Thin Solid Films

, том 223 , издание 1 , страницы 51-55

Study of diffusion in thin AuCu films

Тип публикации: Journal Article

Дата публикации: 1993-01-01

Elsevier

Thin Solid Films

scimago Q2

wos Q3

БС1

SJR: 0.419

CiteScore: 3.9

Impact factor: 2.0

ISSN: 00406090, 18792731

DOI: 10.1016/0040-6090(93)90726-6

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Materials Chemistry

Metals and Alloys

Surfaces, Coatings and Films

Electronic, Optical and Magnetic Materials

Surfaces and Interfaces

Краткое описание

Temperature dependences of the volume and grain boundary diffusion coefficients of copper and gold were obtained from Rutherford backscattering spectrometry (RBS) investigations of multilayer CuAu targets. The annealing of films was carried out in vacuum in the temperature range from 448 to 523 K. All stages of annealing of the film targets were tested by He+ RBS (E0=1.5 MeV), and element depth concentration profiles were interpreted on the basis of the Whipple theory and Gilmer-Farrell analysis. Grain boundary diffusion coefficients and the corresponding Arrhenius parameters were obtained.

Найдено

5 цитирований

Егоров Владимир

к.ф.-м.н.

57 публикаций, 189 цитирований

Индекс Хирша: 8

Институт проблем технологии микроэлектроники и особочистых материалов РАН

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ALESHIN A. N. et al. Study of diffusion in thin AuCu films // Thin Solid Films. 1993. Vol. 223. No. 1. pp. 51-55.

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ALESHIN A. N., Egorov V., Bokstein B., Kurkin P. V. Study of diffusion in thin AuCu films // Thin Solid Films. 1993. Vol. 223. No. 1. pp. 51-55.

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TY - JOUR

DO - 10.1016/0040-6090(93)90726-6

UR - https://doi.org/10.1016/0040-6090(93)90726-6

TI - Study of diffusion in thin AuCu films

T2 - Thin Solid Films

AU - ALESHIN, A. N.

AU - Egorov, V.K.

AU - Bokstein, B.S

AU - Kurkin, P V

PY - 1993

DA - 1993/01/01

PB - Elsevier

SP - 51-55

IS - 1

VL - 223

SN - 0040-6090

SN - 1879-2731

ER -

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@article{1993_ALESHIN,

author = {A. N. ALESHIN and V.K. Egorov and B.S Bokstein and P V Kurkin},

title = {Study of diffusion in thin AuCu films},

journal = {Thin Solid Films},

year = {1993},

volume = {223},

publisher = {Elsevier},

month = {jan},

url = {https://doi.org/10.1016/0040-6090(93)90726-6},

number = {1},

pages = {51--55},

doi = {10.1016/0040-6090(93)90726-6}

}

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ALESHIN, A. N., et al. “Study of diffusion in thin AuCu films.” Thin Solid Films, vol. 223, no. 1, Jan. 1993, pp. 51-55. https://doi.org/10.1016/0040-6090(93)90726-6.