Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity
V.I. Anisimkin
,
V. V. KOLESOV
,
V V Kashin
,
V A Osipenko
,
S. P. GUBIN
,
S. V. Tkachev
,
E Verona
,
S. Sun
,
A S Kuznetsova
Publication type: Journal Article
Publication date: 2018-11-01
wos Q1
SJR: —
CiteScore: —
Impact factor: 7.7
ISSN: 09254005
Materials Chemistry
Metals and Alloys
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Instrumentation
Abstract
The measurement of humidity is very important for air control in ambient, industry, cars, houses, closed apartments, museums, atomic power stations, etc. In the present work the theoretical analysis of the surface acoustic wave propagation in “graphen oxide (GO) film/ZnO film/Si substrate” layered structure has been performed. The change of GO film conductivity due to humidity has been taken into account during the calculations. Based on the obtained results an improved microwave acoustic humidity sensor has been developed. The sensor has enhanced sensitivity of about 91 kHz/% and linear response vs relative humidity in the range 20–98%RH. It is based on the mode belonging to Sezawa wave family that is shown to be more sensitive towards electric conductivity variations in GO film produced by adsorbed water molecules than the Rayleigh counterpart.
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37
Total citations:
37
Citations from 2024:
3
(8.11%)
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GOST
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Kuznetsova I. E. et al. Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity // Sensors and Actuators, B: Chemical. 2018. Vol. 272. pp. 236-242.
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Kuznetsova I. E., Sun S., Anisimkin V., KOLESOV V. V., Kashin V. V., Osipenko V. A., GUBIN S. P., Tkachev S. V., Verona E., Sun S., Kuznetsova A. S. Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity // Sensors and Actuators, B: Chemical. 2018. Vol. 272. pp. 236-242.
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RIS
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TY - JOUR
DO - 10.1016/j.snb.2018.05.158
UR - https://linkinghub.elsevier.com/retrieve/pii/S0925400518310669
TI - Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity
T2 - Sensors and Actuators, B: Chemical
AU - Kuznetsova, Iren E.
AU - Sun, Shaojun
AU - Anisimkin, V.I.
AU - KOLESOV, V. V.
AU - Kashin, V V
AU - Osipenko, V A
AU - GUBIN, S. P.
AU - Tkachev, S. V.
AU - Verona, E
AU - Sun, S.
AU - Kuznetsova, A S
PY - 2018
DA - 2018/11/01
PB - Elsevier
SP - 236-242
VL - 272
SN - 0925-4005
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2018_Kuznetsova,
author = {Iren E. Kuznetsova and Shaojun Sun and V.I. Anisimkin and V. V. KOLESOV and V V Kashin and V A Osipenko and S. P. GUBIN and S. V. Tkachev and E Verona and S. Sun and A S Kuznetsova},
title = {Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity},
journal = {Sensors and Actuators, B: Chemical},
year = {2018},
volume = {272},
publisher = {Elsevier},
month = {nov},
url = {https://linkinghub.elsevier.com/retrieve/pii/S0925400518310669},
pages = {236--242},
doi = {10.1016/j.snb.2018.05.158}
}
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