Open Access
Biosensors based on nanowire field effect transistors with Schottky contacts
T E Smolyarova
1, 2
,
A V Lukyanenko
2, 3
,
A S Tarasov
2, 3
,
L V Shanidze
1, 2
,
F.A. Baron
3
,
F V Zelenov
3
,
I A Yakovlev
3
,
N.V. Volkov
1
Publication type: Journal Article
Publication date: 2019-12-01
SJR: 0.187
CiteScore: 1.3
Impact factor: —
ISSN: 17426588, 17426596
General Physics and Astronomy
Abstract
A top-down nanofabrication approach was used to obtain silicon nanowires from silicon-on-insulator wafers using direct-write electron beam lithography and plasma-reactive ion etching. Fabricated with designed pattern silicon nanowires are 0.4, 0.8, 2 μm in width and 100 nm in height. The devices can be applied in future medical diagnostic applications as novel biosensors with detection principle based on the changes in electrical characteristics of the silicon nanowires functionalized with thiol-containing molecules.
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Smolyarova T. E. et al. Biosensors based on nanowire field effect transistors with Schottky contacts // Journal of Physics: Conference Series. 2019. Vol. 1410. No. 1. p. 12013.
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Smolyarova T. E., Lukyanenko A. V., Tarasov A. S., Shanidze L. V., Baron F., Zelenov F. V., Yakovlev I. A., Volkov N. Biosensors based on nanowire field effect transistors with Schottky contacts // Journal of Physics: Conference Series. 2019. Vol. 1410. No. 1. p. 12013.
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TY - JOUR
DO - 10.1088/1742-6596/1410/1/012013
UR - https://doi.org/10.1088/1742-6596/1410/1/012013
TI - Biosensors based on nanowire field effect transistors with Schottky contacts
T2 - Journal of Physics: Conference Series
AU - Smolyarova, T E
AU - Lukyanenko, A V
AU - Tarasov, A S
AU - Shanidze, L V
AU - Baron, F.A.
AU - Zelenov, F V
AU - Yakovlev, I A
AU - Volkov, N.V.
PY - 2019
DA - 2019/12/01
PB - IOP Publishing
SP - 12013
IS - 1
VL - 1410
SN - 1742-6588
SN - 1742-6596
ER -
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@article{2019_Smolyarova,
author = {T E Smolyarova and A V Lukyanenko and A S Tarasov and L V Shanidze and F.A. Baron and F V Zelenov and I A Yakovlev and N.V. Volkov},
title = {Biosensors based on nanowire field effect transistors with Schottky contacts},
journal = {Journal of Physics: Conference Series},
year = {2019},
volume = {1410},
publisher = {IOP Publishing},
month = {dec},
url = {https://doi.org/10.1088/1742-6596/1410/1/012013},
number = {1},
pages = {12013},
doi = {10.1088/1742-6596/1410/1/012013}
}
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MLA
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Smolyarova, T. E., et al. “Biosensors based on nanowire field effect transistors with Schottky contacts.” Journal of Physics: Conference Series, vol. 1410, no. 1, Dec. 2019, p. 12013. https://doi.org/10.1088/1742-6596/1410/1/012013.
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