Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering
Xiaofeng Wang
1
,
W. T. ZHENG
1
,
H. Tian
1
,
S.S. Yu
1
,
Wei Xu
1
,
Sheng Meng
2
,
X. H. He
2
,
J K Han
2
,
C. Q. Sun
3
,
B. K. TAY
3
2
Publication type: Journal Article
Publication date: 2003-12-01
scimago Q1
wos Q1
SJR: 1.310
CiteScore: 13.4
Impact factor: 6.9
ISSN: 01694332, 18735584
Surfaces, Coatings and Films
General Chemistry
General Physics and Astronomy
Condensed Matter Physics
Surfaces and Interfaces
Abstract
Abstract FeN thin films were deposited on glass substrates by dc magnetron sputtering at different Ar/N 2 discharges. The composition, structure and the surface morphology of the films were characterized using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and atomic force microscopy (AFM). Films deposited at different nitrogen pressures exhibited different structures with different nitrogen contents, and the surface roughness depended on the mechanism of the film growth. Saturation magnetization and coercivity of all films were determined using superconducting quantum interference device, which showed that if N 2 /(Ar+N 2 ) flow ratio was equal to or larger than 30% the nonmagnetic single-phase γ″-FeN appeared. If N 2 /(Ar+N 2 ) flow ratio was less than 10%, the films consisted of the mixed phases of FeN 0.056 and γ′-Fe 16 N 2 , whose saturation magnetizations were larger than that of α-Fe. If N 2 /(Ar+N 2 ) flow ratio was 10%, the phases of γ′-Fe 4 N and e-Fe 3 N appeared, whose saturation magnetizations were lower than that of α-Fe.
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Wang X. et al. Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering // Applied Surface Science. 2003. Vol. 220. No. 1-4. pp. 30-39.
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Wang X., ZHENG W. T., Tian H., Yu S., Xu W., Meng S., He X. H., Han J. K., Sun C. Q., TAY B. K. Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering // Applied Surface Science. 2003. Vol. 220. No. 1-4. pp. 30-39.
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RIS
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TY - JOUR
DO - 10.1016/S0169-4332(03)00752-9
UR - https://doi.org/10.1016/S0169-4332(03)00752-9
TI - Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering
T2 - Applied Surface Science
AU - Wang, Xiaofeng
AU - ZHENG, W. T.
AU - Tian, H.
AU - Yu, S.S.
AU - Xu, Wei
AU - Meng, Sheng
AU - He, X. H.
AU - Han, J K
AU - Sun, C. Q.
AU - TAY, B. K.
PY - 2003
DA - 2003/12/01
PB - Elsevier
SP - 30-39
IS - 1-4
VL - 220
SN - 0169-4332
SN - 1873-5584
ER -
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BibTex (up to 50 authors)
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@article{2003_Wang,
author = {Xiaofeng Wang and W. T. ZHENG and H. Tian and S.S. Yu and Wei Xu and Sheng Meng and X. H. He and J K Han and C. Q. Sun and B. K. TAY},
title = {Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering},
journal = {Applied Surface Science},
year = {2003},
volume = {220},
publisher = {Elsevier},
month = {dec},
url = {https://doi.org/10.1016/S0169-4332(03)00752-9},
number = {1-4},
pages = {30--39},
doi = {10.1016/S0169-4332(03)00752-9}
}
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MLA
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Wang, Xiaofeng, et al. “Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering.” Applied Surface Science, vol. 220, no. 1-4, Dec. 2003, pp. 30-39. https://doi.org/10.1016/S0169-4332(03)00752-9.
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