Fraunhofer Institute for Silicon Technology

Short name

ISIT

Country, city

Germany, Itzehoe

024p6aq98

Organization website

Publications

332

Citations

6 455

h-index

Top-3 journals

Proceedings of SPIE - The International Society for Optical Engineering (40 publications)

Microelectronic Engineering (34 publications)

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena (17 publications)

Top-3 organizations

Kiel University (82 publications)

Humboldt University of Berlin (11 publications)

Fraunhofer Institute for Applied Solid State Physics (10 publications)

Top-3 foreign organizations

University of Southern Denmark (7 publications)

KTH Royal Institute of Technology (5 publications)

École Polytechnique Fédérale de Lausanne (4 publications)

Most cited in 5 years

Found

Publication title from chars

Publisher

Journal

Field of science

Countries

Open access

SCImago

WOS

Since

For

Clear filter

By date

By citations

Publications found: 0

Since 1993

Total publications

332

Total citations

6455

Citations per publication

19.44

Average publications per year

10.38

Average authors per publication

6.33

h-index

Metrics description

h-index

A scientist has an h-index if h of his N publications are cited at least h times each, while the remaining (N - h) publications are cited no more than h times each.

https://www.pnas.org/doi/full/10.1073/pnas.0507655102

Top-30

Fields of science

	20 40 60 80 100 120 140
Electrical and Electronic Engineering	Electrical and Electronic Engineering, 122, 13.74% Electrical and Electronic Engineering 122 publications, 13.74%
Condensed Matter Physics	Condensed Matter Physics, 106, 11.94% Condensed Matter Physics 106 publications, 11.94%
Electronic, Optical and Magnetic Materials	Electronic, Optical and Magnetic Materials, 103, 11.6% Electronic, Optical and Magnetic Materials 103 publications, 11.6%
Surfaces, Coatings and Films	Surfaces, Coatings and Films, 73, 8.22% Surfaces, Coatings and Films 73 publications, 8.22%
Atomic and Molecular Physics, and Optics	Atomic and Molecular Physics, and Optics, 54, 6.08% Atomic and Molecular Physics, and Optics 54 publications, 6.08%
Instrumentation	Instrumentation, 32, 3.6% Instrumentation 32 publications, 3.6%
General Engineering	General Engineering, 31, 3.49% General Engineering 31 publications, 3.49%
Metals and Alloys	Metals and Alloys, 26, 2.93% Metals and Alloys 26 publications, 2.93%
Mechanical Engineering	Mechanical Engineering, 24, 2.7% Mechanical Engineering 24 publications, 2.7%
Electrochemistry	Electrochemistry, 22, 2.48% Electrochemistry 22 publications, 2.48%
Materials Chemistry	Materials Chemistry, 20, 2.25% Materials Chemistry 20 publications, 2.25%
Control and Systems Engineering	Control and Systems Engineering, 17, 1.91% Control and Systems Engineering 17 publications, 1.91%
General Medicine	General Medicine, 16, 1.8% General Medicine 16 publications, 1.8%
Analytical Chemistry	Analytical Chemistry, 16, 1.8% Analytical Chemistry 16 publications, 1.8%
Biotechnology	Biotechnology, 16, 1.8% Biotechnology 16 publications, 1.8%
General Materials Science	General Materials Science, 16, 1.8% General Materials Science 16 publications, 1.8%
Hardware and Architecture	Hardware and Architecture, 13, 1.46% Hardware and Architecture 13 publications, 1.46%
Biochemistry	Biochemistry, 11, 1.24% Biochemistry 11 publications, 1.24%
Biomedical Engineering	Biomedical Engineering, 11, 1.24% Biomedical Engineering 11 publications, 1.24%
Renewable Energy, Sustainability and the Environment	Renewable Energy, Sustainability and the Environment, 11, 1.24% Renewable Energy, Sustainability and the Environment 11 publications, 1.24%
General Environmental Science	General Environmental Science, 11, 1.24% General Environmental Science 11 publications, 1.24%
General Earth and Planetary Sciences	General Earth and Planetary Sciences, 11, 1.24% General Earth and Planetary Sciences 11 publications, 1.24%
Biophysics	Biophysics, 10, 1.13% Biophysics 10 publications, 1.13%
Mechanics of Materials	Mechanics of Materials, 10, 1.13% Mechanics of Materials 10 publications, 1.13%
General Physics and Astronomy	General Physics and Astronomy, 9, 1.01% General Physics and Astronomy 9 publications, 1.01%
Physics and Astronomy (miscellaneous)	Physics and Astronomy (miscellaneous), 9, 1.01% Physics and Astronomy (miscellaneous) 9 publications, 1.01%
Applied Mathematics	Applied Mathematics, 8, 0.9% Applied Mathematics 8 publications, 0.9%
Surfaces and Interfaces	Surfaces and Interfaces, 6, 0.68% Surfaces and Interfaces 6 publications, 0.68%
Energy Engineering and Power Technology	Energy Engineering and Power Technology, 5, 0.56% Energy Engineering and Power Technology 5 publications, 0.56%
Spectroscopy	Spectroscopy, 4, 0.45% Spectroscopy 4 publications, 0.45%
	20 40 60 80 100 120 140

