Fraunhofer Institute for Silicon Technology

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Fraunhofer Institute for Silicon Technology

Short name

ISIT

Country, city

Germany, Itzehoe

024p6aq98

Organization website

Publications

332

Citations

6 482

h-index

Top-3 journals

Proceedings of SPIE - The International Society for Optical Engineering (40 publications)

Microelectronic Engineering (34 publications)

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena (17 publications)

Top-3 organizations

Kiel University (82 publications)

Humboldt University of Berlin (11 publications)

Fraunhofer Institute for Applied Solid State Physics (10 publications)

Top-3 foreign organizations

University of Southern Denmark (7 publications)

KTH Royal Institute of Technology (5 publications)

École Polytechnique Fédérale de Lausanne (4 publications)

Most cited in 5 years

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Publications found: 0

	20 40 60 80 100 120 140
Electrical and Electronic Engineering	Electrical and Electronic Engineering, 122, 36.75% Electrical and Electronic Engineering 122 publications, 36.75%
Condensed Matter Physics	Condensed Matter Physics, 106, 31.93% Condensed Matter Physics 106 publications, 31.93%
Electronic, Optical and Magnetic Materials	Electronic, Optical and Magnetic Materials, 103, 31.02% Electronic, Optical and Magnetic Materials 103 publications, 31.02%
Surfaces, Coatings and Films	Surfaces, Coatings and Films, 73, 21.99% Surfaces, Coatings and Films 73 publications, 21.99%
Atomic and Molecular Physics, and Optics	Atomic and Molecular Physics, and Optics, 54, 16.27% Atomic and Molecular Physics, and Optics 54 publications, 16.27%
Instrumentation	Instrumentation, 32, 9.64% Instrumentation 32 publications, 9.64%
General Engineering	General Engineering, 31, 9.34% General Engineering 31 publications, 9.34%
Metals and Alloys	Metals and Alloys, 26, 7.83% Metals and Alloys 26 publications, 7.83%
Mechanical Engineering	Mechanical Engineering, 24, 7.23% Mechanical Engineering 24 publications, 7.23%
Electrochemistry	Electrochemistry, 22, 6.63% Electrochemistry 22 publications, 6.63%
Materials Chemistry	Materials Chemistry, 20, 6.02% Materials Chemistry 20 publications, 6.02%
Control and Systems Engineering	Control and Systems Engineering, 17, 5.12% Control and Systems Engineering 17 publications, 5.12%
General Medicine	General Medicine, 16, 4.82% General Medicine 16 publications, 4.82%
Analytical Chemistry	Analytical Chemistry, 16, 4.82% Analytical Chemistry 16 publications, 4.82%
Biotechnology	Biotechnology, 16, 4.82% Biotechnology 16 publications, 4.82%
General Materials Science	General Materials Science, 16, 4.82% General Materials Science 16 publications, 4.82%
Hardware and Architecture	Hardware and Architecture, 13, 3.92% Hardware and Architecture 13 publications, 3.92%
Biochemistry	Biochemistry, 11, 3.31% Biochemistry 11 publications, 3.31%
Biomedical Engineering	Biomedical Engineering, 11, 3.31% Biomedical Engineering 11 publications, 3.31%
Renewable Energy, Sustainability and the Environment	Renewable Energy, Sustainability and the Environment, 11, 3.31% Renewable Energy, Sustainability and the Environment 11 publications, 3.31%
General Environmental Science	General Environmental Science, 11, 3.31% General Environmental Science 11 publications, 3.31%
General Earth and Planetary Sciences	General Earth and Planetary Sciences, 11, 3.31% General Earth and Planetary Sciences 11 publications, 3.31%
Biophysics	Biophysics, 10, 3.01% Biophysics 10 publications, 3.01%
Mechanics of Materials	Mechanics of Materials, 10, 3.01% Mechanics of Materials 10 publications, 3.01%
General Physics and Astronomy	General Physics and Astronomy, 9, 2.71% General Physics and Astronomy 9 publications, 2.71%
Physics and Astronomy (miscellaneous)	Physics and Astronomy (miscellaneous), 9, 2.71% Physics and Astronomy (miscellaneous) 9 publications, 2.71%
Applied Mathematics	Applied Mathematics, 8, 2.41% Applied Mathematics 8 publications, 2.41%
Surfaces and Interfaces	Surfaces and Interfaces, 6, 1.81% Surfaces and Interfaces 6 publications, 1.81%
Energy Engineering and Power Technology	Energy Engineering and Power Technology, 5, 1.51% Energy Engineering and Power Technology 5 publications, 1.51%
Spectroscopy	Spectroscopy, 4, 1.2% Spectroscopy 4 publications, 1.2%
	20 40 60 80 100 120 140

