Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films
Kristina Ashurbekova
1, 2, 3, 4
,
Karina Ashurbekova
5, 6, 7, 8
,
Iva Šarić
9, 10, 11, 12, 13
,
E B Modin
5
,
Evgeny Modin
6, 7, 8
,
M. Petravić
9
,
Mladen Petravic
10, 11, 12, 13
,
I.M. Abdulagatov
1
,
Ilmutdin Abdulagatov
2, 3, 4
,
Aziz I. Abdulagatov
1
,
Aziz Abdulagatov
2, 3, 4
,
Mato Knez
5, 6, 7, 8, 9, 10, 11, 14
3
Makhachkala 36700
|
4
RUSSIAN FEDERATION
|
7
Donostia-San Sebastián E-20018
|
8
SPAIN
|
11
Department of Physics and Centre for Micro- and Nanosciences and Technologies
12
Rijeka 51000
|
13
Croatia
|
Publication type: Journal Article
Publication date: 2021-01-21
scimago Q1
wos Q2
SJR: 1.037
CiteScore: 7.4
Impact factor: 4.2
ISSN: 13597345, 1364548X
PubMed ID:
33523070
Materials Chemistry
Metals and Alloys
Surfaces, Coatings and Films
General Chemistry
Ceramics and Composites
Electronic, Optical and Magnetic Materials
Catalysis
Abstract
Here, we report on a simultaneous growth and radical-initiated cross-linking of a hybrid thin film in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited a self-limiting MLD growth behavior and improved properties like 12% higher film density and enhanced stability compared to the non-cross-linked film.
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Metrics
9
Total citations:
9
Citations from 2024:
2
(22%)
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MLA
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GOST
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Ashurbekova K. et al. Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films // Chemical Communications. 2021. Vol. 57. No. 17. pp. 2160-2163.
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Ashurbekova K., Ashurbekova K., Šarić I., Modin E. B., Modin E., Petravić M., Petravic M., Abdulagatov I., Abdulagatov I., Abdulagatov A. I., Abdulagatov A., Knez M. Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films // Chemical Communications. 2021. Vol. 57. No. 17. pp. 2160-2163.
Cite this
RIS
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TY - JOUR
DO - 10.1039/d0cc07858a
UR - https://xlink.rsc.org/?DOI=D0CC07858A
TI - Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films
T2 - Chemical Communications
AU - Ashurbekova, Kristina
AU - Ashurbekova, Karina
AU - Šarić, Iva
AU - Modin, E B
AU - Modin, Evgeny
AU - Petravić, M.
AU - Petravic, Mladen
AU - Abdulagatov, I.M.
AU - Abdulagatov, Ilmutdin
AU - Abdulagatov, Aziz I.
AU - Abdulagatov, Aziz
AU - Knez, Mato
PY - 2021
DA - 2021/01/21
PB - Royal Society of Chemistry (RSC)
SP - 2160-2163
IS - 17
VL - 57
PMID - 33523070
SN - 1359-7345
SN - 1364-548X
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2021_Ashurbekova,
author = {Kristina Ashurbekova and Karina Ashurbekova and Iva Šarić and E B Modin and Evgeny Modin and M. Petravić and Mladen Petravic and I.M. Abdulagatov and Ilmutdin Abdulagatov and Aziz I. Abdulagatov and Aziz Abdulagatov and Mato Knez},
title = {Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films},
journal = {Chemical Communications},
year = {2021},
volume = {57},
publisher = {Royal Society of Chemistry (RSC)},
month = {jan},
url = {https://xlink.rsc.org/?DOI=D0CC07858A},
number = {17},
pages = {2160--2163},
doi = {10.1039/d0cc07858a}
}
Cite this
MLA
Copy
Ashurbekova, Kristina, et al. “Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films.” Chemical Communications, vol. 57, no. 17, Jan. 2021, pp. 2160-2163. https://xlink.rsc.org/?DOI=D0CC07858A.