Hybrid acousto-nano-biosensor

Тип публикации: Proceedings Article
Дата публикации: 2019-03-15
SPIE-Intl Soc Optical Eng
SJR: 0.146
CiteScore: 0.5
Impact factor: —
ISSN: 0277786X, 1996756X
Краткое описание
The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nanotransduces having size about 60-80 nm. These transducers were produced by using negative electron-beam nanolithography.

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Kuznetsova I. et al. Hybrid acousto-nano-biosensor // Proceedings of SPIE - The International Society for Optical Engineering. 2019. Vol. 11022.
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Kuznetsova I., Kolesov V., Anisimkin V., Soldatov E., Dagesyan S., MELNIKOV A., Kashin V., Smirnov A. Hybrid acousto-nano-biosensor // Proceedings of SPIE - The International Society for Optical Engineering. 2019. Vol. 11022.
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TY - CPAPER
DO - 10.1117/12.2521796
UR - https://doi.org/10.1117/12.2521796
TI - Hybrid acousto-nano-biosensor
T2 - Proceedings of SPIE - The International Society for Optical Engineering
AU - Kuznetsova, Iren
AU - Kolesov, Vladimir
AU - Anisimkin, Vladimir
AU - Soldatov, Eugenii
AU - Dagesyan, Sarkis
AU - MELNIKOV, ALEXANDER
AU - Kashin, Vadim
AU - Smirnov, Andrey
PY - 2019
DA - 2019/03/15
PB - SPIE-Intl Soc Optical Eng
VL - 11022
SN - 0277-786X
SN - 1996-756X
ER -
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@inproceedings{2019_Kuznetsova,
author = {Iren Kuznetsova and Vladimir Kolesov and Vladimir Anisimkin and Eugenii Soldatov and Sarkis Dagesyan and ALEXANDER MELNIKOV and Vadim Kashin and Andrey Smirnov},
title = {Hybrid acousto-nano-biosensor},
year = {2019},
volume = {11022},
month = {mar},
publisher = {SPIE-Intl Soc Optical Eng}
}
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