	5 10 15 20 25 30 35 40
Proceedings of SPIE - The International Society for Optical Engineering	Proceedings of SPIE - The International Society for Optical Engineering, 40, 12.05% Proceedings of SPIE - The International Society for Optical Engineering 40 publications, 12.05%
Microelectronic Engineering	Microelectronic Engineering, 34, 10.24% Microelectronic Engineering 34 publications, 10.24%
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena	Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 17, 5.12% Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 17 publications, 5.12%
Sensors and Actuators, A: Physical	Sensors and Actuators, A: Physical, 15, 4.52% Sensors and Actuators, A: Physical 15 publications, 4.52%
Micromachines	Micromachines, 14, 4.22% Micromachines 14 publications, 4.22%
Microsystem Technologies	Microsystem Technologies, 13, 3.92% Microsystem Technologies 13 publications, 3.92%
ECS Meeting Abstracts	ECS Meeting Abstracts, 12, 3.61% ECS Meeting Abstracts 12 publications, 3.61%
Applied Physics Letters	Applied Physics Letters, 10, 3.01% Applied Physics Letters 10 publications, 3.01%
Procedia Engineering	Procedia Engineering, 8, 2.41% Procedia Engineering 8 publications, 2.41%
MRS Proceedings	MRS Proceedings, 8, 2.41% MRS Proceedings 8 publications, 2.41%
Journal of the Electrochemical Society	Journal of the Electrochemical Society, 7, 2.11% Journal of the Electrochemical Society 7 publications, 2.11%
Journal of Applied Physics	Journal of Applied Physics, 7, 2.11% Journal of Applied Physics 7 publications, 2.11%
Biosensors and Bioelectronics	Biosensors and Bioelectronics, 7, 2.11% Biosensors and Bioelectronics 7 publications, 2.11%
Sensors and Actuators, B: Chemical	Sensors and Actuators, B: Chemical, 6, 1.81% Sensors and Actuators, B: Chemical 6 publications, 1.81%
Sensors	Sensors, 5, 1.51% Sensors 5 publications, 1.51%
ACS applied materials & interfaces	ACS applied materials & interfaces, 4, 1.2% ACS applied materials & interfaces 4 publications, 1.2%
Journal of Micromechanics and Microengineering	Journal of Micromechanics and Microengineering, 4, 1.2% Journal of Micromechanics and Microengineering 4 publications, 1.2%
Microelectronics Reliability	Microelectronics Reliability, 3, 0.9% Microelectronics Reliability 3 publications, 0.9%
Physica Status Solidi - Rapid Research Letters	Physica Status Solidi - Rapid Research Letters, 3, 0.9% Physica Status Solidi - Rapid Research Letters 3 publications, 0.9%
Electroanalysis	Electroanalysis, 3, 0.9% Electroanalysis 3 publications, 0.9%
Energies	Energies, 3, 0.9% Energies 3 publications, 0.9%
Praktische Metallographie/Practical Metallography	Praktische Metallographie/Practical Metallography, 2, 0.6% Praktische Metallographie/Practical Metallography 2 publications, 0.6%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 2, 0.6% Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes 2 publications, 0.6%
Chemosensors	Chemosensors, 2, 0.6% Chemosensors 2 publications, 0.6%
IFMBE Proceedings	IFMBE Proceedings, 2, 0.6% IFMBE Proceedings 2 publications, 0.6%
IFAC-PapersOnLine	IFAC-PapersOnLine, 2, 0.6% IFAC-PapersOnLine 2 publications, 0.6%
Advanced Functional Materials	Advanced Functional Materials, 2, 0.6% Advanced Functional Materials 2 publications, 0.6%
Optics Express	Optics Express, 2, 0.6% Optics Express 2 publications, 0.6%
Biomedical Optics Express	Biomedical Optics Express, 2, 0.6% Biomedical Optics Express 2 publications, 0.6%
Journal Physics D: Applied Physics	Journal Physics D: Applied Physics, 2, 0.6% Journal Physics D: Applied Physics 2 publications, 0.6%
	5 10 15 20 25 30 35 40

