Journal of Applied Crystallography, volume 41, issue 1, pages 143-152

Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment

Colombi P. ¹

Agnihotri D. K. ²

Asadchikov V. E. ³

Bontempi E. ¹

Bowen D. K. ⁴

Chang C.-H. ⁵

Depero L. E. ¹

Farnworth M. ⁶

Fujimoto T. ⁷

GIBAUD A. ⁸

Jergel M. ⁹

Krumrey M. ¹⁰

Lafford T. A. ⁴

Lamperti A. ¹¹

Ma T. ¹²

Matyi R. J. ¹³

Meduna M. ¹⁴

Milita S. ¹⁵

Sakurai K. ¹⁶

Shabel'nikov L. ¹⁷

Ulyanenkov A. ¹⁸

van der Lee A. ¹⁹

Wiemer C ²⁰

Hide authors affiliations Show authors affiliations: 20 affiliations

Chemistry for Technologies Laboratory, University of Brescia, Brescia, Italy |

Jordan Valley Semiconductors Inc., Austin, USA |

X-ray Reflectivity of Institute of Crystallography RAS, Russia |

⁴

Bede X-ray Metrology (Bede PLC), UK |

⁵

Materials Analysis and Test Group, RIST, Republic of Korea |

⁶

Pilkington European Technical Centre, Lathom, UK |

⁷

Surface and Thin Film Standards Section, National Metrology Institute of Japan, (NMIJ), AIST, Japan |

⁸

Laboratoire de Physique de l'État Condensé, Faculté des Sciences, France |

⁹

Institute of Physics SAS, Bratislava, Slovak Republic |

¹⁰

Physikalisch-Technische Bundesanstalt, Berlin, Germany |

¹¹

Department of Physics, University of Durham, UK |

¹²

General Research Institute for Nonferrous Metals, People's Republic of China |

¹³

College of Nanoscale Science and Engineering, Albany NanoTech, University at Albany, USA |

¹⁴

Department of Condensed Matter Physics, Masaryk University, Brno, Czech Republic |

¹⁵

CNR-IMM, Bologna, Italy |

¹⁶

National Institute for Materials Science, Japan |

¹⁷

Institute of Microelectronics Technologies RAS, Russia |

¹⁸

Research Department, Bruker AXS GmbH, Karlsruhe, Germany |

¹⁹

Institut Européen des Membranes (UMR 5635), Université de Montpellier II, France |

²⁰

CNR-INFM, Laboratory MDM, Agrate Brianza (MI), Italy |

Publication type: Journal Article

Publication date: 2008-01-16

International Union of Crystallography (IUCr)

Journal: Journal of Applied Crystallography

Quartile SCImago

Quartile WOS

Impact factor: 6.1

ISSN: 00218898, 16005767

DOI: 10.1107/s0021889807051904

Copy DOI

General Biochemistry, Genetics and Molecular Biology

Abstract

X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project `X-ray reflectivity measurements for evaluation of thin films and multilayers', the aim of which is to produce a `good practice' manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. A simpler test sample which does not develop a surface oxide layer over time is now the subject of a follow-up study.

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Journal of Applied Physics	Journal of Applied Physics, 1, 2.27% Journal of Applied Physics 1 publication, 2.27%
Review of Scientific Instruments	Review of Scientific Instruments, 1, 2.27% Review of Scientific Instruments 1 publication, 2.27%
Physical Review B	Physical Review B, 1, 2.27% Physical Review B 1 publication, 2.27%
Journal of Applied Crystallography	Journal of Applied Crystallography, 1, 2.27% Journal of Applied Crystallography 1 publication, 2.27%
Nanoscale Research Letters	Nanoscale Research Letters, 1, 2.27% Nanoscale Research Letters 1 publication, 2.27%
Analytical and Bioanalytical Chemistry	Analytical and Bioanalytical Chemistry, 1, 2.27% Analytical and Bioanalytical Chemistry 1 publication, 2.27%
Journal of Materials Science	Journal of Materials Science, 1, 2.27% Journal of Materials Science 1 publication, 2.27%
Environmental Research	Environmental Research, 1, 2.27% Environmental Research 1 publication, 2.27%
Applied Surface Science	Applied Surface Science, 1, 2.27% Applied Surface Science 1 publication, 2.27%
Reports on Progress in Physics	Reports on Progress in Physics, 1, 2.27% Reports on Progress in Physics 1 publication, 2.27%
Sensors and Actuators, B: Chemical	Sensors and Actuators, B: Chemical, 1, 2.27% Sensors and Actuators, B: Chemical 1 publication, 2.27%
Materials Characterization	Materials Characterization, 1, 2.27% Materials Characterization 1 publication, 2.27%
Physics Procedia	Physics Procedia, 1, 2.27% Physics Procedia 1 publication, 2.27%
Talanta	Talanta, 1, 2.27% Talanta 1 publication, 2.27%
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Optics Communications	Optics Communications, 1, 2.27% Optics Communications 1 publication, 2.27%
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ChemPhysChem	ChemPhysChem, 1, 2.27% ChemPhysChem 1 publication, 2.27%
Advanced Functional Materials	Advanced Functional Materials, 1, 2.27% Advanced Functional Materials 1 publication, 2.27%
ACS Nano	ACS Nano, 1, 2.27% ACS Nano 1 publication, 2.27%
ACS applied materials & interfaces	ACS applied materials & interfaces, 1, 2.27% ACS applied materials & interfaces 1 publication, 2.27%
Crystallography Reports	Crystallography Reports, 1, 2.27% Crystallography Reports 1 publication, 2.27%
Journal of Surface Investigation	Journal of Surface Investigation, 1, 2.27% Journal of Surface Investigation 1 publication, 2.27%

