ACS Applied Nano Materials

, том 2 , издание 12 , страницы 7521-7531

Synthesis of Large Area Two-Dimensional MoS₂Films by Sulfurization of Atomic Layer Deposited MoO₃Thin Film for Nanoelectronic Applications

Тип публикации: Journal Article

Дата публикации: 2019-11-18

American Chemical Society (ACS)

ACS Applied Nano Materials

SCImago Q1

WOS Q2

БС1

SJR: 1.007

CiteScore: 9

Impact factor: 5.5

ISSN: 25740970

DOI: 10.1021/acsanm.9b01539

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General Materials Science

Краткое описание

The feasibility of growing atomically thin MoS2 films (down to two monolayers) on several tens of cm2 area was demonstrated by first depositing the MoO3 thin film by using an atomic layer depositio...

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Journal of Physical Chemistry C	Journal of Physical Chemistry C, 4, 7.69% Journal of Physical Chemistry C 4 публикации, 7.69%
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Micro and Nano Engineering	Micro and Nano Engineering, 1, 1.92% Micro and Nano Engineering 1 публикация, 1.92%
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Materials Research Express	Materials Research Express, 1, 1.92% Materials Research Express 1 публикация, 1.92%
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Microchemical Journal	Microchemical Journal, 1, 1.92% Microchemical Journal 1 публикация, 1.92%
Physica Status Solidi (A) Applications and Materials Science	Physica Status Solidi (A) Applications and Materials Science, 1, 1.92% Physica Status Solidi (A) Applications and Materials Science 1 публикация, 1.92%
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ГОСТ |

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Romanov R. I. et al. Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications // ACS Applied Nano Materials. 2019. Vol. 2. No. 12. pp. 7521-7531.

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Romanov R. I., Kozodaev M. G., Myakota D. I., Chernikova A. G., Novikov S., Volkov V. S., Slavich A. S., Zarubin S. S., Chizhov P. S., Khakimov R. R., Chouprik A. A., Hwang C. M., Markeev A. M. Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications // ACS Applied Nano Materials. 2019. Vol. 2. No. 12. pp. 7521-7531.

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TY - JOUR

DO - 10.1021/acsanm.9b01539

UR - https://doi.org/10.1021/acsanm.9b01539

TI - Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications

T2 - ACS Applied Nano Materials

AU - Romanov, Roman I

AU - Kozodaev, Maxim G.

AU - Myakota, D I

AU - Chernikova, Anna G.

AU - Novikov, Sergey

AU - Volkov, Valentyn S.

AU - Slavich, Aleksandr S

AU - Zarubin, S S

AU - Chizhov, P S

AU - Khakimov, Roman R

AU - Chouprik, A. A.

AU - Hwang, Cheol Mok

AU - Markeev, A M

PY - 2019

DA - 2019/11/18

PB - American Chemical Society (ACS)

SP - 7521-7531

IS - 12

VL - 2

SN - 2574-0970

ER -

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@article{2019_Romanov,

author = {Roman I Romanov and Maxim G. Kozodaev and D I Myakota and Anna G. Chernikova and Sergey Novikov and Valentyn S. Volkov and Aleksandr S Slavich and S S Zarubin and P S Chizhov and Roman R Khakimov and A. A. Chouprik and Cheol Mok Hwang and A M Markeev},

title = {Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications},

journal = {ACS Applied Nano Materials},

year = {2019},

volume = {2},

publisher = {American Chemical Society (ACS)},

month = {nov},

url = {https://doi.org/10.1021/acsanm.9b01539},

number = {12},

pages = {7521--7531},

doi = {10.1021/acsanm.9b01539}

}

MLA

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MLA Скопировать

Romanov, Roman I., et al. “Synthesis of Large Area Two-Dimensional MoS2Films by Sulfurization of Atomic Layer Deposited MoO3Thin Film for Nanoelectronic Applications.” ACS Applied Nano Materials, vol. 2, no. 12, Nov. 2019, pp. 7521-7531. https://doi.org/10.1021/acsanm.9b01539.

Издатель

American Chemical Society (ACS)

Журнал

ACS Applied Nano Materials

SCImago Q1

WOS Q2

БС1

SJR

1.007

CiteScore

Impact factor

5.5