	10 20 30 40 50 60 70 80 90 100
Elsevier	Elsevier, 98, 29.52% Elsevier 98 publications, 29.52%
SPIE-Intl Soc Optical Eng	SPIE-Intl Soc Optical Eng, 41, 12.35% SPIE-Intl Soc Optical Eng 41 publications, 12.35%
Springer Nature	Springer Nature, 40, 12.05% Springer Nature 40 publications, 12.05%
MDPI	MDPI, 25, 7.53% MDPI 25 publications, 7.53%
The Electrochemical Society	The Electrochemical Society, 21, 6.33% The Electrochemical Society 21 publications, 6.33%
Wiley	Wiley, 20, 6.02% Wiley 20 publications, 6.02%
AIP Publishing	AIP Publishing, 19, 5.72% AIP Publishing 19 publications, 5.72%
American Vacuum Society	American Vacuum Society, 18, 5.42% American Vacuum Society 18 publications, 5.42%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 16, 4.82% Institute of Electrical and Electronics Engineers (IEEE) 16 publications, 4.82%
American Chemical Society (ACS)	American Chemical Society (ACS), 8, 2.41% American Chemical Society (ACS) 8 publications, 2.41%
Optica Publishing Group	Optica Publishing Group, 7, 2.11% Optica Publishing Group 7 publications, 2.11%
IOP Publishing	IOP Publishing, 7, 2.11% IOP Publishing 7 publications, 2.11%
Walter de Gruyter	Walter de Gruyter, 3, 0.9% Walter de Gruyter 3 publications, 0.9%
Royal Society of Chemistry (RSC)	Royal Society of Chemistry (RSC), 2, 0.6% Royal Society of Chemistry (RSC) 2 publications, 0.6%
Japan Society of Applied Physics	Japan Society of Applied Physics, 2, 0.6% Japan Society of Applied Physics 2 publications, 0.6%
ifmbe proceedings	ifmbe proceedings, 2, 0.6% ifmbe proceedings 2 publications, 0.6%
Cambridge University Press	Cambridge University Press, 1, 0.3% Cambridge University Press 1 publication, 0.3%
American Physical Society (APS)	American Physical Society (APS), 1, 0.3% American Physical Society (APS) 1 publication, 0.3%
IMAPS - International Microelectronics Assembly and Packaging Society	IMAPS - International Microelectronics Assembly and Packaging Society, 1, 0.3% IMAPS - International Microelectronics Assembly and Packaging Society 1 publication, 0.3%
	10 20 30 40 50 60 70 80 90 100

	1 2 3 4 5 6 7
University of Southern Denmark	University of Southern Denmark, 7, 2.11% University of Southern Denmark 7 publications, 2.11%
KTH Royal Institute of Technology	KTH Royal Institute of Technology, 5, 1.51% KTH Royal Institute of Technology 5 publications, 1.51%
École Polytechnique Fédérale de Lausanne	École Polytechnique Fédérale de Lausanne, 4, 1.2% École Polytechnique Fédérale de Lausanne 4 publications, 1.2%
ETH Zurich	ETH Zurich, 3, 0.9% ETH Zurich 3 publications, 0.9%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 3, 0.9% Interuniversity Microelectronics Centre 3 publications, 0.9%
University of Pisa	University of Pisa, 3, 0.9% University of Pisa 3 publications, 0.9%
National and Kapodistrian University of Athens	National and Kapodistrian University of Athens, 3, 0.9% National and Kapodistrian University of Athens 3 publications, 0.9%
University of Twente	University of Twente, 2, 0.6% University of Twente 2 publications, 0.6%
Uppsala University	Uppsala University, 2, 0.6% Uppsala University 2 publications, 0.6%
VTT Technical Research Centre of Finland	VTT Technical Research Centre of Finland, 2, 0.6% VTT Technical Research Centre of Finland 2 publications, 0.6%
University of Glasgow	University of Glasgow, 2, 0.6% University of Glasgow 2 publications, 0.6%
Vienna University of Technology	Vienna University of Technology, 2, 0.6% Vienna University of Technology 2 publications, 0.6%
Utrecht University	Utrecht University, 2, 0.6% Utrecht University 2 publications, 0.6%
University of Leeds	University of Leeds, 2, 0.6% University of Leeds 2 publications, 0.6%
University of Maryland, College Park	University of Maryland, College Park, 2, 0.6% University of Maryland, College Park 2 publications, 0.6%
Polytechnic University of Valencia	Polytechnic University of Valencia, 2, 0.6% Polytechnic University of Valencia 2 publications, 0.6%
Royal Philips	Royal Philips, 2, 0.6% Royal Philips 2 publications, 0.6%
Ghitsu Institute of Electronic Engineering and Nanotechnologies	Ghitsu Institute of Electronic Engineering and Nanotechnologies, 1, 0.3% Ghitsu Institute of Electronic Engineering and Nanotechnologies 1 publication, 0.3%
Indian Institute of Technology Roorkee	Indian Institute of Technology Roorkee, 1, 0.3% Indian Institute of Technology Roorkee 1 publication, 0.3%
University of Madras	University of Madras, 1, 0.3% University of Madras 1 publication, 0.3%
University of Petroleum and Energy Studies	University of Petroleum and Energy Studies, 1, 0.3% University of Petroleum and Energy Studies 1 publication, 0.3%
Chalmers University of Technology	Chalmers University of Technology, 1, 0.3% Chalmers University of Technology 1 publication, 0.3%
Southeast University	Southeast University, 1, 0.3% Southeast University 1 publication, 0.3%
Eindhoven University of Technology	Eindhoven University of Technology, 1, 0.3% Eindhoven University of Technology 1 publication, 0.3%
University of Oulu	University of Oulu, 1, 0.3% University of Oulu 1 publication, 0.3%
Medical University of Vienna	Medical University of Vienna, 1, 0.3% Medical University of Vienna 1 publication, 0.3%
ShanghaiTech University	ShanghaiTech University, 1, 0.3% ShanghaiTech University 1 publication, 0.3%
Shanghai Maritime University	Shanghai Maritime University, 1, 0.3% Shanghai Maritime University 1 publication, 0.3%
University of Copenhagen	University of Copenhagen, 1, 0.3% University of Copenhagen 1 publication, 0.3%
Aarhus University	Aarhus University, 1, 0.3% Aarhus University 1 publication, 0.3%
	1 2 3 4 5 6 7

