Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
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journal names
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Top-3 citing journals
Journal of Applied Physics
(13704 citations)
Applied Physics Letters
(12475 citations)
Top-3 organizations
Watson Research Center
(414 publications)
Massachusetts Institute of Technology
(329 publications)
Stanford University
(274 publications)
Top-3 researchers by articles count
3 publications in journal
Milekhin Alexander
DSc in Physics and Mathematics, associate professor
159 publications,
1 848 citations,
9 reviews
h-index: 23
Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences
2 publications in journal
Pashkin Yuri
121 publications,
7 878 citations,
13 reviews
h-index: 31
Lancaster University
Most cited in 5 years
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Top-100
Citing journals
Citing publishers
Publishing organizations
Publishing countries
2 publications in journal
Pashkin Yuri
121 publications,
7 878 citations,
13 reviews
h-index: 31
Lancaster University
1 publication in journal
Schitter Georg
306 publications,
6 123 citations
h-index: 37
Vienna University of Technology
1 publication in journal
Liji Huang
51 publications,
698 citations,
4 reviews
h-index: 15
1 publication in journal
Uglov Vladimir
354 publications,
3 029 citations,
2 reviews
h-index: 26