Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

American Vacuum Society
American Vacuum Society
ISSN: 0734211X, 23279877

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journal names
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

Most cited in 5 years

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Top-100

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Citing publishers

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Elsevier
60023 citations, 24.82%
AIP Publishing
31696 citations, 13.11%
American Vacuum Society
19491 citations, 8.06%
Springer Nature
16222 citations, 6.71%
IOP Publishing
14286 citations, 5.91%
Institute of Electrical and Electronics Engineers (IEEE)
11600 citations, 4.8%
Japan Society of Applied Physics
10016 citations, 4.14%
American Physical Society (APS)
9959 citations, 4.12%
Wiley
9798 citations, 4.05%
American Chemical Society (ACS)
9408 citations, 3.89%
4239 citations, 1.75%
Royal Society of Chemistry (RSC)
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Taylor & Francis
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The Electrochemical Society
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Optica Publishing Group
2413 citations, 1%
MDPI
1791 citations, 0.74%
Pleiades Publishing
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SPIE-Intl Soc Optical Eng
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Cambridge University Press
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Trans Tech Publications
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World Scientific
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The Technical Association of Photopolymers, Japan
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Hindawi Limited
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The Surface Science Society of Japan
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Oxford University Press
343 citations, 0.14%
Walter de Gruyter
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Annual Reviews
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SAGE
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EDP Sciences
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ASME International
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American Association for the Advancement of Science (AAAS)
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Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
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Beilstein-Institut
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Institution of Engineering and Technology (IET)
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The Royal Society
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Institute of Electrical Engineers of Japan (IEE Japan)
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Physical Society of Japan
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American Institute of Aeronautics and Astronautics (AIAA)
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The Korean Vacuum Society
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The Korean Institute of Electrical and Electronic Material Engineers
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The Laser Society of Japan
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The Japan Society of Plasma Science and Nuclear Fusion Research (JSPF)
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Korean Society of Mechanical Engineers
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The Electrochemical Society of Japan
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Scientific Research Publishing
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Institute of Physics, Polish Academy of Sciences
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Ceramic Society of Japan
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Public Library of Science (PLoS)
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Institute of Electronics, Information and Communications Engineers (IEICE)
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International Union of Crystallography (IUCr)
35 citations, 0.01%
34 citations, 0.01%
Societa Italiana di Fisica
34 citations, 0.01%
Canadian Science Publishing
34 citations, 0.01%
The Chemical Society of Japan
34 citations, 0.01%
The Japan Society of Polymer Processing
28 citations, 0.01%
Japan Society for Analytical Chemistry
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Biophysical Society
27 citations, 0.01%
Korean Journal of Optics and Photonics
27 citations, 0.01%
The Surface Analysis Society of Japan
26 citations, 0.01%
The Japan Society for Precision Engineering
26 citations, 0.01%
Japan Society of Mechanical Engineers
24 citations, 0.01%
The Japan Society for Technology and Plasticity
24 citations, 0.01%
Tsinghua University Press
23 citations, 0.01%
Ovid Technologies (Wolters Kluwer Health)
22 citations, 0.01%
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka) (Publications)
22 citations, 0.01%
The Magnetics Society of Japan
22 citations, 0.01%
American Scientific Publishers
21 citations, 0.01%
Korean Society of Industrial Engineering Chemistry
21 citations, 0.01%
The Russian Academy of Sciences
21 citations, 0.01%
Laser Institute of America
20 citations, 0.01%
Fuji Technology Press
20 citations, 0.01%
Materials Research Society of Korea
17 citations, 0.01%
IGI Global
16 citations, 0.01%
Shanghai Institute of Optics and Fine Mechanics
16 citations, 0.01%
Ivanovo State University of Chemistry and Technology
15 citations, 0.01%
Institute of Molecular Biology and Genetics (NAS Ukraine)
15 citations, 0.01%
American Association of Physics Teachers (AAPT)
15 citations, 0.01%
The Society of Materials Science, Japan
15 citations, 0.01%
14 citations, 0.01%
14 citations, 0.01%
Thomas Telford
14 citations, 0.01%
Japan Society of Colour Material
14 citations, 0.01%
Mary Ann Liebert
13 citations, 0.01%
Chinese Society of Rare Earths
13 citations, 0.01%
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Publishing organizations

