, volume 223 , issue 1 , pages 51-55

Study of diffusion in thin AuCu films

A. N. ALESHIN ¹

V.K. Egorov ¹

B.S Bokstein ²

P V Kurkin ²

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Institute of Problems of Microelectronics Technology and Superpure Materials, RAS, 142432 Chernogolovka, Moscow District Russian Federation |

Steel and Alloys Institute, Leninsky prosp. 4, 117936 Moscow Russian Federation |

Publication type: Journal Article

Publication date: 1993-01-01

Elsevier

Thin Solid Films

scimago Q2

wos Q3

SJR: 0.419

CiteScore: 3.9

Impact factor: 2.0

ISSN: 00406090, 18792731

DOI: 10.1016/0040-6090(93)90726-6

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Materials Chemistry

Metals and Alloys

Surfaces, Coatings and Films

Electronic, Optical and Magnetic Materials

Surfaces and Interfaces

Abstract

Temperature dependences of the volume and grain boundary diffusion coefficients of copper and gold were obtained from Rutherford backscattering spectrometry (RBS) investigations of multilayer CuAu targets. The annealing of films was carried out in vacuum in the temperature range from 448 to 523 K. All stages of annealing of the film targets were tested by He+ RBS (E0=1.5 MeV), and element depth concentration profiles were interpreted on the basis of the Whipple theory and Gilmer-Farrell analysis. Grain boundary diffusion coefficients and the corresponding Arrhenius parameters were obtained.

Found

5 citations

Egorov Vladimir

PhD in Physics and Mathematics

57 publications, 188 citations

h-index: 8

Institute of Microelectronics Technology and High Purity Materials of the Russian Academy of Sciences

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ALESHIN A. N. et al. Study of diffusion in thin AuCu films // Thin Solid Films. 1993. Vol. 223. No. 1. pp. 51-55.

GOST all authors (up to 50) Copy

ALESHIN A. N., Egorov V., Bokstein B., Kurkin P. V. Study of diffusion in thin AuCu films // Thin Solid Films. 1993. Vol. 223. No. 1. pp. 51-55.

RIS |

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RIS Copy

TY - JOUR

DO - 10.1016/0040-6090(93)90726-6

UR - https://doi.org/10.1016/0040-6090(93)90726-6

TI - Study of diffusion in thin AuCu films

T2 - Thin Solid Films

AU - ALESHIN, A. N.

AU - Egorov, V.K.

AU - Bokstein, B.S

AU - Kurkin, P V

PY - 1993

DA - 1993/01/01

PB - Elsevier

SP - 51-55

IS - 1

VL - 223

SN - 0040-6090

SN - 1879-2731

ER -

BibTex |

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@article{1993_ALESHIN,

author = {A. N. ALESHIN and V.K. Egorov and B.S Bokstein and P V Kurkin},

title = {Study of diffusion in thin AuCu films},

journal = {Thin Solid Films},

year = {1993},

volume = {223},

publisher = {Elsevier},

month = {jan},

url = {https://doi.org/10.1016/0040-6090(93)90726-6},

number = {1},

pages = {51--55},

doi = {10.1016/0040-6090(93)90726-6}

}

MLA

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MLA Copy

ALESHIN, A. N., et al. “Study of diffusion in thin AuCu films.” Thin Solid Films, vol. 223, no. 1, Jan. 1993, pp. 51-55. https://doi.org/10.1016/0040-6090(93)90726-6.