Hybrid acousto-nano-biosensor

Publication type: Proceedings Article
Publication date: 2019-03-15
SPIE-Intl Soc Optical Eng
SJR: 0.146
CiteScore: 0.5
Impact factor: —
ISSN: 0277786X, 1996756X
Abstract
The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nanotransduces having size about 60-80 nm. These transducers were produced by using negative electron-beam nanolithography.
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Kuznetsova I. et al. Hybrid acousto-nano-biosensor // Proceedings of SPIE - The International Society for Optical Engineering. 2019. Vol. 11022.
GOST all authors (up to 50) Copy
Kuznetsova I., Kolesov V., Anisimkin V., Soldatov E., Dagesyan S., MELNIKOV A., Kashin V., Smirnov A. Hybrid acousto-nano-biosensor // Proceedings of SPIE - The International Society for Optical Engineering. 2019. Vol. 11022.
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RIS Copy
TY - CPAPER
DO - 10.1117/12.2521796
UR - https://doi.org/10.1117/12.2521796
TI - Hybrid acousto-nano-biosensor
T2 - Proceedings of SPIE - The International Society for Optical Engineering
AU - Kuznetsova, Iren
AU - Kolesov, Vladimir
AU - Anisimkin, Vladimir
AU - Soldatov, Eugenii
AU - Dagesyan, Sarkis
AU - MELNIKOV, ALEXANDER
AU - Kashin, Vadim
AU - Smirnov, Andrey
PY - 2019
DA - 2019/03/15
PB - SPIE-Intl Soc Optical Eng
VL - 11022
SN - 0277-786X
SN - 1996-756X
ER -
BibTex
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@inproceedings{2019_Kuznetsova,
author = {Iren Kuznetsova and Vladimir Kolesov and Vladimir Anisimkin and Eugenii Soldatov and Sarkis Dagesyan and ALEXANDER MELNIKOV and Vadim Kashin and Andrey Smirnov},
title = {Hybrid acousto-nano-biosensor},
year = {2019},
volume = {11022},
month = {mar},
publisher = {SPIE-Intl Soc Optical Eng}
}