ACS Applied Nano Materials

, volume 2 , issue 12 , pages 7521-7531

Synthesis of Large Area Two-Dimensional MoS₂Films by Sulfurization of Atomic Layer Deposited MoO₃Thin Film for Nanoelectronic Applications

Roman I Romanov ¹

Maxim G. Kozodaev ¹

D I Myakota ¹

Anna G. Chernikova ¹

Sergey Novikov ¹

Valentyn S. Volkov ¹

Aleksandr S Slavich ¹

S S Zarubin ¹

P S Chizhov ^{1, 2}

Roman R Khakimov ¹

A. A. Chouprik ¹

Cheol Mok Hwang ³

A M Markeev ¹

Hide authors affiliations Show authors affiliations: 3 affiliations

Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, 141701 Dolgoprudny, Moscow region, Russia |

Chemistry Department, Moscow State University, Leninskie Gory 1, 119992 Moscow, Russia |

Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea |

Publication type: Journal Article

Publication date: 2019-11-18

American Chemical Society (ACS)

ACS Applied Nano Materials

scimago Q1

wos Q2

SJR: 1.121

CiteScore: 8.1

Impact factor: 5.5

ISSN: 25740970

DOI: 10.1021/acsanm.9b01539

Copy DOI

General Materials Science

Abstract

The feasibility of growing atomically thin MoS2 films (down to two monolayers) on several tens of cm2 area was demonstrated by first depositing the MoO3 thin film by using an atomic layer depositio...

Found

9 citations

Markeev Andrey

🥼

DSc in Engineering

109 publications, 3 011 citations, 5 reviews

h-index: 29

Moscow Institute of Physics and Technology

Research interests

Atomic layer deposition

Ferroelectrics based on hafnium oxide

High-k dielectrics

Neuromorphic devices

Oxide resistive memory

Transition metal dichalcogenides

Two-dimensional materials

9 citations

Romanov Roman

PhD in Physics and Mathematics

136 publications, 1 345 citations

h-index: 21

Moscow Institute of Physics and Technology

National Research Nuclear University MEPhI

Research interests

mechanical behavior of materials.Fatigue and Tensile properties of Dual Phase Steel produced by controlled rolling process and heat treatment.

2 citations

Chernikova Anna

48 publications, 1 874 citations, 11 reviews

h-index: 22

Moscow Institute of Physics and Technology

2 citations

Chouprik Anastasia

53 publications, 1 107 citations, 48 reviews

h-index: 17

1 citation

Arsenin Aleksey

🥼 🤝

PhD in Physics and Mathematics

146 publications, 2 600 citations, 41 reviews

h-index: 27

Moscow Institute of Physics and Technology

Optical interconnects

Surface Enhanced Raman Spectroscopy

Thin films

Two-dimensional materials

Ultrathin films

Van der Waals materials

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Cite this

GOST |

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GOST Copy

Romanov R. I. et al. Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications // ACS Applied Nano Materials. 2019. Vol. 2. No. 12. pp. 7521-7531.

GOST all authors (up to 50) Copy

Romanov R. I., Kozodaev M. G., Myakota D. I., Chernikova A. G., Novikov S., Volkov V. S., Slavich A. S., Zarubin S. S., Chizhov P. S., Khakimov R. R., Chouprik A. A., Hwang C. M., Markeev A. M. Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications // ACS Applied Nano Materials. 2019. Vol. 2. No. 12. pp. 7521-7531.

RIS |

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RIS Copy

TY - JOUR

DO - 10.1021/acsanm.9b01539

UR - https://doi.org/10.1021/acsanm.9b01539

TI - Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications

T2 - ACS Applied Nano Materials

AU - Romanov, Roman I

AU - Kozodaev, Maxim G.

AU - Myakota, D I

AU - Chernikova, Anna G.

AU - Novikov, Sergey

AU - Volkov, Valentyn S.

AU - Slavich, Aleksandr S

AU - Zarubin, S S

AU - Chizhov, P S

AU - Khakimov, Roman R

AU - Chouprik, A. A.

AU - Hwang, Cheol Mok

AU - Markeev, A M

PY - 2019

DA - 2019/11/18

PB - American Chemical Society (ACS)

SP - 7521-7531

IS - 12

VL - 2

SN - 2574-0970

ER -

BibTex |

Cite this

BibTex (up to 50 authors) Copy

@article{2019_Romanov,

author = {Roman I Romanov and Maxim G. Kozodaev and D I Myakota and Anna G. Chernikova and Sergey Novikov and Valentyn S. Volkov and Aleksandr S Slavich and S S Zarubin and P S Chizhov and Roman R Khakimov and A. A. Chouprik and Cheol Mok Hwang and A M Markeev},

title = {Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications},

journal = {ACS Applied Nano Materials},

year = {2019},

volume = {2},

publisher = {American Chemical Society (ACS)},

month = {nov},

url = {https://doi.org/10.1021/acsanm.9b01539},

number = {12},

pages = {7521--7531},

doi = {10.1021/acsanm.9b01539}

}

MLA

Cite this

MLA Copy

Romanov, Roman I., et al. “Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications.” ACS Applied Nano Materials, vol. 2, no. 12, Nov. 2019, pp. 7521-7531. https://doi.org/10.1021/acsanm.9b01539.

Publisher

American Chemical Society (ACS)

Journal

ACS Applied Nano Materials

scimago Q1

wos Q2

SJR

1.121

CiteScore

8.1

Impact factor

5.5

ISSN

25740970 (Print, Electronic)

Labs

Laboratory of Atomic Layer Deposition and Physics of Nanoelectronic Structures

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