Nanoscale, volume 13, issue 27, pages 11635-11678
Defects in ferroelectric HfO2
Publication type: Journal Article
Publication date: 2021-06-17
Journal:
Nanoscale
scimago Q1
wos Q1
SJR: 1.416
CiteScore: 12.1
Impact factor: 5.8
ISSN: 20403364, 20403372
General Materials Science
Abstract
Following introduction to defects in classical ferroelectrics as well as in dielectric HfO2, this review covers recent experimental results on the impact of defects in ferroelectric HfO2 on its functional properties and resulting performance of memory devices.
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