Thin Solid Films, volume 743, pages 139064

Structure and morphology of GaInAsP solid solutions on GaAs substrates grown by pulsed laser deposition

Pashchenko Alexander S. ¹

Devitsky Oleg V.

Kasyanov Ivan V

Pashchenko Olga S. ¹

Lunin Leonid S. ¹

Nikulin Dmitry A ²

Devitsky O.V. ¹

Kasyanov I A ¹

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Federal Research Centre Southern Scientific Centre of the Russian Academy of Sciences |

Platov South-Russian State Polytechnic University (NPI), Novocherkassk, 346400 Russia |

Publication type: Journal Article

Publication date: 2022-02-01

Elsevier

Journal: Thin Solid Films

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Quartile WOS

Impact factor: 2.1

ISSN: 00406090

DOI: 10.1016/j.tsf.2021.139064

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Materials Chemistry

Metals and Alloys

Surfaces, Coatings and Films

Electronic, Optical and Magnetic Materials

Surfaces and Interfaces

Abstract

• Pulsed laser deposition of GaInAsP is accompanied by In microdroplets on the surface. • Increasing the laser fluence, the number density of microdroplets decreases. • GaInAsP solid solution is formed by the main phases: GaAs, GaInAs, GaAsP, GaInAsP. GaInAsP solid solutions are synthesized on GaAs substrates by pulsed laser deposition and the effect of the laser fluence on the morphology and structure of the films is studied. It is found that the surface of the films is textured with In microdroplets. It is established that an increase in the laser fluence from 2.0 to 3.2 J/cm 2 increases the average size of the In microdroplets from 0.4 to 1.4 µm, decreases their density from 0.22 to 0.02 µm −2 and also increases the root-mean-square surface roughness of the GaInAsP films from 0.24 to 0.34 nm. The GaInAsP films contain structural defects in the form of misfit dislocations. X-ray diffraction and atomic force microscopy show that the film growth occurs in two stages, with island growth transforming into a quasi-layer-by-layer growth mode. The structural properties and phase composition of the target and GaInAsP films are studied. X-ray diffraction and Raman spectroscopy results indicate the inhomogeneity of the phase composition and the predominance of the short-range order of chemical bonds in the synthesized GaInAsP solid solutions on the GaAs substrates.

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1, 50% Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 1 publication, 50%
Science in the South of Russia	Science in the South of Russia, 1, 50% Science in the South of Russia 1 publication, 50%
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American Vacuum Society	American Vacuum Society, 1, 50% American Vacuum Society 1 publication, 50%
Southern Scientific Center of the Russian Academy of Sciences	Southern Scientific Center of the Russian Academy of Sciences, 1, 50% Southern Scientific Center of the Russian Academy of Sciences 1 publication, 50%
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Pashchenko A. S. et al. Structure and morphology of GaInAsP solid solutions on GaAs substrates grown by pulsed laser deposition // Thin Solid Films. 2022. Vol. 743. p. 139064.

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Pashchenko A. S., Devitsky O. V., Kasyanov I. V., Pashchenko O. S., Lunin L. S., Nikulin D. A., Devitsky O., Kasyanov I. A. Structure and morphology of GaInAsP solid solutions on GaAs substrates grown by pulsed laser deposition // Thin Solid Films. 2022. Vol. 743. p. 139064.

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RIS Copy

TY - JOUR

DO - 10.1016/j.tsf.2021.139064

UR - https://doi.org/10.1016%2Fj.tsf.2021.139064

TI - Structure and morphology of GaInAsP solid solutions on GaAs substrates grown by pulsed laser deposition

T2 - Thin Solid Films

AU - Pashchenko, Alexander S.

AU - Devitsky, Oleg V.

AU - Kasyanov, Ivan V

AU - Pashchenko, Olga S.

AU - Lunin, Leonid S.

AU - Nikulin, Dmitry A

AU - Devitsky, O.V.

AU - Kasyanov, I A

PY - 2022

DA - 2022/02/01 00:00:00

PB - Elsevier

SP - 139064

VL - 743

SN - 0040-6090

ER -

BibTex

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BibTex Copy

@article{2022_Pashchenko,

author = {Alexander S. Pashchenko and Oleg V. Devitsky and Ivan V Kasyanov and Olga S. Pashchenko and Leonid S. Lunin and Dmitry A Nikulin and O.V. Devitsky and I A Kasyanov},

title = {Structure and morphology of GaInAsP solid solutions on GaAs substrates grown by pulsed laser deposition},

journal = {Thin Solid Films},

year = {2022},

volume = {743},

publisher = {Elsevier},

month = {feb},

url = {https://doi.org/10.1016%2Fj.tsf.2021.139064},

pages = {139064},

doi = {10.1016/j.tsf.2021.139064}

}

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Publisher

Elsevier

Journal

Thin Solid Films

Quartile SCImago

Quartile WOS

Impact factor

2.1

ISSN

00406090 (Print)

Labs

Laboratory of Physics and Technology of Semiconductor Nanoheterostructures for Microwave Electronics and Photonics (Heterostructure Technology Research Group)

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