Open Access
CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging
Publication type: Journal Article
Publication date: 2020-02-22
scimago Q1
wos Q1
SJR: 1.765
CiteScore: 12.1
Impact factor: 6.6
ISSN: 21928606, 21928614
Electronic, Optical and Magnetic Materials
Biotechnology
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering
Abstract
Metalenses made of artificial sub-wavelength nanostructures have shown the capability of light focusing and imaging with a miniaturized size. Here, we report the demonstration of mass-producible amorphous silicon metalenses on a 12-inch glass wafer via the complementary metal-oxide-semiconductor compatible process. The measured numerical aperture of the fabricated metalens is 0.496 with a focusing spot size of 1.26 μm at the wavelength of 940 nm. The metalens is applied in an imaging system to test the imaging resolution. The minimum bar of the resolution chart with a width of 2.19 μm is clearly observed. Furthermore, the same system demonstrates the imaging of a fingerprint, and proofs the concept of using metalens array to reduce the system size for future compact consumer electronics.
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71
Total citations:
71
Citations from 2024:
34
(47.89%)
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GOST
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Hu T. et al. CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging // Nanophotonics. 2020. Vol. 9. No. 4. pp. 823-830.
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Hu T., Zhong Q., Li N., Dong Y., Xu Z., FU Y., Li D., Bliznetsov V., Zhou Y., Lai K. H., Qunying L., Zhu S., Singh N. CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging // Nanophotonics. 2020. Vol. 9. No. 4. pp. 823-830.
Cite this
RIS
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TY - JOUR
DO - 10.1515/nanoph-2019-0470
UR - https://doi.org/10.1515/nanoph-2019-0470
TI - CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging
T2 - Nanophotonics
AU - Hu, Ting
AU - Zhong, Qize
AU - Li, Nanxi
AU - Dong, Yuan
AU - Xu, Zhengji
AU - FU, YUAN-HSING
AU - Li, Dongdong
AU - Bliznetsov, Vladimir
AU - Zhou, Yanyan
AU - Lai, Keng Heng
AU - Qunying, Lin
AU - Zhu, Shiyang
AU - Singh, Navab
PY - 2020
DA - 2020/02/22
PB - Walter de Gruyter
SP - 823-830
IS - 4
VL - 9
SN - 2192-8606
SN - 2192-8614
ER -
Cite this
BibTex (up to 50 authors)
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@article{2020_Hu,
author = {Ting Hu and Qize Zhong and Nanxi Li and Yuan Dong and Zhengji Xu and YUAN-HSING FU and Dongdong Li and Vladimir Bliznetsov and Yanyan Zhou and Keng Heng Lai and Lin Qunying and Shiyang Zhu and Navab Singh},
title = {CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging},
journal = {Nanophotonics},
year = {2020},
volume = {9},
publisher = {Walter de Gruyter},
month = {feb},
url = {https://doi.org/10.1515/nanoph-2019-0470},
number = {4},
pages = {823--830},
doi = {10.1515/nanoph-2019-0470}
}
Cite this
MLA
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Hu, Ting, et al. “CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging.” Nanophotonics, vol. 9, no. 4, Feb. 2020, pp. 823-830. https://doi.org/10.1515/nanoph-2019-0470.