Fraunhofer Institute for Silicon Technology

Are you a researcher?

Most cited in 5 years

Since 1993

Top-30

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With other organizations

With foreign organizations

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	10 20 30 40 50 60 70 80 90
Kiel University	Kiel University, 82, 24.7% Kiel University 82 publications, 24.7%
Humboldt University of Berlin	Humboldt University of Berlin, 11, 3.31% Humboldt University of Berlin 11 publications, 3.31%
Fraunhofer Institute for Applied Solid State Physics	Fraunhofer Institute for Applied Solid State Physics, 10, 3.01% Fraunhofer Institute for Applied Solid State Physics 10 publications, 3.01%
University of Southern Denmark	University of Southern Denmark, 7, 2.11% University of Southern Denmark 7 publications, 2.11%
Albert Ludwig University of Freiburg	Albert Ludwig University of Freiburg, 7, 2.11% Albert Ludwig University of Freiburg 7 publications, 2.11%
Fraunhofer Institute for Surface Engineering and Thin Films	Fraunhofer Institute for Surface Engineering and Thin Films, 6, 1.81% Fraunhofer Institute for Surface Engineering and Thin Films 6 publications, 1.81%
KTH Royal Institute of Technology	KTH Royal Institute of Technology, 5, 1.51% KTH Royal Institute of Technology 5 publications, 1.51%
Karlsruhe Institute of Technology	Karlsruhe Institute of Technology, 4, 1.2% Karlsruhe Institute of Technology 4 publications, 1.2%
École Polytechnique Fédérale de Lausanne	École Polytechnique Fédérale de Lausanne, 4, 1.2% École Polytechnique Fédérale de Lausanne 4 publications, 1.2%
Hamburg University of Applied Sciences	Hamburg University of Applied Sciences, 4, 1.2% Hamburg University of Applied Sciences 4 publications, 1.2%
Hamburg University	Hamburg University, 4, 1.2% Hamburg University 4 publications, 1.2%
ETH Zurich	ETH Zurich, 3, 0.9% ETH Zurich 3 publications, 0.9%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 3, 0.9% Interuniversity Microelectronics Centre 3 publications, 0.9%
University of Pisa	University of Pisa, 3, 0.9% University of Pisa 3 publications, 0.9%
Technical University of Berlin	Technical University of Berlin, 3, 0.9% Technical University of Berlin 3 publications, 0.9%
Friedrich Schiller University Jena	Friedrich Schiller University Jena, 3, 0.9% Friedrich Schiller University Jena 3 publications, 0.9%
National and Kapodistrian University of Athens	National and Kapodistrian University of Athens, 3, 0.9% National and Kapodistrian University of Athens 3 publications, 0.9%
Max Planck Institute for Polymer Research	Max Planck Institute for Polymer Research, 3, 0.9% Max Planck Institute for Polymer Research 3 publications, 0.9%
Max Planck Institute for Solid State Research	Max Planck Institute for Solid State Research, 3, 0.9% Max Planck Institute for Solid State Research 3 publications, 0.9%
Leibniz Institute of Surface Engineering	Leibniz Institute of Surface Engineering, 3, 0.9% Leibniz Institute of Surface Engineering 3 publications, 0.9%
Ludwig Maximilian University of Munich	Ludwig Maximilian University of Munich, 3, 0.9% Ludwig Maximilian University of Munich 3 publications, 0.9%
Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute	Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute, 3, 0.9% Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute 3 publications, 0.9%
Technical University of Braunschweig	Technical University of Braunschweig, 3, 0.9% Technical University of Braunschweig 3 publications, 0.9%
University of Erlangen–Nuremberg	University of Erlangen–Nuremberg, 3, 0.9% University of Erlangen–Nuremberg 3 publications, 0.9%
University of Greifswald	University of Greifswald, 3, 0.9% University of Greifswald 3 publications, 0.9%
Infineon Technologies AG	Infineon Technologies AG, 3, 0.9% Infineon Technologies AG 3 publications, 0.9%
University of Twente	University of Twente, 2, 0.6% University of Twente 2 publications, 0.6%
Uppsala University	Uppsala University, 2, 0.6% Uppsala University 2 publications, 0.6%
VTT Technical Research Centre of Finland	VTT Technical Research Centre of Finland, 2, 0.6% VTT Technical Research Centre of Finland 2 publications, 0.6%
University of Glasgow	University of Glasgow, 2, 0.6% University of Glasgow 2 publications, 0.6%
	10 20 30 40 50 60 70 80 90