Journals

	5 10 15 20 25 30 35 40
Proceedings of SPIE - The International Society for Optical Engineering	Proceedings of SPIE - The International Society for Optical Engineering, 40, 12.05% Proceedings of SPIE - The International Society for Optical Engineering 40 publications, 12.05%
Microelectronic Engineering	Microelectronic Engineering, 34, 10.24% Microelectronic Engineering 34 publications, 10.24%
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena	Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, 17, 5.12% Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena 17 publications, 5.12%
Sensors and Actuators, A: Physical	Sensors and Actuators, A: Physical, 15, 4.52% Sensors and Actuators, A: Physical 15 publications, 4.52%
Micromachines	Micromachines, 14, 4.22% Micromachines 14 publications, 4.22%
Microsystem Technologies	Microsystem Technologies, 13, 3.92% Microsystem Technologies 13 publications, 3.92%
ECS Meeting Abstracts	ECS Meeting Abstracts, 12, 3.61% ECS Meeting Abstracts 12 publications, 3.61%
Applied Physics Letters	Applied Physics Letters, 10, 3.01% Applied Physics Letters 10 publications, 3.01%
Procedia Engineering	Procedia Engineering, 8, 2.41% Procedia Engineering 8 publications, 2.41%
MRS Proceedings	MRS Proceedings, 8, 2.41% MRS Proceedings 8 publications, 2.41%
Journal of the Electrochemical Society	Journal of the Electrochemical Society, 7, 2.11% Journal of the Electrochemical Society 7 publications, 2.11%
Journal of Applied Physics	Journal of Applied Physics, 7, 2.11% Journal of Applied Physics 7 publications, 2.11%
Biosensors and Bioelectronics	Biosensors and Bioelectronics, 7, 2.11% Biosensors and Bioelectronics 7 publications, 2.11%
Sensors and Actuators, B: Chemical	Sensors and Actuators, B: Chemical, 6, 1.81% Sensors and Actuators, B: Chemical 6 publications, 1.81%
Sensors	Sensors, 5, 1.51% Sensors 5 publications, 1.51%
ACS applied materials & interfaces	ACS applied materials & interfaces, 4, 1.2% ACS applied materials & interfaces 4 publications, 1.2%
Journal of Micromechanics and Microengineering	Journal of Micromechanics and Microengineering, 4, 1.2% Journal of Micromechanics and Microengineering 4 publications, 1.2%
Microelectronics Reliability	Microelectronics Reliability, 3, 0.9% Microelectronics Reliability 3 publications, 0.9%
Physica Status Solidi - Rapid Research Letters	Physica Status Solidi - Rapid Research Letters, 3, 0.9% Physica Status Solidi - Rapid Research Letters 3 publications, 0.9%
Electroanalysis	Electroanalysis, 3, 0.9% Electroanalysis 3 publications, 0.9%
Energies	Energies, 3, 0.9% Energies 3 publications, 0.9%
Praktische Metallographie/Practical Metallography	Praktische Metallographie/Practical Metallography, 2, 0.6% Praktische Metallographie/Practical Metallography 2 publications, 0.6%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 2, 0.6% Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes 2 publications, 0.6%
Chemosensors	Chemosensors, 2, 0.6% Chemosensors 2 publications, 0.6%
IFMBE Proceedings	IFMBE Proceedings, 2, 0.6% IFMBE Proceedings 2 publications, 0.6%
IFAC-PapersOnLine	IFAC-PapersOnLine, 2, 0.6% IFAC-PapersOnLine 2 publications, 0.6%
Advanced Functional Materials	Advanced Functional Materials, 2, 0.6% Advanced Functional Materials 2 publications, 0.6%
Optics Express	Optics Express, 2, 0.6% Optics Express 2 publications, 0.6%
Biomedical Optics Express	Biomedical Optics Express, 2, 0.6% Biomedical Optics Express 2 publications, 0.6%
Journal Physics D: Applied Physics	Journal Physics D: Applied Physics, 2, 0.6% Journal Physics D: Applied Physics 2 publications, 0.6%
	5 10 15 20 25 30 35 40

