Journal of Applied Crystallography, volume 41, issue 1, pages 143-152
Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment
P. Colombi
1
,
D. K. Agnihotri
2
,
V. E. Asadchikov
3
,
E. Bontempi
1
,
D. K. Bowen
4
,
C.-H. Chang
5
,
L. E. Depero
1
,
M. Farnworth
6
,
T. Fujimoto
7
,
A. GIBAUD
8
,
M. Jergel
9
,
M. Krumrey
10
,
T. A. Lafford
4
,
A. Lamperti
11
,
T. Ma
12
,
R. J. Matyi
13
,
M. Meduna
14
,
S. Milita
15
,
K. Sakurai
16
,
L. Shabel'nikov
17
,
A. Ulyanenkov
18
,
A. van der Lee
19
,
C Wiemer
20
2
Jordan Valley Semiconductors Inc., Austin, USA
|
4
Bede X-ray Metrology (Bede PLC), UK
|
5
Materials Analysis and Test Group, RIST, Republic of Korea
|
6
Pilkington European Technical Centre, Lathom, UK
|
7
8
Laboratoire de Physique de l'État Condensé, Faculté des Sciences, France
|
9
Institute of Physics SAS, Bratislava, Slovak Republic
|
11
Department of Physics, University of Durham, UK
|
12
General Research Institute for Nonferrous Metals, People's Republic of China
|
13
College of Nanoscale Science and Engineering, Albany NanoTech, University at Albany, USA
|
14
Department of Condensed Matter Physics, Masaryk University, Brno, Czech Republic
|
17
Institute of Microelectronics Technologies RAS, Russia
|
18
Research Department, Bruker AXS GmbH, Karlsruhe, Germany
|
19
Institut Européen des Membranes (UMR 5635), Université de Montpellier II, France
|
20
CNR-INFM, Laboratory MDM, Agrate Brianza (MI), Italy
|
Publication type: Journal Article
Publication date: 2008-01-16
Journal:
Journal of Applied Crystallography
Q1
Q1
SJR: 1.561
CiteScore: 10.0
Impact factor: 5.2
ISSN: 00218898, 16005767
General Biochemistry, Genetics and Molecular Biology
Abstract
X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project `X-ray reflectivity measurements for evaluation of thin films and multilayers', the aim of which is to produce a `good practice' manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. A simpler test sample which does not develop a surface oxide layer over time is now the subject of a follow-up study.
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Colombi P. et al. Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment // Journal of Applied Crystallography. 2008. Vol. 41. No. 1. pp. 143-152.
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Colombi P., Agnihotri D. K., Asadchikov V. E., Bontempi E., Bowen D. K., Chang C., Depero L. E., Farnworth M., Fujimoto T., GIBAUD A., Jergel M., Krumrey M., Lafford T. A., Lamperti A., Ma T., Matyi R. J., Meduna M., Milita S., Sakurai K., Shabel'nikov L., Ulyanenkov A., van der Lee A., Wiemer C. Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment // Journal of Applied Crystallography. 2008. Vol. 41. No. 1. pp. 143-152.
Cite this
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TY - JOUR
DO - 10.1107/s0021889807051904
UR - https://doi.org/10.1107/s0021889807051904
TI - Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment
T2 - Journal of Applied Crystallography
AU - Colombi, P.
AU - Agnihotri, D. K.
AU - Asadchikov, V. E.
AU - Bontempi, E.
AU - Bowen, D. K.
AU - Chang, C.-H.
AU - Depero, L. E.
AU - Farnworth, M.
AU - Fujimoto, T.
AU - GIBAUD, A.
AU - Jergel, M.
AU - Krumrey, M.
AU - Lafford, T. A.
AU - Lamperti, A.
AU - Ma, T.
AU - Matyi, R. J.
AU - Meduna, M.
AU - Milita, S.
AU - Sakurai, K.
AU - Shabel'nikov, L.
AU - Ulyanenkov, A.
AU - van der Lee, A.
AU - Wiemer, C
PY - 2008
DA - 2008/01/16
PB - International Union of Crystallography (IUCr)
SP - 143-152
IS - 1
VL - 41
SN - 0021-8898
SN - 1600-5767
ER -
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@article{2008_Colombi,
author = {P. Colombi and D. K. Agnihotri and V. E. Asadchikov and E. Bontempi and D. K. Bowen and C.-H. Chang and L. E. Depero and M. Farnworth and T. Fujimoto and A. GIBAUD and M. Jergel and M. Krumrey and T. A. Lafford and A. Lamperti and T. Ma and R. J. Matyi and M. Meduna and S. Milita and K. Sakurai and L. Shabel'nikov and A. Ulyanenkov and A. van der Lee and C Wiemer},
title = {Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment},
journal = {Journal of Applied Crystallography},
year = {2008},
volume = {41},
publisher = {International Union of Crystallography (IUCr)},
month = {jan},
url = {https://doi.org/10.1107/s0021889807051904},
number = {1},
pages = {143--152},
doi = {10.1107/s0021889807051904}
}
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Colombi, P., et al. “Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment.” Journal of Applied Crystallography, vol. 41, no. 1, Jan. 2008, pp. 143-152. https://doi.org/10.1107/s0021889807051904.
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