Journal of Experimental and Theoretical Physics, volume 127, issue 6, pages 985-993
Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the “Shooting Through” Geometry
Lopatin A.Ya
1
,
Parev D E
1
,
Pestov A E
1
,
Salashchenko N N
1
,
Chkhalo N I
1
,
Demin G D
2
,
Dyuzhev N A
2
,
Makhiboroda M A
2
,
Kochetkov A A
3
Publication type: Journal Article
Publication date: 2018-12-01
Quartile SCImago
Q3
Quartile WOS
Q4
Impact factor: 1.1
ISSN: 10637761, 10906509
General Physics and Astronomy
Abstract
A model is presented and the interaction of accelerated electrons with atoms in a thin film “shooting through” Be target is theoretically described. The algorithm is based on the Monte Carlo simulation of the electron motion in the target accompanied by energy losses in elastic and inelastic interactions. The conversion of the electron energy to the radiation energy in the 11.4-nm Kα line of Be and the emission spectrum are calculated. The maximum conversion efficiency to the solid angle 4π CE = 3.0 × 10–4 is achieved for the electron energy Ee = 2.0 keV and a 40-nm-thick freely suspended beryllium film. 200-nm and 400-nm-thick films were experimentally investigated. The maximum conversion efficiency to the solid angle 4π for a 200‑nm-thick film and the electron energy Ee = 2.75 keV was CEexp = 9.2 × 10–5, whereas the calculated value was CEcalc = 2.5 × 10–4. The observed discrepancy between the theory and experiment is explained in the paper.
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Technical Physics
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Technical Physics
2 publications, 66.67%
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Physics-Uspekhi
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Citations by publishers
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Pleiades Publishing
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2 publications, 66.67%
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Uspekhi Fizicheskikh Nauk Journal
1 publication, 33.33%
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1
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Lopatin A. et al. Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the “Shooting Through” Geometry // Journal of Experimental and Theoretical Physics. 2018. Vol. 127. No. 6. pp. 985-993.
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Lopatin A., Parev D. E., Pestov A. E., Salashchenko N. N., Chkhalo N. I., Demin G. D., Dyuzhev N. A., Makhiboroda M. A., Kochetkov A. A. Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the “Shooting Through” Geometry // Journal of Experimental and Theoretical Physics. 2018. Vol. 127. No. 6. pp. 985-993.
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TY - JOUR
DO - 10.1134/s1063776118100175
UR - https://doi.org/10.1134%2Fs1063776118100175
TI - Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the “Shooting Through” Geometry
T2 - Journal of Experimental and Theoretical Physics
AU - Lopatin, A.Ya
AU - Parev, D E
AU - Pestov, A E
AU - Salashchenko, N N
AU - Chkhalo, N I
AU - Demin, G D
AU - Dyuzhev, N A
AU - Makhiboroda, M A
AU - Kochetkov, A A
PY - 2018
DA - 2018/12/01 00:00:00
PB - Pleiades Publishing
SP - 985-993
IS - 6
VL - 127
SN - 1063-7761
SN - 1090-6509
ER -
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@article{2018_Lopatin,
author = {A.Ya Lopatin and D E Parev and A E Pestov and N N Salashchenko and N I Chkhalo and G D Demin and N A Dyuzhev and M A Makhiboroda and A A Kochetkov},
title = {Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the “Shooting Through” Geometry},
journal = {Journal of Experimental and Theoretical Physics},
year = {2018},
volume = {127},
publisher = {Pleiades Publishing},
month = {dec},
url = {https://doi.org/10.1134%2Fs1063776118100175},
number = {6},
pages = {985--993},
doi = {10.1134/s1063776118100175}
}
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Lopatin, A.Ya, et al. “Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the “Shooting Through” Geometry.” Journal of Experimental and Theoretical Physics, vol. 127, no. 6, Dec. 2018, pp. 985-993. https://doi.org/10.1134%2Fs1063776118100175.
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