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Watson Research Center
414 publications, 3.39%
Massachusetts Institute of Technology
329 publications, 2.69%
Stanford University
274 publications, 2.24%
University of California, Berkeley
207 publications, 1.69%
North Carolina State University
203 publications, 1.66%
University of Illinois Urbana-Champaign
202 publications, 1.65%
Cornell University
194 publications, 1.59%
United States Naval Research Laboratory
179 publications, 1.46%
Osaka University
155 publications, 1.27%
Lawrence Berkeley National Laboratory
154 publications, 1.26%
University of California, Santa Barbara
143 publications, 1.17%
California Institute of Technology
135 publications, 1.1%
Arizona State University
123 publications, 1.01%
University of Texas at Austin
119 publications, 0.97%
Texas Instruments
116 publications, 0.95%
University of Michigan
113 publications, 0.92%
University of Cambridge
111 publications, 0.91%
Interuniversity Microelectronics Centre
110 publications, 0.9%
University of Wisconsin–Madison
107 publications, 0.88%
Pennsylvania State University
106 publications, 0.87%
Tohoku University
99 publications, 0.81%
University of Florida
98 publications, 0.8%
University of Minnesota
96 publications, 0.79%
National Institute of Standards and Technology
93 publications, 0.76%
Samsung
84 publications, 0.69%
University of California, San Diego
82 publications, 0.67%
Seoul National University
80 publications, 0.65%
Purdue University
80 publications, 0.65%
Rensselaer Polytechnic Institute
78 publications, 0.64%
University of Maryland, College Park
72 publications, 0.59%
Nippon Electric Company
71 publications, 0.58%
Lawrence Livermore National Laboratory
70 publications, 0.57%
University of Houston
69 publications, 0.56%
National Tsing Hua University
68 publications, 0.56%
National Cheng Kung University
68 publications, 0.56%
University of California, Los Angeles
67 publications, 0.55%
National Yang Ming Chiao Tung University
64 publications, 0.52%
ETH Zurich
62 publications, 0.51%
Columbia University
62 publications, 0.51%
Nanyang Technological University
60 publications, 0.49%
Princeton University
60 publications, 0.49%
University of Tokyo
60 publications, 0.49%
Siemens AG
56 publications, 0.46%
Royal Philips
54 publications, 0.44%
Delft University of Technology
53 publications, 0.43%
Katholieke Universiteit Leuven
52 publications, 0.43%
National Institute of Advanced Industrial Science and Technology
52 publications, 0.43%
University of Glasgow
50 publications, 0.41%
University of Notre Dame
49 publications, 0.4%
Fujitsu Limited
49 publications, 0.4%
National University of Singapore
48 publications, 0.39%
University of Kassel
47 publications, 0.38%
University of North Carolina at Chapel Hill
43 publications, 0.35%
Georgia Institute of technology
42 publications, 0.34%
Oak Ridge National Laboratory
42 publications, 0.34%
Sandia National Laboratories California
42 publications, 0.34%
Hokkaido University
41 publications, 0.34%
Technical University of Berlin
40 publications, 0.33%
Pohang University of Science and Technology
39 publications, 0.32%
Texas A&M University
39 publications, 0.32%
Yonsei University
38 publications, 0.31%
Electronics and Telecommunications Research Institute
38 publications, 0.31%
Université Paris-Saclay
38 publications, 0.31%
National Research Council Canada
38 publications, 0.31%
University at Albany, State University of New York
38 publications, 0.31%
National Taiwan University
37 publications, 0.3%
Tokyo Institute of Technology
37 publications, 0.3%
Colorado State University
37 publications, 0.3%
Kyoto University
37 publications, 0.3%
Japan Science and Technology Agency
37 publications, 0.3%
University of Southern California
36 publications, 0.29%
Jet Propulsion Laboratory
36 publications, 0.29%
University of Illinois at Chicago
34 publications, 0.28%
Cardiff University
34 publications, 0.28%
Nagoya University
32 publications, 0.26%
Julius Maximilian University of Würzburg
32 publications, 0.26%
Vanderbilt University
31 publications, 0.25%
Korea Advanced Institute of Science and Technology
30 publications, 0.25%
Sungkyunkwan University
30 publications, 0.25%
University of Cincinnati
30 publications, 0.25%
University of Basel
29 publications, 0.24%
National Renewable Energy Laboratory
29 publications, 0.24%
University of Duisburg-Essen
29 publications, 0.24%
Technical University of Munich
28 publications, 0.23%
National Centre of Scientific Research "Demokritos"
28 publications, 0.23%
University of Utah
28 publications, 0.23%
Imperial College London
27 publications, 0.22%
Hanyang University
27 publications, 0.22%
Korea Institute of Science and Technology
27 publications, 0.22%
Ajou University
27 publications, 0.22%
University of Nottingham
26 publications, 0.21%
Northwestern University
26 publications, 0.21%
Ohio State University
26 publications, 0.21%
Max Planck Institute for Solid State Research
26 publications, 0.21%
Chalmers University of Technology
25 publications, 0.2%
École Polytechnique Fédérale de Lausanne
25 publications, 0.2%
National Institute for Materials Science
25 publications, 0.2%
RIKEN-Institute of Physical and Chemical Research
25 publications, 0.2%
Mitsubishi Electric Corporation
25 publications, 0.2%
University of Oxford
24 publications, 0.2%
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Publishing countries