	5 10 15 20 25
USA	USA, 22, 6.63% USA 22 publications, 6.63%
Austria	Austria, 17, 5.12% Austria 17 publications, 5.12%
Switzerland	Switzerland, 12, 3.61% Switzerland 12 publications, 3.61%
Netherlands	Netherlands, 11, 3.31% Netherlands 11 publications, 3.31%
Denmark	Denmark, 9, 2.71% Denmark 9 publications, 2.71%
Moldova	Moldova, 9, 2.71% Moldova 9 publications, 2.71%
Sweden	Sweden, 9, 2.71% Sweden 9 publications, 2.71%
France	France, 7, 2.11% France 7 publications, 2.11%
Poland	Poland, 7, 2.11% Poland 7 publications, 2.11%
Spain	Spain, 6, 1.81% Spain 6 publications, 1.81%
United Kingdom	United Kingdom, 5, 1.51% United Kingdom 5 publications, 1.51%
Italy	Italy, 5, 1.51% Italy 5 publications, 1.51%
Belgium	Belgium, 4, 1.2% Belgium 4 publications, 1.2%
China	China, 3, 0.9% China 3 publications, 0.9%
Greece	Greece, 3, 0.9% Greece 3 publications, 0.9%
India	India, 3, 0.9% India 3 publications, 0.9%
Finland	Finland, 3, 0.9% Finland 3 publications, 0.9%
Republic of Korea	Republic of Korea, 2, 0.6% Republic of Korea 2 publications, 0.6%
Czech Republic	Czech Republic, 2, 0.6% Czech Republic 2 publications, 0.6%
Brazil	Brazil, 1, 0.3% Brazil 1 publication, 0.3%
Hungary	Hungary, 1, 0.3% Hungary 1 publication, 0.3%
Egypt	Egypt, 1, 0.3% Egypt 1 publication, 0.3%
Israel	Israel, 1, 0.3% Israel 1 publication, 0.3%
Iraq	Iraq, 1, 0.3% Iraq 1 publication, 0.3%
Canada	Canada, 1, 0.3% Canada 1 publication, 0.3%
Colombia	Colombia, 1, 0.3% Colombia 1 publication, 0.3%
Costa Rica	Costa Rica, 1, 0.3% Costa Rica 1 publication, 0.3%
Liechtenstein	Liechtenstein, 1, 0.3% Liechtenstein 1 publication, 0.3%
Luxembourg	Luxembourg, 1, 0.3% Luxembourg 1 publication, 0.3%
	5 10 15 20 25