Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes
Publication type: Journal Article
Publication date: 2018-04-01
scimago Q1
wos Q1
SJR: 1.211
CiteScore: 10.2
Impact factor: 6.1
ISSN: 02578972, 18793347
Materials Chemistry
Surfaces, Coatings and Films
General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Abstract
This paper presents the results of low-energy high-current implantation of nitrogen ions into AISI 5140 steel. The plasma was generated using a plasma source based on non-self-sustained arc discharge, using thermionic and hollow cathodes. The influence of the temperature of the specimens and irradiation dose on the characteristics of the ion-modified layer was studied. The temperature of the specimens was controlled within the range of (450–650) °C by changing the duty factor of the bias pulse and the average ion current density. The microhardness of the steel after 1-hour of low-energy high-current implantation of nitrogen ions increased almost 2-fold (up to 7100 MPa), and a modified layer with a thickness up to 200 μm was formed. The wear resistance increased 7.5-fold. The main factor determining the efficiency of nitrogen dopant penetration was the temperature of the specimen. The parameters of the ion treatment influence the shape of the hardness distribution profile and the efficiency of ion cleaning of the surface.
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Total citations:
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Citations from 2024:
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GOST
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Koval N. et al. Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes // Surface and Coatings Technology. 2018. Vol. 340. pp. 152-158.
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Koval N., Ryabchikov A., Sivin D., Lopatin I., Krysina O., Akhmadeev Y. H., Ignatov D. Yu. Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes // Surface and Coatings Technology. 2018. Vol. 340. pp. 152-158.
Cite this
RIS
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TY - JOUR
DO - 10.1016/j.surfcoat.2018.02.064
UR - https://doi.org/10.1016/j.surfcoat.2018.02.064
TI - Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes
T2 - Surface and Coatings Technology
AU - Koval, N.N.
AU - Ryabchikov, A.I
AU - Sivin, D.O.
AU - Lopatin, I.V.
AU - Krysina, Olga
AU - Akhmadeev, Yuriy H
AU - Ignatov, D Yu
PY - 2018
DA - 2018/04/01
PB - Elsevier
SP - 152-158
VL - 340
SN - 0257-8972
SN - 1879-3347
ER -
Cite this
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@article{2018_Koval,
author = {N.N. Koval and A.I Ryabchikov and D.O. Sivin and I.V. Lopatin and Olga Krysina and Yuriy H Akhmadeev and D Yu Ignatov},
title = {Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes},
journal = {Surface and Coatings Technology},
year = {2018},
volume = {340},
publisher = {Elsevier},
month = {apr},
url = {https://doi.org/10.1016/j.surfcoat.2018.02.064},
pages = {152--158},
doi = {10.1016/j.surfcoat.2018.02.064}
}