Scanning helium ion microscope: Distribution of secondary electrons and ion channeling
Publication type: Journal Article
Publication date: 2010-10-13
scimago Q4
wos Q4
SJR: 0.165
CiteScore: 0.8
Impact factor: 0.4
ISSN: 10274510, 18197094
Surfaces, Coatings and Films
Abstract
The principles and features of operation of a scanning helium microscope are reviewed briefly. The measurement data on the energy distribution of secondary electrons excited by the ion beam in an Au film and on the angular dependence of the backscattered ion yield are obtained and presented for the first time. The effect of ion channeling in silicon single crystal with the (110) orientation is demonstrated.
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Total citations:
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Citations from 2024:
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GOST
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PETROV Y. V., Vyvenko O. F., Bondarenko A. Scanning helium ion microscope: Distribution of secondary electrons and ion channeling // Journal of Surface Investigation. 2010. Vol. 4. No. 5. pp. 792-795.
GOST all authors (up to 50)
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PETROV Y. V., Vyvenko O. F., Bondarenko A. Scanning helium ion microscope: Distribution of secondary electrons and ion channeling // Journal of Surface Investigation. 2010. Vol. 4. No. 5. pp. 792-795.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1134/S1027451010050186
UR - https://doi.org/10.1134/S1027451010050186
TI - Scanning helium ion microscope: Distribution of secondary electrons and ion channeling
T2 - Journal of Surface Investigation
AU - PETROV, YU. V.
AU - Vyvenko, O F
AU - Bondarenko, A.S
PY - 2010
DA - 2010/10/13
PB - Pleiades Publishing
SP - 792-795
IS - 5
VL - 4
SN - 1027-4510
SN - 1819-7094
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2010_PETROV,
author = {YU. V. PETROV and O F Vyvenko and A.S Bondarenko},
title = {Scanning helium ion microscope: Distribution of secondary electrons and ion channeling},
journal = {Journal of Surface Investigation},
year = {2010},
volume = {4},
publisher = {Pleiades Publishing},
month = {oct},
url = {https://doi.org/10.1134/S1027451010050186},
number = {5},
pages = {792--795},
doi = {10.1134/S1027451010050186}
}
Cite this
MLA
Copy
PETROV, YU. V., et al. “Scanning helium ion microscope: Distribution of secondary electrons and ion channeling.” Journal of Surface Investigation, vol. 4, no. 5, Oct. 2010, pp. 792-795. https://doi.org/10.1134/S1027451010050186.