Secondary electron emission spectra and energy selective imaging in helium ion microscope

Тип публикации: Proceedings Article
Дата публикации: 2011-05-13
SPIE-Intl Soc Optical Eng
SJR: 0.146
CiteScore: 0.5
Impact factor: —
ISSN: 0277786X, 1996756X
Краткое описание
Secondary electron energy distribution (SEED) from Mo, Ni and Pt was measured in helium ion microscope (HeIM) with semispherical retarding potential technique. For all investigated metals the energy position of the SEED maximum and the SEED width in HeIM is found to be noticeably less than in conventional scanning electron microscope and even less than predicted by previous numerical simulations. A simple analytical phenomenological function to describe the SEED shape is suggested. The reasons of the lower energy transfer efficiency in ion-electron interaction are discussed. The impact of the presence of a surface layer on SEED in HeIM is investigated and energy selective images of the specimen with hydrocarbon contaminated region are presented.
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Petrov Y., Vyvenko O. F. Secondary electron emission spectra and energy selective imaging in helium ion microscope // Proceedings of SPIE - The International Society for Optical Engineering. 2011. Vol. 8036.
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Petrov Y., Vyvenko O. F. Secondary electron emission spectra and energy selective imaging in helium ion microscope // Proceedings of SPIE - The International Society for Optical Engineering. 2011. Vol. 8036.
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TY - CPAPER
DO - 10.1117/12.886347
UR - https://doi.org/10.1117/12.886347
TI - Secondary electron emission spectra and energy selective imaging in helium ion microscope
T2 - Proceedings of SPIE - The International Society for Optical Engineering
AU - Petrov, Yu.
AU - Vyvenko, O. F.
PY - 2011
DA - 2011/05/13
PB - SPIE-Intl Soc Optical Eng
VL - 8036
SN - 0277-786X
SN - 1996-756X
ER -
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@inproceedings{2011_Petrov,
author = {Yu. Petrov and O. F. Vyvenko},
title = {Secondary electron emission spectra and energy selective imaging in helium ion microscope},
year = {2011},
volume = {8036},
month = {may},
publisher = {SPIE-Intl Soc Optical Eng}
}