	1 2 3

Citations by publishers

	2 4 6 8 10 12
Elsevier	Elsevier, 11, 25% Elsevier 11 publications, 25%
Wiley	Wiley, 7, 15.91% Wiley 7 publications, 15.91%
Springer Nature	Springer Nature, 5, 11.36% Springer Nature 5 publications, 11.36%
American Institute of Physics (AIP)	American Institute of Physics (AIP), 4, 9.09% American Institute of Physics (AIP) 4 publications, 9.09%
IOP Publishing	IOP Publishing, 4, 9.09% IOP Publishing 4 publications, 9.09%
Multidisciplinary Digital Publishing Institute (MDPI)	Multidisciplinary Digital Publishing Institute (MDPI), 2, 4.55% Multidisciplinary Digital Publishing Institute (MDPI) 2 publications, 4.55%
American Chemical Society (ACS)	American Chemical Society (ACS), 2, 4.55% American Chemical Society (ACS) 2 publications, 4.55%
Pleiades Publishing	Pleiades Publishing, 2, 4.55% Pleiades Publishing 2 publications, 4.55%
American Physical Society (APS)	American Physical Society (APS), 1, 2.27% American Physical Society (APS) 1 publication, 2.27%
International Union of Crystallography (IUCr)	International Union of Crystallography (IUCr), 1, 2.27% International Union of Crystallography (IUCr) 1 publication, 2.27%
IEEE	IEEE, 1, 2.27% IEEE 1 publication, 2.27%
Chinese Physical Society	Chinese Physical Society, 1, 2.27% Chinese Physical Society 1 publication, 2.27%
Japan Society of Applied Physics	Japan Society of Applied Physics, 1, 2.27% Japan Society of Applied Physics 1 publication, 2.27%
	2 4 6 8 10 12

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Colombi P. et al. Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment // Journal of Applied Crystallography. 2008. Vol. 41. No. 1. pp. 143-152.

GOST all authors (up to 50) Copy

Colombi P., Agnihotri D. K., Asadchikov V. E., Bontempi E., Bowen D. K., Chang C., Depero L. E., Farnworth M., Fujimoto T., GIBAUD A., Jergel M., Krumrey M., Lafford T. A., Lamperti A., Ma T., Matyi R. J., Meduna M., Milita S., Sakurai K., Shabel'nikov L., Ulyanenkov A., van der Lee A., Wiemer C. Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment // Journal of Applied Crystallography. 2008. Vol. 41. No. 1. pp. 143-152.

RIS |

Cite this

RIS Copy

TY - JOUR

DO - 10.1107/s0021889807051904

UR - https://doi.org/10.1107%2Fs0021889807051904

TI - Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment

T2 - Journal of Applied Crystallography

AU - Colombi, P.

AU - Agnihotri, D. K.

AU - Asadchikov, V. E.

AU - Bontempi, E.

AU - Bowen, D. K.

AU - Chang, C.-H.

AU - Depero, L. E.

AU - Farnworth, M.

AU - Fujimoto, T.

AU - GIBAUD, A.

AU - Jergel, M.

AU - Krumrey, M.

AU - Lafford, T. A.

AU - Lamperti, A.

AU - Ma, T.

AU - Matyi, R. J.

AU - Meduna, M.

AU - Milita, S.

AU - Sakurai, K.

AU - Shabel'nikov, L.

AU - Ulyanenkov, A.

AU - van der Lee, A.

AU - Wiemer, C

PY - 2008

DA - 2008/01/16 00:00:00

PB - International Union of Crystallography (IUCr)

SP - 143-152

IS - 1

VL - 41

SN - 0021-8898

SN - 1600-5767

ER -

BibTex |

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BibTex Copy

@article{2008_Colombi,

author = {P. Colombi and D. K. Agnihotri and V. E. Asadchikov and E. Bontempi and D. K. Bowen and C.-H. Chang and L. E. Depero and M. Farnworth and T. Fujimoto and A. GIBAUD and M. Jergel and M. Krumrey and T. A. Lafford and A. Lamperti and T. Ma and R. J. Matyi and M. Meduna and S. Milita and K. Sakurai and L. Shabel'nikov and A. Ulyanenkov and A. van der Lee and C Wiemer},

title = {Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment},

journal = {Journal of Applied Crystallography},

year = {2008},

volume = {41},

publisher = {International Union of Crystallography (IUCr)},

month = {jan},

url = {https://doi.org/10.1107%2Fs0021889807051904},

number = {1},

pages = {143--152},

doi = {10.1107/s0021889807051904}

}

MLA

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MLA Copy

Colombi, P., et al. “Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment.” Journal of Applied Crystallography, vol. 41, no. 1, Jan. 2008, pp. 143-152. https://doi.org/10.1107%2Fs0021889807051904.

Found error?

Publisher

International Union of Crystallography (IUCr)

Journal

Journal of Applied Crystallography

Quartile SCImago

Quartile WOS

Impact factor

6.1

ISSN

00218898 (Print)
16005767 (Electronic)

Labs

Laboratory of Reflectometry and Small Angle Scattering

Profiles

Asadchikov, Victor E.