Impact of Water Vapor on the 2D MoS2 Growth in Metal-Organic Chemical Vapor Deposition
Roman I. Romanov
1
,
Ivan V Zabrosaev
1
,
Anastasia A Chouprik
1
,
S Zarubin
1
,
Ilya A Zavidovskiy
2
,
Publication type: Journal Article
Publication date: 2024-12-01
scimago Q1
wos Q2
SJR: 0.783
CiteScore: 7.0
Impact factor: 3.9
ISSN: 0042207X, 18792715
Abstract
In the presented work, the method of metal–organic chemical vapor deposition (MOCVD) using Mo(CO)6 and H2S assisted by oxidative etching with water vapor, was employed for the synthesis of MoS2. This study was aimed at detailed investigation of the films' properties obtained via this method and identifying methods for elimination of such disadvantages as the carbon impurities and the small size of crystalline domains in the films. It was found that in the temperature range from 850 °C to 950 °C, the effect of water vapor on the morphology of MoS2 is significantly different. The study of the chemical states of molybdenum and sulfur made it possible to associate the size of the crystal domains formed with the efficiency of removing the oxidized states of Mo6+ and S6+. It is assumed that the increase in the domains’ size is due to rapid lateral growth, resulting from the complete removal of the oxidized states at the edges, as well as a decrease in the density of nucleation centers due to the etching of less stable seeds on the substrate surface.
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Citations from 2024:
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(100%)
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Romanov R. I. et al. Impact of Water Vapor on the 2D MoS2 Growth in Metal-Organic Chemical Vapor Deposition // Vacuum. 2024. Vol. 230. p. 113739.
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Romanov R. I., Zabrosaev I. V., Chouprik A. A., Zarubin S., Yakubovsky D. I., Zavidovskiy I. A., Bolshakov A. D., Markeev A. M. Impact of Water Vapor on the 2D MoS2 Growth in Metal-Organic Chemical Vapor Deposition // Vacuum. 2024. Vol. 230. p. 113739.
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TY - JOUR
DO - 10.1016/j.vacuum.2024.113739
UR - https://linkinghub.elsevier.com/retrieve/pii/S0042207X24007851
TI - Impact of Water Vapor on the 2D MoS2 Growth in Metal-Organic Chemical Vapor Deposition
T2 - Vacuum
AU - Romanov, Roman I.
AU - Zabrosaev, Ivan V
AU - Chouprik, Anastasia A
AU - Zarubin, S
AU - Yakubovsky, Dmitry I.
AU - Zavidovskiy, Ilya A
AU - Bolshakov, Alexey D
AU - Markeev, Andrey M.
PY - 2024
DA - 2024/12/01
PB - Elsevier
SP - 113739
VL - 230
SN - 0042-207X
SN - 1879-2715
ER -
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BibTex (up to 50 authors)
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@article{2024_Romanov,
author = {Roman I. Romanov and Ivan V Zabrosaev and Anastasia A Chouprik and S Zarubin and Dmitry I. Yakubovsky and Ilya A Zavidovskiy and Alexey D Bolshakov and Andrey M. Markeev},
title = {Impact of Water Vapor on the 2D MoS2 Growth in Metal-Organic Chemical Vapor Deposition},
journal = {Vacuum},
year = {2024},
volume = {230},
publisher = {Elsevier},
month = {dec},
url = {https://linkinghub.elsevier.com/retrieve/pii/S0042207X24007851},
pages = {113739},
doi = {10.1016/j.vacuum.2024.113739}
}