%
New Zealand, 2, 0.22%
UAE, 2, 0.22%
Saudi Arabia, 2, 0.22%
Slovenia, 2, 0.22%
Kazakhstan, 1, 0.11%
Ukraine, 1, 0.11%
Portugal, 1, 0.11%
Azerbaijan, 1, 0.11%
Algeria, 1, 0.11%
Vietnam, 1, 0.11%
Greece, 1, 0.11%
Jordan, 1, 0.11%
Iraq, 1, 0.11%
Morocco, 1, 0.11%
Norway, 1, 0.11%
Pakistan, 1, 0.11%
Thailand, 1, 0.11%
Tunisia, 1, 0.11%
Finland, 1, 0.11%
Ecuador, 1, 0.11%
Kosovo, 1, 0.11%
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