ZnO Piezoelectric Films for Acoustoelectronic and Microenergetic Applications

Zinc oxide is one of the most popular materials for acoustoelectronic sensors and vibro-piezo-transducers used in nano-piezo-generators. In the present paper, thick piezoelectric ZnO films are fabricated on both sides of various substrates using magnetron sputtering technique. It is shown that the main problem for double film deposition is the difference in thermal expansion coefficients of the ZnO films and the substrate materials. The problem is solved by decreasing the plate temperature up to 140 °C, reducing the growing rate up to 0.8 ± 0.05 μm/h, and diminishing the oxygen content in Ar mixture up to 40%. Using the modified sputtering conditions, the ZnO films with thickness up to 15 μm, grain size 0.3 μm, and piezoelectric module as large as 7.5 × 10−12 C/N are fabricated on both faces of quartz and lithium niobate plates as well as on flexible polyimide flexible film known as Kapton. The films are characterized by chemical composition, crystallographic orientation, piezoelectric effect, and acoustic wave generation. They are applied for vibro-piezo-transducer based on flexible ZnO/Kapton/Al/ZnO/Al structure. When the structure is mechanical excited, the variable electric voltage of about 35 mV is generated. The value of the voltage is sufficient for an unstable energy source used in autonomic micro-energetic energy-store systems.