Publishers

	10 20 30 40 50 60 70 80 90 100
Elsevier	Elsevier, 98, 29.52% Elsevier 98 publications, 29.52%
SPIE-Intl Soc Optical Eng	SPIE-Intl Soc Optical Eng, 41, 12.35% SPIE-Intl Soc Optical Eng 41 publications, 12.35%
Springer Nature	Springer Nature, 40, 12.05% Springer Nature 40 publications, 12.05%
MDPI	MDPI, 25, 7.53% MDPI 25 publications, 7.53%
The Electrochemical Society	The Electrochemical Society, 21, 6.33% The Electrochemical Society 21 publications, 6.33%
Wiley	Wiley, 20, 6.02% Wiley 20 publications, 6.02%
AIP Publishing	AIP Publishing, 19, 5.72% AIP Publishing 19 publications, 5.72%
American Vacuum Society	American Vacuum Society, 18, 5.42% American Vacuum Society 18 publications, 5.42%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 16, 4.82% Institute of Electrical and Electronics Engineers (IEEE) 16 publications, 4.82%
American Chemical Society (ACS)	American Chemical Society (ACS), 8, 2.41% American Chemical Society (ACS) 8 publications, 2.41%
Optica Publishing Group	Optica Publishing Group, 7, 2.11% Optica Publishing Group 7 publications, 2.11%
IOP Publishing	IOP Publishing, 7, 2.11% IOP Publishing 7 publications, 2.11%
Walter de Gruyter	Walter de Gruyter, 3, 0.9% Walter de Gruyter 3 publications, 0.9%
Royal Society of Chemistry (RSC)	Royal Society of Chemistry (RSC), 2, 0.6% Royal Society of Chemistry (RSC) 2 publications, 0.6%
Japan Society of Applied Physics	Japan Society of Applied Physics, 2, 0.6% Japan Society of Applied Physics 2 publications, 0.6%
ifmbe proceedings	ifmbe proceedings, 2, 0.6% ifmbe proceedings 2 publications, 0.6%
Cambridge University Press	Cambridge University Press, 1, 0.3% Cambridge University Press 1 publication, 0.3%
American Physical Society (APS)	American Physical Society (APS), 1, 0.3% American Physical Society (APS) 1 publication, 0.3%
IMAPS - International Microelectronics Assembly and Packaging Society	IMAPS - International Microelectronics Assembly and Packaging Society, 1, 0.3% IMAPS - International Microelectronics Assembly and Packaging Society 1 publication, 0.3%
	10 20 30 40 50 60 70 80 90 100

