volume 11 issue 1 pages 45-53

Fabrication and characterization of hydrogel-based microvalves

R. H. LIU
Qing Yu
D J Beebe
Publication typeJournal Article
Publication date2002-08-24
scimago Q2
wos Q2
SJR0.592
CiteScore6.2
Impact factor3.1
ISSN10577157, 19410158
Abstract
Several microvalves utilizing stimuli-responsive hydrogel materials have been developed. The hydrogel components are fabricated inside microchannels using a liquid phase polymerization process. In-channel processing greatly simplifies device construction, assembly, and operation since the functional components are fabricated in situ and can perform both sensing and actuation functions. Two in situ photopolymerization techniques, "laminar stream mode" and "mask mode," have been explored. Three two-dimensional (2-D) valves were fabricated and tested (response time, pressure drop, maximum differential pressure). In addition, a hydrogel/PDMS three-dimensional (3-D) hybrid valve that physically separates the sensing and regulated streams was demonstrated. Analytical modeling was performed on the 3-D valve. Hydrogel-based microvalves have a number of advantages over conventional microvalves, including relatively simple fabrication, no external power requirement, no integrated electronics, large displacement (185 /spl mu/m), and large force generation (22 mN).
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LIU R. H., Yu Q., Beebe D. J. Fabrication and characterization of hydrogel-based microvalves // Journal of Microelectromechanical Systems. 2002. Vol. 11. No. 1. pp. 45-53.
GOST all authors (up to 50) Copy
LIU R. H., Yu Q., Beebe D. J. Fabrication and characterization of hydrogel-based microvalves // Journal of Microelectromechanical Systems. 2002. Vol. 11. No. 1. pp. 45-53.
RIS |
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RIS Copy
TY - JOUR
DO - 10.1109/84.982862
UR - https://doi.org/10.1109/84.982862
TI - Fabrication and characterization of hydrogel-based microvalves
T2 - Journal of Microelectromechanical Systems
AU - LIU, R. H.
AU - Yu, Qing
AU - Beebe, D J
PY - 2002
DA - 2002/08/24
PB - Institute of Electrical and Electronics Engineers (IEEE)
SP - 45-53
IS - 1
VL - 11
SN - 1057-7157
SN - 1941-0158
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2002_LIU,
author = {R. H. LIU and Qing Yu and D J Beebe},
title = {Fabrication and characterization of hydrogel-based microvalves},
journal = {Journal of Microelectromechanical Systems},
year = {2002},
volume = {11},
publisher = {Institute of Electrical and Electronics Engineers (IEEE)},
month = {aug},
url = {https://doi.org/10.1109/84.982862},
number = {1},
pages = {45--53},
doi = {10.1109/84.982862}
}
MLA
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MLA Copy
LIU, R. H., et al. “Fabrication and characterization of hydrogel-based microvalves.” Journal of Microelectromechanical Systems, vol. 11, no. 1, Aug. 2002, pp. 45-53. https://doi.org/10.1109/84.982862.