Evaluation of top, angle, and side cleaned FIB samples for TEM analysis
Publication type: Journal Article
Publication date: 2007-08-25
scimago Q2
wos Q1
SJR: 0.473
CiteScore: 5.7
Impact factor: 2.1
ISSN: 1059910X, 10970029
PubMed ID:
17722055
Instrumentation
Histology
Medical Laboratory Technology
Anatomy
Abstract
TEM specimens of a LaAlO3/SrTiO3 multilayer are prepared by FIB with internal lift out. Using a Ga+1 beam of 5 kV, a final cleaning step yielding top, top‐angle, side, and bottom‐angle cleaning is performed. Different cleaning procedures, which can be easily implemented in a dual beam FIB system, are described and compared; all cleaning types produce thin lamellae, useful for HRTEM and HAADF‐STEM work up to atomic resolution. However, the top cleaned lamellae are strongly affected by the curtain effect. Top‐angle cleaned specimens show an amorphous layer of around 5 nm at the specimen surfaces, due to damage and redeposition. Furthermore, it is observed that the LaAlO3 layers are preferentially destroyed and transformed into amorphous material, during the thinning process. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.
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42
Total citations:
42
Citations from 2024:
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(14%)
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GOST
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Montoya E. et al. Evaluation of top, angle, and side cleaned FIB samples for TEM analysis // Microscopy Research and Technique. 2007. Vol. 70. No. 12. pp. 1060-1071.
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Montoya E., Bals S., Rossell M., Schryvers D., Van Tendeloo G. Evaluation of top, angle, and side cleaned FIB samples for TEM analysis // Microscopy Research and Technique. 2007. Vol. 70. No. 12. pp. 1060-1071.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1002/jemt.20514
UR - https://doi.org/10.1002/jemt.20514
TI - Evaluation of top, angle, and side cleaned FIB samples for TEM analysis
T2 - Microscopy Research and Technique
AU - Montoya, Eduardo
AU - Bals, Sara
AU - Rossell, Marta
AU - Schryvers, Dominique
AU - Van Tendeloo, Gustaaf
PY - 2007
DA - 2007/08/25
PB - Wiley
SP - 1060-1071
IS - 12
VL - 70
PMID - 17722055
SN - 1059-910X
SN - 1097-0029
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2007_Montoya,
author = {Eduardo Montoya and Sara Bals and Marta Rossell and Dominique Schryvers and Gustaaf Van Tendeloo},
title = {Evaluation of top, angle, and side cleaned FIB samples for TEM analysis},
journal = {Microscopy Research and Technique},
year = {2007},
volume = {70},
publisher = {Wiley},
month = {aug},
url = {https://doi.org/10.1002/jemt.20514},
number = {12},
pages = {1060--1071},
doi = {10.1002/jemt.20514}
}
Cite this
MLA
Copy
Montoya, Eduardo, et al. “Evaluation of top, angle, and side cleaned FIB samples for TEM analysis.” Microscopy Research and Technique, vol. 70, no. 12, Aug. 2007, pp. 1060-1071. https://doi.org/10.1002/jemt.20514.