Journal of Applied Physics

, том 115 , издание 4 , страницы 44504

Noncontact determination of thin films conductance by SH₀ plate acoustic waves

I. E. Kuznetsova ¹

B D Zaitsev ²

V.I. Anisimkin ¹

A A Teplykh ²

A M Shikhabudinov ²

V. V. KOLESOV ¹

V.G. Yakunin ^{3, 4}

Скрыть аффилиации авторов Показать аффилиации авторов: 4 аффилиации

Institute of Radio Engineering and Electronics of RAS 1 , Moscow 125009, Russia |

Institute of Radio Engineering and Electronics of RAS 2 , Saratov Branch, Saratov 410019, Russia |

Physics Department 3 , , Moscow 119991, Russia |

⁴

Moscow State University 3 , , Moscow 119991, Russia |

Тип публикации: Journal Article

Дата публикации: 2014-01-24

AIP Publishing

Journal of Applied Physics

scimago Q2

wos Q3

БС1

SJR: 0.580

CiteScore: 5.1

Impact factor: 2.5

ISSN: 00218979, 10897550

DOI: 10.1063/1.4862807

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General Physics and Astronomy

Краткое описание

The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductance by using shear-horizontal zero order (SH0) acoustic waves in thin piezoelectric plates. The method is based on the registration of changes in velocity and attenuation of acoustic waves in a piezoelectric plate due to placing the structure “film under study–dielectric substrate” on the certain distance from the plate. The limits of measured values by the suggested method are determined. The theoretical data are compared with the experimental results.

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2 цитирования

Кузнецова Ирен

д.ф.-м.н., доц.

257 публикаций, 2 534 цитирования, 63 рецензии

Индекс Хирша: 25

Институт радиотехники и электроники имени В.А. Котельникова РАН

Области научных интересов

Акустика

Пьезоэлектрики

Сенсоры

Топ-30

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Ultrasonics	Ultrasonics, 2, 66.67% Ultrasonics 2 публикации, 66.67%
	1 2

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	1 2
Elsevier	Elsevier, 2, 66.67% Elsevier 2 публикации, 66.67%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 1, 33.33% Institute of Electrical and Electronics Engineers (IEEE) 1 публикация, 33.33%
	1 2

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Kuznetsova I. E. et al. Noncontact determination of thin films conductance by SH0 plate acoustic waves // Journal of Applied Physics. 2014. Vol. 115. No. 4. p. 44504.

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Kuznetsova I. E., Zaitsev B. D., Anisimkin V., Teplykh A. A., Shikhabudinov A. M., KOLESOV V. V., Yakunin V. Noncontact determination of thin films conductance by SH0 plate acoustic waves // Journal of Applied Physics. 2014. Vol. 115. No. 4. p. 44504.

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TY - JOUR

DO - 10.1063/1.4862807

UR - https://doi.org/10.1063/1.4862807

TI - Noncontact determination of thin films conductance by SH0 plate acoustic waves

T2 - Journal of Applied Physics

AU - Kuznetsova, I. E.

AU - Zaitsev, B D

AU - Anisimkin, V.I.

AU - Teplykh, A A

AU - Shikhabudinov, A M

AU - KOLESOV, V. V.

AU - Yakunin, V.G.

PY - 2014

DA - 2014/01/24

PB - AIP Publishing

SP - 44504

IS - 4

VL - 115

SN - 0021-8979

SN - 1089-7550

ER -

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@article{2014_Kuznetsova,

author = {I. E. Kuznetsova and B D Zaitsev and V.I. Anisimkin and A A Teplykh and A M Shikhabudinov and V. V. KOLESOV and V.G. Yakunin},

title = {Noncontact determination of thin films conductance by SH0 plate acoustic waves},

journal = {Journal of Applied Physics},

year = {2014},

volume = {115},

publisher = {AIP Publishing},

month = {jan},

url = {https://doi.org/10.1063/1.4862807},

number = {4},

pages = {44504},

doi = {10.1063/1.4862807}

}

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Kuznetsova, I. E., et al. “Noncontact determination of thin films conductance by SH0 plate acoustic waves.” Journal of Applied Physics, vol. 115, no. 4, Jan. 2014, p. 44504. https://doi.org/10.1063/1.4862807.