AIP Publishing
Journal of Applied Physics
,  volume 115 ,  issue 4 ,  pages 44504

Noncontact determination of thin films conductance by SH0 plate acoustic waves

Publication type: Journal Article
Publication date: 2014-01-24
AIP Publishing
scimago Q2
wos Q3
SJR: 0.580
CiteScore: 5.1
Impact factor: 2.5
ISSN: 00218979, 10897550
General Physics and Astronomy
Abstract

The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductance by using shear-horizontal zero order (SH0) acoustic waves in thin piezoelectric plates. The method is based on the registration of changes in velocity and attenuation of acoustic waves in a piezoelectric plate due to placing the structure “film under study–dielectric substrate” on the certain distance from the plate. The limits of measured values by the suggested method are determined. The theoretical data are compared with the experimental results.

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GOST |
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GOST Copy
Kuznetsova I. E. et al. Noncontact determination of thin films conductance by SH0 plate acoustic waves // Journal of Applied Physics. 2014. Vol. 115. No. 4. p. 44504.
GOST all authors (up to 50) Copy
Kuznetsova I. E., Zaitsev B. D., Anisimkin V., Teplykh A. A., Shikhabudinov A. M., KOLESOV V. V., Yakunin V. Noncontact determination of thin films conductance by SH0 plate acoustic waves // Journal of Applied Physics. 2014. Vol. 115. No. 4. p. 44504.
RIS |
Cite this
RIS Copy
TY - JOUR
DO - 10.1063/1.4862807
UR - https://doi.org/10.1063/1.4862807
TI - Noncontact determination of thin films conductance by SH0 plate acoustic waves
T2 - Journal of Applied Physics
AU - Kuznetsova, I. E.
AU - Zaitsev, B D
AU - Anisimkin, V.I.
AU - Teplykh, A A
AU - Shikhabudinov, A M
AU - KOLESOV, V. V.
AU - Yakunin, V.G.
PY - 2014
DA - 2014/01/24
PB - AIP Publishing
SP - 44504
IS - 4
VL - 115
SN - 0021-8979
SN - 1089-7550
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2014_Kuznetsova,
author = {I. E. Kuznetsova and B D Zaitsev and V.I. Anisimkin and A A Teplykh and A M Shikhabudinov and V. V. KOLESOV and V.G. Yakunin},
title = {Noncontact determination of thin films conductance by SH0 plate acoustic waves},
journal = {Journal of Applied Physics},
year = {2014},
volume = {115},
publisher = {AIP Publishing},
month = {jan},
url = {https://doi.org/10.1063/1.4862807},
number = {4},
pages = {44504},
doi = {10.1063/1.4862807}
}
MLA
Cite this
MLA Copy
Kuznetsova, I. E., et al. “Noncontact determination of thin films conductance by SH0 plate acoustic waves.” Journal of Applied Physics, vol. 115, no. 4, Jan. 2014, p. 44504. https://doi.org/10.1063/1.4862807.