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USA, 6565, 53.7%
USA
6565 publications, 53.7%
Japan, 1940, 15.87%
Japan
1940 publications, 15.87%
Germany, 850, 6.95%
Germany
850 publications, 6.95%
China, 622, 5.09%
China
622 publications, 5.09%
United Kingdom, 526, 4.3%
United Kingdom
526 publications, 4.3%
Republic of Korea, 475, 3.89%
Republic of Korea
475 publications, 3.89%
France, 395, 3.23%
France
395 publications, 3.23%
Canada, 204, 1.67%
Canada
204 publications, 1.67%
Mexico, 203, 1.66%
Mexico
203 publications, 1.66%
Italy, 198, 1.62%
Italy
198 publications, 1.62%
Switzerland, 190, 1.55%
Switzerland
190 publications, 1.55%
Netherlands, 165, 1.35%
Netherlands
165 publications, 1.35%
Russia, 150, 1.23%
Russia
150 publications, 1.23%
Belgium, 144, 1.18%
Belgium
144 publications, 1.18%
Singapore, 122, 1%
Singapore
122 publications, 1%
Sweden, 92, 0.75%
Sweden
92 publications, 0.75%
Austria, 71, 0.58%
Austria
71 publications, 0.58%
Spain, 71, 0.58%
Spain
71 publications, 0.58%
Israel, 43, 0.35%
Israel
43 publications, 0.35%
Greece, 40, 0.33%
Greece
40 publications, 0.33%
Australia, 39, 0.32%
Australia
39 publications, 0.32%
India, 36, 0.29%
India
36 publications, 0.29%
Brazil, 32, 0.26%
Brazil
32 publications, 0.26%
Denmark, 27, 0.22%
Denmark
27 publications, 0.22%
Finland, 27, 0.22%
Finland
27 publications, 0.22%
Poland, 22, 0.18%
Poland
22 publications, 0.18%
Ukraine, 20, 0.16%
Ukraine
20 publications, 0.16%
Ireland, 15, 0.12%
Ireland
15 publications, 0.12%
New Zealand, 15, 0.12%
New Zealand
15 publications, 0.12%
South Africa, 14, 0.11%
South Africa
14 publications, 0.11%
Romania, 12, 0.1%
Romania
12 publications, 0.1%
Slovakia, 12, 0.1%
Slovakia
12 publications, 0.1%
Czech Republic, 12, 0.1%
Czech Republic
12 publications, 0.1%
Bulgaria, 9, 0.07%
Bulgaria
9 publications, 0.07%
USSR, 7, 0.06%
USSR
7 publications, 0.06%
Hungary, 6, 0.05%
Hungary
6 publications, 0.05%
Puerto Rico, 6, 0.05%
Puerto Rico
6 publications, 0.05%
Argentina, 5, 0.04%
Argentina
5 publications, 0.04%
Norway, 5, 0.04%
Norway
5 publications, 0.04%
Pakistan, 5, 0.04%
Pakistan
5 publications, 0.04%
Turkey, 5, 0.04%
Turkey
5 publications, 0.04%
Slovenia, 4, 0.03%
Slovenia
4 publications, 0.03%
Philippines, 4, 0.03%
Philippines
4 publications, 0.03%
Kazakhstan, 3, 0.02%
Kazakhstan
3 publications, 0.02%
Liechtenstein, 3, 0.02%
Liechtenstein
3 publications, 0.02%
Belarus, 2, 0.02%
Belarus
2 publications, 0.02%
Portugal, 2, 0.02%
Portugal
2 publications, 0.02%
Egypt, 2, 0.02%
Egypt
2 publications, 0.02%
Latvia, 2, 0.02%
Latvia
2 publications, 0.02%
UAE, 2, 0.02%
UAE
2 publications, 0.02%
Thailand, 2, 0.02%
Thailand
2 publications, 0.02%
Albania, 1, 0.01%
Albania
1 publication, 0.01%
Vietnam, 1, 0.01%
Vietnam
1 publication, 0.01%
Iraq, 1, 0.01%
Iraq
1 publication, 0.01%
Iran, 1, 0.01%
Iran
1 publication, 0.01%
Iceland, 1, 0.01%
Iceland
1 publication, 0.01%
Qatar, 1, 0.01%
Qatar
1 publication, 0.01%
Cuba, 1, 0.01%
Cuba
1 publication, 0.01%
Lebanon, 1, 0.01%
Lebanon
1 publication, 0.01%
Lithuania, 1, 0.01%
Lithuania
1 publication, 0.01%
Malaysia, 1, 0.01%
Malaysia
1 publication, 0.01%
Moldova, 1, 0.01%
Moldova
1 publication, 0.01%
Oman, 1, 0.01%
Oman
1 publication, 0.01%
Tunisia, 1, 0.01%
Tunisia
1 publication, 0.01%
Croatia, 1, 0.01%
Croatia
1 publication, 0.01%
Czechoslovakia, 1, 0.01%
Czechoslovakia
1 publication, 0.01%
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