Open Access
Optical Materials Express, volume 11, issue 2, pages 371
Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study
Sharipova M I
1
,
Baluyan T G
1
,
Kulagin G E
1
,
Petrov A.K.
1
,
Chizhov A S
1
,
Shatalova T.B.
2
,
Chubich D
2
,
Kolymagin D.A.
3
,
Bessonov V. O.
3
,
Publication type: Journal Article
Publication date: 2021-01-14
Journal:
Optical Materials Express
Quartile SCImago
Q2
Quartile WOS
Q2
Impact factor: 2.8
ISSN: 21593930
Electronic, Optical and Magnetic Materials
Abstract
Two-photon laser polymerization (TPP) is a state-of-the-art technology that allows for the submicron-resolution printing of freeform 3D objects to be harnessed in various applications, including physics, biology, medicine, and materials science. The TPP is based on using photosensitive polymeric materials that impose restrictions on the minimum feature size and limit the functionality of printed structures within the capabilities of polymers. One of the promising yet insufficiently studied methods for overcoming these limitations is pyrolysis–high-temperature annealing of polymer objects in an inert atmosphere. It may allow both to decrease the size of the objects and modify their chemical composition. Here, we compare the effect of pyrolysis on solid objects being tens of micrometers in size printed by TPP from three commercially available photoresists: IP-Dip, OrmoComp, and SZ2080. For the annealing temperatures of 450°C and 690°C in an argon atmosphere, we assessed the changes in size, chemical composition, and adhesion to the silicon wafer substrate. Our data may be promising for developing pyrolysis as a standard post-processing method for structures created via TPP technology.
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- We do not take into account publications that without a DOI.
- Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
- Statistics recalculated weekly.
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Sharipova M. I. et al. Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study // Optical Materials Express. 2021. Vol. 11. No. 2. p. 371.
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Sharipova M. I., Baluyan T. G., Abrashitova K. A., Kulagin G. E., Petrov A., Chizhov A. S., Shatalova T., Chubich D., Kolymagin D., VITUKHNOVSKY A. G., Bessonov V. O., Fedyanin A. A. Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study // Optical Materials Express. 2021. Vol. 11. No. 2. p. 371.
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TY - JOUR
DO - 10.1364/ome.416457
UR - https://doi.org/10.1364%2Fome.416457
TI - Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study
T2 - Optical Materials Express
AU - Sharipova, M I
AU - Baluyan, T G
AU - Abrashitova, Ksenia A.
AU - Kulagin, G E
AU - Petrov, A.K.
AU - Chizhov, A S
AU - Shatalova, T.B.
AU - Chubich, D
AU - Kolymagin, D.A.
AU - VITUKHNOVSKY, A. G.
AU - Bessonov, V. O.
AU - Fedyanin, Andrey A.
PY - 2021
DA - 2021/01/14 00:00:00
PB - Optical Society of America
SP - 371
IS - 2
VL - 11
SN - 2159-3930
ER -
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@article{2021_Sharipova,
author = {M I Sharipova and T G Baluyan and Ksenia A. Abrashitova and G E Kulagin and A.K. Petrov and A S Chizhov and T.B. Shatalova and D Chubich and D.A. Kolymagin and A. G. VITUKHNOVSKY and V. O. Bessonov and Andrey A. Fedyanin},
title = {Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study},
journal = {Optical Materials Express},
year = {2021},
volume = {11},
publisher = {Optical Society of America},
month = {jan},
url = {https://doi.org/10.1364%2Fome.416457},
number = {2},
pages = {371},
doi = {10.1364/ome.416457}
}
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MLA
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Sharipova, M. I., et al. “Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study.” Optical Materials Express, vol. 11, no. 2, Jan. 2021, p. 371. https://doi.org/10.1364%2Fome.416457.