Mg-doped p-type β-Ga2O3 thin film for solar-blind ultraviolet photodetector
Y P Qian
1
,
X L Chu
2
,
H.Z. Shi
1
,
W. K. Zhu
1
,
K. Wang
1
,
X K Huang
1
,
H. Wang
1
,
S L Wang
1
,
Peigang Li
3, 4
,
Xiao-Hong Zhang
5
,
Weihua Tang
6
5
China Aerospace Academy of Systems Science and Engineering, Beijing 100876, China
|
Publication type: Journal Article
Publication date: 2017-12-01
scimago Q2
wos Q3
SJR: 0.591
CiteScore: 5.4
Impact factor: 2.7
ISSN: 0167577X, 18734979
Condensed Matter Physics
General Materials Science
Mechanical Engineering
Mechanics of Materials
Abstract
The p-type high insulating thin films were obtained by doping Mg into β-Ga2O3. Thin films with various Mg concentrations were deposited on (0 0 0 1) c-plane Al2O3 substrate by radio frequency magnetron sputtering followed by post-annealing treatment. The crystal structure expanded due to the substitution of the trivalent Ga3+ with the divalent Mg2+ in a larger ion radius. The Fermi level (EF) of the Mg doped film is closer to the valence band, exhibiting a characteristic of weak p-type. The Mg doped Ga2O3 thin films were used to construct the metal/semiconductor/metal (MSM) structure, and the devices showed a high resistance (4.1 pA at 10 V), a high sensitivity (8.7 × 105%), a high responsivity (23.8 mA/W) and a short decay time (0.02 s) under 254 nm UV light irradiation, suggesting a potential application in solar-blind photodetector.
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Qian Y. P. et al. Mg-doped p-type β-Ga2O3 thin film for solar-blind ultraviolet photodetector // Materials Letters. 2017. Vol. 209. pp. 558-561.
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Qian Y. P., Chu X. L., Shi H., Zhu W. K., Wang K., Huang X. K., Wang H., Wang S. L., Li P., Zhang X., Tang W. Mg-doped p-type β-Ga2O3 thin film for solar-blind ultraviolet photodetector // Materials Letters. 2017. Vol. 209. pp. 558-561.
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TY - JOUR
DO - 10.1016/j.matlet.2017.08.052
UR - https://doi.org/10.1016/j.matlet.2017.08.052
TI - Mg-doped p-type β-Ga2O3 thin film for solar-blind ultraviolet photodetector
T2 - Materials Letters
AU - Qian, Y P
AU - Chu, X L
AU - Shi, H.Z.
AU - Zhu, W. K.
AU - Wang, K.
AU - Huang, X K
AU - Wang, H.
AU - Wang, S L
AU - Li, Peigang
AU - Zhang, Xiao-Hong
AU - Tang, Weihua
PY - 2017
DA - 2017/12/01
PB - Elsevier
SP - 558-561
VL - 209
SN - 0167-577X
SN - 1873-4979
ER -
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@article{2017_Qian,
author = {Y P Qian and X L Chu and H.Z. Shi and W. K. Zhu and K. Wang and X K Huang and H. Wang and S L Wang and Peigang Li and Xiao-Hong Zhang and Weihua Tang},
title = {Mg-doped p-type β-Ga2O3 thin film for solar-blind ultraviolet photodetector},
journal = {Materials Letters},
year = {2017},
volume = {209},
publisher = {Elsevier},
month = {dec},
url = {https://doi.org/10.1016/j.matlet.2017.08.052},
pages = {558--561},
doi = {10.1016/j.matlet.2017.08.052}
}