The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method
Reza Shakoury
1
,
Negin Talebani
1
,
Amir Zelati
2
,
Ştefan Ţălu
3
,
Arman Ali
4
,
Saeed Mirzaei
5
,
Azadeh Jafari
6, 7
5
Publication type: Journal Article
Publication date: 2021-07-22
wos Q1
SJR: —
CiteScore: —
Impact factor: 4.0
ISSN: 03068919, 1572817X
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering
Abstract
In this study, ZrO2 coatings with different thicknesses were grown by the electron beam evaporation technique. The crystalline structure was studied by XRD analysis which suggested the tetragonal and monoclinic phases for ZrO2 coatings. Additionally, the film thickness slightly enhanced the crystallinity. The surface morphology and fractal features were analyzed using Scanning Electron Microscopy (SEM). The surface statistical parameters and the fractal geometry were employed to analyze the impact of the coating thickness and homogeneity on the morphology of the films. The statistical processing and fractal dimension revealed variations in the morphology parameters due to the electron beam evaporation method applied for different thicknesses of samples. Based on these results, it can be concluded that the surface microtexture and fractal dimension area correlated with the thickness and homogeneity of the crystalline structure.
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11
Total citations:
11
Citations from 2024:
4
(36.36%)
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Shakoury R. et al. The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method // Optical and Quantum Electronics. 2021. Vol. 53. No. 8. 441
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Shakoury R., Talebani N., Zelati A., Ţălu Ş., Ali A., Mirzaei S., Jafari A. The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method // Optical and Quantum Electronics. 2021. Vol. 53. No. 8. 441
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RIS
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TY - JOUR
DO - 10.1007/s11082-021-03079-4
UR - https://doi.org/10.1007/s11082-021-03079-4
TI - The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method
T2 - Optical and Quantum Electronics
AU - Shakoury, Reza
AU - Talebani, Negin
AU - Zelati, Amir
AU - Ţălu, Ştefan
AU - Ali, Arman
AU - Mirzaei, Saeed
AU - Jafari, Azadeh
PY - 2021
DA - 2021/07/22
PB - Springer Nature
IS - 8
VL - 53
SN - 0306-8919
SN - 1572-817X
ER -
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@article{2021_Shakoury,
author = {Reza Shakoury and Negin Talebani and Amir Zelati and Ştefan Ţălu and Arman Ali and Saeed Mirzaei and Azadeh Jafari},
title = {The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method},
journal = {Optical and Quantum Electronics},
year = {2021},
volume = {53},
publisher = {Springer Nature},
month = {jul},
url = {https://doi.org/10.1007/s11082-021-03079-4},
number = {8},
pages = {441},
doi = {10.1007/s11082-021-03079-4}
}