With other organizations

With foreign organizations

	1 2 3 4 5 6 7
University of Southern Denmark	University of Southern Denmark, 7, 7.78% University of Southern Denmark 7 publications, 7.78%
KTH Royal Institute of Technology	KTH Royal Institute of Technology, 5, 5.56% KTH Royal Institute of Technology 5 publications, 5.56%
École Polytechnique Fédérale de Lausanne	École Polytechnique Fédérale de Lausanne, 4, 4.44% École Polytechnique Fédérale de Lausanne 4 publications, 4.44%
ETH Zurich	ETH Zurich, 3, 3.33% ETH Zurich 3 publications, 3.33%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 3, 3.33% Interuniversity Microelectronics Centre 3 publications, 3.33%
University of Pisa	University of Pisa, 3, 3.33% University of Pisa 3 publications, 3.33%
National and Kapodistrian University of Athens	National and Kapodistrian University of Athens, 3, 3.33% National and Kapodistrian University of Athens 3 publications, 3.33%
University of Twente	University of Twente, 2, 2.22% University of Twente 2 publications, 2.22%
Uppsala University	Uppsala University, 2, 2.22% Uppsala University 2 publications, 2.22%
VTT Technical Research Centre of Finland	VTT Technical Research Centre of Finland, 2, 2.22% VTT Technical Research Centre of Finland 2 publications, 2.22%
University of Glasgow	University of Glasgow, 2, 2.22% University of Glasgow 2 publications, 2.22%
Vienna University of Technology	Vienna University of Technology, 2, 2.22% Vienna University of Technology 2 publications, 2.22%
Utrecht University	Utrecht University, 2, 2.22% Utrecht University 2 publications, 2.22%
University of Leeds	University of Leeds, 2, 2.22% University of Leeds 2 publications, 2.22%
University of Maryland, College Park	University of Maryland, College Park, 2, 2.22% University of Maryland, College Park 2 publications, 2.22%
Polytechnic University of Valencia	Polytechnic University of Valencia, 2, 2.22% Polytechnic University of Valencia 2 publications, 2.22%
Royal Philips	Royal Philips, 2, 2.22% Royal Philips 2 publications, 2.22%
Ghitsu Institute of Electronic Engineering and Nanotechnologies	Ghitsu Institute of Electronic Engineering and Nanotechnologies, 1, 1.11% Ghitsu Institute of Electronic Engineering and Nanotechnologies 1 publication, 1.11%
Indian Institute of Technology Roorkee	Indian Institute of Technology Roorkee, 1, 1.11% Indian Institute of Technology Roorkee 1 publication, 1.11%
University of Madras	University of Madras, 1, 1.11% University of Madras 1 publication, 1.11%
University of Petroleum and Energy Studies	University of Petroleum and Energy Studies, 1, 1.11% University of Petroleum and Energy Studies 1 publication, 1.11%
Chalmers University of Technology	Chalmers University of Technology, 1, 1.11% Chalmers University of Technology 1 publication, 1.11%
Southeast University	Southeast University, 1, 1.11% Southeast University 1 publication, 1.11%
Eindhoven University of Technology	Eindhoven University of Technology, 1, 1.11% Eindhoven University of Technology 1 publication, 1.11%
University of Oulu	University of Oulu, 1, 1.11% University of Oulu 1 publication, 1.11%
Medical University of Vienna	Medical University of Vienna, 1, 1.11% Medical University of Vienna 1 publication, 1.11%
ShanghaiTech University	ShanghaiTech University, 1, 1.11% ShanghaiTech University 1 publication, 1.11%
Shanghai Maritime University	Shanghai Maritime University, 1, 1.11% Shanghai Maritime University 1 publication, 1.11%
University of Copenhagen	University of Copenhagen, 1, 1.11% University of Copenhagen 1 publication, 1.11%
Aarhus University	Aarhus University, 1, 1.11% Aarhus University 1 publication, 1.11%
	1 2 3 4 5 6 7

With other countries

	5 10 15 20 25
USA	USA, 22, 4.58% USA 22 publications, 4.58%
Austria	Austria, 17, 3.54% Austria 17 publications, 3.54%
Switzerland	Switzerland, 12, 2.5% Switzerland 12 publications, 2.5%
Netherlands	Netherlands, 11, 2.29% Netherlands 11 publications, 2.29%
Denmark	Denmark, 9, 1.88% Denmark 9 publications, 1.88%
Moldova	Moldova, 9, 1.88% Moldova 9 publications, 1.88%
Sweden	Sweden, 9, 1.88% Sweden 9 publications, 1.88%
France	France, 7, 1.46% France 7 publications, 1.46%
Poland	Poland, 7, 1.46% Poland 7 publications, 1.46%
Spain	Spain, 6, 1.25% Spain 6 publications, 1.25%
United Kingdom	United Kingdom, 5, 1.04% United Kingdom 5 publications, 1.04%
Italy	Italy, 5, 1.04% Italy 5 publications, 1.04%
Belgium	Belgium, 4, 0.83% Belgium 4 publications, 0.83%
China	China, 3, 0.63% China 3 publications, 0.63%
Greece	Greece, 3, 0.63% Greece 3 publications, 0.63%
India	India, 3, 0.63% India 3 publications, 0.63%
Finland	Finland, 3, 0.63% Finland 3 publications, 0.63%
Republic of Korea	Republic of Korea, 2, 0.42% Republic of Korea 2 publications, 0.42%
Czech Republic	Czech Republic, 2, 0.42% Czech Republic 2 publications, 0.42%
Brazil	Brazil, 1, 0.21% Brazil 1 publication, 0.21%
Hungary	Hungary, 1, 0.21% Hungary 1 publication, 0.21%
Egypt	Egypt, 1, 0.21% Egypt 1 publication, 0.21%
Israel	Israel, 1, 0.21% Israel 1 publication, 0.21%
Iraq	Iraq, 1, 0.21% Iraq 1 publication, 0.21%
Canada	Canada, 1, 0.21% Canada 1 publication, 0.21%
Colombia	Colombia, 1, 0.21% Colombia 1 publication, 0.21%
Costa Rica	Costa Rica, 1, 0.21% Costa Rica 1 publication, 0.21%
Liechtenstein	Liechtenstein, 1, 0.21% Liechtenstein 1 publication, 0.21%
Luxembourg	Luxembourg, 1, 0.21% Luxembourg 1 publication, 0.21%
Japan	Japan, 1, 0.21% Japan 1 publication, 0.21%
	5 10 15 20 25

We do not take into account publications without a DOI.
Statistics recalculated daily.
Publications published earlier than 1993 are ignored in the statistics.
The horizontal charts show the 30 top positions.
Journals quartiles values are relevant at the moment.

