Pleiades Publishing
Technical Physics Letters
,  volume 45 ,  issue 12 ,  pages 1237-1240

Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate

Publication type: Journal Article
Publication date: 2019-12-01
Pleiades Publishing
scimago Q3
wos Q4
SJR: 0.215
CiteScore: 1.1
Impact factor: 0.9
ISSN: 10637850, 10906533, 17267471
Physics and Astronomy (miscellaneous)
Abstract
Thin aluminum nitride (AlN) films on sapphire (Al2O3) substrates were grown by means of ion-beam deposition (IBD) and studied by methods of scanning electron microscopy, Raman scattering, and optical transmission spectroscopy. Results revealed the influence of IBD process parameters (gas mixture composition, ion beam energy, and substrate temperature) on the morphology, structure, and optical properties of obtained thin AlN films on sapphire.
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GOST |
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GOST Copy
Lunin L. S. L. S. et al. Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate // Technical Physics Letters. 2019. Vol. 45. No. 12. pp. 1237-1240.
GOST all authors (up to 50) Copy
Lunin L. S. L. S., Devitskii O. V., Sysoev I. A., Pashchenko A., Kasyanov I. V., Nikulin D. A., Irkha V. A. Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate // Technical Physics Letters. 2019. Vol. 45. No. 12. pp. 1237-1240.
RIS |
Cite this
RIS Copy
TY - JOUR
DO - 10.1134/S106378501912023X
UR - https://doi.org/10.1134/S106378501912023X
TI - Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate
T2 - Technical Physics Letters
AU - Lunin L. S., L. S.
AU - Devitskii, O V
AU - Sysoev, I. A.
AU - Pashchenko, A.S.
AU - Kasyanov, I V
AU - Nikulin, D A
AU - Irkha, V A
PY - 2019
DA - 2019/12/01
PB - Pleiades Publishing
SP - 1237-1240
IS - 12
VL - 45
SN - 1063-7850
SN - 1090-6533
SN - 1726-7471
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2019_Lunin L. S.,
author = {L. S. Lunin L. S. and O V Devitskii and I. A. Sysoev and A.S. Pashchenko and I V Kasyanov and D A Nikulin and V A Irkha},
title = {Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate},
journal = {Technical Physics Letters},
year = {2019},
volume = {45},
publisher = {Pleiades Publishing},
month = {dec},
url = {https://doi.org/10.1134/S106378501912023X},
number = {12},
pages = {1237--1240},
doi = {10.1134/S106378501912023X}
}
MLA
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MLA Copy
Lunin L. S., L. S., et al. “Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate.” Technical Physics Letters, vol. 45, no. 12, Dec. 2019, pp. 1237-1240. https://doi.org/10.1134/S106378501912023X.