Design and Optimization of the IDT Resonator Parameters by Using Comsol

In this paper the results of design and optimization of the interdigital transducer (IDT) parameters by using 2D FEM analysis are presented. An IDT with 5 pairs of aluminum strips placed on Y-cut of a LiNbO3 plate with thickness 370 mkm was considered. The frequency dependencies of the real part of the IDT impedance for different values of aperture calculated by Comsol were obtained. that a reducing in the aperture leads to a more than two times increase in the magnitudes of the resonance responses corresponding to various acoustic modes which could be excited by this IDT. Thus, it can be concluded that the size of the developed devices can be reduced by reducing the aperture of the IDT.