	10 20 30 40 50 60 70 80 90
Kiel University	Kiel University, 82, 26.28% Kiel University 82 publications, 26.28%
Humboldt University of Berlin	Humboldt University of Berlin, 11, 3.53% Humboldt University of Berlin 11 publications, 3.53%
Fraunhofer Institute for Applied Solid State Physics	Fraunhofer Institute for Applied Solid State Physics, 10, 3.21% Fraunhofer Institute for Applied Solid State Physics 10 publications, 3.21%
University of Southern Denmark	University of Southern Denmark, 7, 2.24% University of Southern Denmark 7 publications, 2.24%
Albert Ludwig University of Freiburg	Albert Ludwig University of Freiburg, 7, 2.24% Albert Ludwig University of Freiburg 7 publications, 2.24%
Fraunhofer Institute for Surface Engineering and Thin Films	Fraunhofer Institute for Surface Engineering and Thin Films, 6, 1.92% Fraunhofer Institute for Surface Engineering and Thin Films 6 publications, 1.92%
KTH Royal Institute of Technology	KTH Royal Institute of Technology, 5, 1.6% KTH Royal Institute of Technology 5 publications, 1.6%
Karlsruhe Institute of Technology	Karlsruhe Institute of Technology, 4, 1.28% Karlsruhe Institute of Technology 4 publications, 1.28%
École Polytechnique Fédérale de Lausanne	École Polytechnique Fédérale de Lausanne, 4, 1.28% École Polytechnique Fédérale de Lausanne 4 publications, 1.28%
Hamburg University of Applied Sciences	Hamburg University of Applied Sciences, 4, 1.28% Hamburg University of Applied Sciences 4 publications, 1.28%
Hamburg University	Hamburg University, 4, 1.28% Hamburg University 4 publications, 1.28%
ETH Zurich	ETH Zurich, 3, 0.96% ETH Zurich 3 publications, 0.96%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 3, 0.96% Interuniversity Microelectronics Centre 3 publications, 0.96%
University of Pisa	University of Pisa, 3, 0.96% University of Pisa 3 publications, 0.96%
Technical University of Berlin	Technical University of Berlin, 3, 0.96% Technical University of Berlin 3 publications, 0.96%
Friedrich Schiller University Jena	Friedrich Schiller University Jena, 3, 0.96% Friedrich Schiller University Jena 3 publications, 0.96%
National and Kapodistrian University of Athens	National and Kapodistrian University of Athens, 3, 0.96% National and Kapodistrian University of Athens 3 publications, 0.96%
Max Planck Institute for Polymer Research	Max Planck Institute for Polymer Research, 3, 0.96% Max Planck Institute for Polymer Research 3 publications, 0.96%
Max Planck Institute for Solid State Research	Max Planck Institute for Solid State Research, 3, 0.96% Max Planck Institute for Solid State Research 3 publications, 0.96%
Leibniz Institute of Surface Engineering	Leibniz Institute of Surface Engineering, 3, 0.96% Leibniz Institute of Surface Engineering 3 publications, 0.96%
Ludwig Maximilian University of Munich	Ludwig Maximilian University of Munich, 3, 0.96% Ludwig Maximilian University of Munich 3 publications, 0.96%
Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute	Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute, 3, 0.96% Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute 3 publications, 0.96%
Technical University of Braunschweig	Technical University of Braunschweig, 3, 0.96% Technical University of Braunschweig 3 publications, 0.96%
University of Erlangen–Nuremberg	University of Erlangen–Nuremberg, 3, 0.96% University of Erlangen–Nuremberg 3 publications, 0.96%
University of Greifswald	University of Greifswald, 3, 0.96% University of Greifswald 3 publications, 0.96%
Infineon Technologies AG	Infineon Technologies AG, 3, 0.96% Infineon Technologies AG 3 publications, 0.96%
University of Twente	University of Twente, 2, 0.64% University of Twente 2 publications, 0.64%
Uppsala University	Uppsala University, 2, 0.64% Uppsala University 2 publications, 0.64%
VTT Technical Research Centre of Finland	VTT Technical Research Centre of Finland, 2, 0.64% VTT Technical Research Centre of Finland 2 publications, 0.64%
University of Glasgow	University of Glasgow, 2, 0.64% University of Glasgow 2 publications, 0.64%
	10 20 30 40 50 60 70 80 90