Application of an planar X-ray waveguide for structure study of thin film coatings
V.K. Egorov
1
,
E. V. Egorov,
2
Publication type: Journal Article
Publication date: 2001-11-01
scimago Q2
wos Q3
SJR: 0.419
CiteScore: 3.9
Impact factor: 2.0
ISSN: 00406090, 18792731
Materials Chemistry
Metals and Alloys
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Abstract
Details of a planar X-ray waveguide (PXW) built using total X-ray reflection phenomenon are described. The design of the planar X-ray waveguide-monochromator is mentioned in passing. The efficiency of the X-ray beam forming systems based on a planar X-ray waveguide and on a conventional slits superimposition is compared. Characteristics of an X-ray diffractometer equipped with PXW are analyzed. Experimental diffractometer patterns of a polycrystal thin gold film on a Si wafer obtained by using a HZG-4 diffractometer equipped with PXW in the modified Bragg–Brentano diffraction geometry are presented.
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Total citations:
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Citations from 2025:
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GOST
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Egorov V., Egorov, E. V. Application of an planar X-ray waveguide for structure study of thin film coatings // Thin Solid Films. 2001. Vol. 398-399. pp. 405-412.
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Egorov V., Egorov, E. V. Application of an planar X-ray waveguide for structure study of thin film coatings // Thin Solid Films. 2001. Vol. 398-399. pp. 405-412.
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RIS
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TY - JOUR
DO - 10.1016/s0040-6090(01)01386-4
UR - https://doi.org/10.1016/s0040-6090(01)01386-4
TI - Application of an planar X-ray waveguide for structure study of thin film coatings
T2 - Thin Solid Films
AU - Egorov, V.K.
AU - Egorov,, E. V.
PY - 2001
DA - 2001/11/01
PB - Elsevier
SP - 405-412
VL - 398-399
SN - 0040-6090
SN - 1879-2731
ER -
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BibTex (up to 50 authors)
Copy
@article{2001_Egorov,
author = {V.K. Egorov and E. V. Egorov,},
title = {Application of an planar X-ray waveguide for structure study of thin film coatings},
journal = {Thin Solid Films},
year = {2001},
volume = {398-399},
publisher = {Elsevier},
month = {nov},
url = {https://doi.org/10.1016/s0040-6090(01)01386-4},
pages = {405--412},
doi = {10.1016/s0040-6090(01)01386-4}
}
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