Microspectroscopic imaging of heterophase layers of metal-oxide sensors using a video camera

The methodological foundations of digital specular reflectance microspectroscopic imaging are reported. The digital optical images of a microscopic area of the metal surface with an inhomogeneous nanostructural layer can be processed using the algorithms of spectroscopic imaging ellipsometry modified to fit reflectometry. This makes it possible to monitor the thickness, topography, and chemical composition depth profiles of thin surface metal-oxide nanolayered structures, active layers of microsensors with an active substrate. The method has been used for nondestructive analysis of the thickness and chemical composition over the volume of the oxide layer on the surface of heat-treated steel X18H10T, a system with pronounced photo-electrochemical response.