Institute of Electrical and Electronics Engineers (IEEE)

, pages 272

PECVD-fabricated microresonators for nonlinear photonics

N Yu Dmitriev ¹

A M Mumlyakov ²

M V Shibalov ²

I V Trofimov ²

I A Filippov ²

A.A. Anikanov ²

M. A. Tarkhov ²

I. A. Bilenko ¹

Hide authors affiliations Show authors affiliations: 2 affiliations

Russian Quantum Center,Skolkovo,Russia,143026 |

Institute of Nanotechnology of Microelectronics of Russian Academy of Science,Moscow,Russia,119991 |

Publication type: Proceedings Article

Publication date: 2024-07-01

Institute of Electrical and Electronics Engineers (IEEE)

DOI: 10.1109/iclo59702.2024.10624213

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Abstract

We demonstrate characteristics of high-Q ring silicon nitride microresonators fabricated with novel PECVD process. Proposed process allows to fabricate silicon nitride waveguides with thickness over 1 um. Studied 1um-thick silicon nitride ring microresontors features anomalous GVD and loaded Q factor over 1 million.

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