Open Access
,
volume 4
X-Ray Lithography for Nanofabrication: Is There a Future?
Publication type: Journal Article
Publication date: 2022-02-25
scimago Q2
wos Q2
SJR: 0.763
CiteScore: 9.2
Impact factor: 3.8
ISSN: 26733013
Abstract
X-ray lithography has been first proposed almost 50 years ago, and the related LIGA process around 25 years ago. It is therefore a good time to make an analysis of the technique, with its pros and cons. In this perspective article, we describe X-ray lithography’s latest advancements. First, we report the improvement in the fabrication of the high aspect ratio and high-resolution micro/nanostructures. Then, we present the radiation-assisted synthesis and processing of novel materials for the next generation of functional devices. We finally draw our conclusion on the future prospects of the technique.
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Metrics
23
Total citations:
23
Citations from 2024:
11
(50%)
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RIS |
BibTex
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GOST
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Bharti A., Turchet A., Marmiroli B. X-Ray Lithography for Nanofabrication: Is There a Future? // Frontiers in Nanotechnology. 2022. Vol. 4.
GOST all authors (up to 50)
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Bharti A., Turchet A., Marmiroli B. X-Ray Lithography for Nanofabrication: Is There a Future? // Frontiers in Nanotechnology. 2022. Vol. 4.
Cite this
RIS
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TY - JOUR
DO - 10.3389/fnano.2022.835701
UR - https://doi.org/10.3389/fnano.2022.835701
TI - X-Ray Lithography for Nanofabrication: Is There a Future?
T2 - Frontiers in Nanotechnology
AU - Bharti, Amardeep
AU - Turchet, Alessio
AU - Marmiroli, Benedetta
PY - 2022
DA - 2022/02/25
PB - Frontiers Media S.A.
VL - 4
SN - 2673-3013
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2022_Bharti,
author = {Amardeep Bharti and Alessio Turchet and Benedetta Marmiroli},
title = {X-Ray Lithography for Nanofabrication: Is There a Future?},
journal = {Frontiers in Nanotechnology},
year = {2022},
volume = {4},
publisher = {Frontiers Media S.A.},
month = {feb},
url = {https://doi.org/10.3389/fnano.2022.835701},
doi = {10.3389/fnano.2022.835701}
}