Report on the 2024 Technical Seminar of Division of Sputtering and Plasma Processes
Publication type: Journal Article
Publication date: 2025-02-10
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ISSN: 24335835, 24335843
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Nakano T. Report on the 2024 Technical Seminar of Division of Sputtering and Plasma Processes // Vacuum and Surface Science. 2025. Vol. 68. No. 2. p. 105.
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Nakano T. Report on the 2024 Technical Seminar of Division of Sputtering and Plasma Processes // Vacuum and Surface Science. 2025. Vol. 68. No. 2. p. 105.
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TY - JOUR
DO - 10.1380/vss.68.105
UR - https://www.jstage.jst.go.jp/article/vss/68/2/68_20181425/_article/-char/ja/
TI - Report on the 2024 Technical Seminar of Division of Sputtering and Plasma Processes
T2 - Vacuum and Surface Science
AU - Nakano, Takeo
PY - 2025
DA - 2025/02/10
PB - The Surface Science Society of Japan
SP - 105
IS - 2
VL - 68
SN - 2433-5835
SN - 2433-5843
ER -
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@article{2025_Nakano,
author = {Takeo Nakano},
title = {Report on the 2024 Technical Seminar of Division of Sputtering and Plasma Processes},
journal = {Vacuum and Surface Science},
year = {2025},
volume = {68},
publisher = {The Surface Science Society of Japan},
month = {feb},
url = {https://www.jstage.jst.go.jp/article/vss/68/2/68_20181425/_article/-char/ja/},
number = {2},
pages = {105},
doi = {10.1380/vss.68.105}
}
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MLA
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Nakano, Takeo. “Report on the 2024 Technical Seminar of Division of Sputtering and Plasma Processes.” Vacuum and Surface Science, vol. 68, no. 2, Feb. 2025, p. 105. https://www.jstage.jst.go.jp/article/vss/68/2/68_20181425/_article/-char/ja/.