, volume 102 , issue 8 , pages 83547

Effect of the density of collision cascades on ion implantation damage in ZnO

A Yu Azarov ¹

S. O. Kucheyev ²

A. I. TITOV ¹

P A Karaseov ¹

Hide authors affiliations Show authors affiliations: 2 affiliations

St. Petersburg State Polytechnic University Department of Physical Electronics, , St. Petersburg 195251, Russian Federation |

Lawrence Livermore National Laboratory , Livermore, California 94551, USA |

Publication type: Journal Article

Publication date: 2007-10-15

AIP Publishing

Journal of Applied Physics

scimago Q2

wos Q3

SJR: 0.580

CiteScore: 5.1

Impact factor: 2.5

ISSN: 00218979, 10897550

DOI: 10.1063/1.2801404

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General Physics and Astronomy

Abstract

We study structural disorder in ZnO bombarded at room temperature with 1.3 keV∕amu atomic P and cluster PFn (n=2 and 4) ions. Rutherford backscattering/channeling spectrometry results show that the density of collision cascades has a negligible effect on the damage buildup in the crystal bulk in the dose range resulting in ∼1.5−15 displacements per atom. Hence, the amount of stable post-implantation disorder in the bulk can be predicted based on ballistic calculations. In contrast, the cascade density affects radiation damage in the near-surface region. An intermediate defect peak between the expected surface and bulk peaks of disorder forms for ion irradiation conditions with dense cascades.

Found

1 citation

Fedorenko Elizaveta

6 publications, 30 citations

h-index: 4

Peter the Great St. Petersburg Polytechnic University

1 citation

Klevtsov Anton

🥼 🤝

lecturer

5 publications, 10 citations, 1 review

h-index: 2

Peter the Great St. Petersburg Polytechnic University

Research interests

Interaction of ions with the surface

Ion implantation

Magnetism

Mechanisms of accumulation and annihilation of radiation defects during radiation exposure

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Cite this

GOST |

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GOST Copy

Azarov A. Yu. et al. Effect of the density of collision cascades on ion implantation damage in ZnO // Journal of Applied Physics. 2007. Vol. 102. No. 8. p. 83547.

GOST all authors (up to 50) Copy

Azarov A. Yu., Kucheyev S. O., TITOV A. I., Karaseov P. A. Effect of the density of collision cascades on ion implantation damage in ZnO // Journal of Applied Physics. 2007. Vol. 102. No. 8. p. 83547.

RIS |

Cite this

RIS Copy

TY - JOUR

DO - 10.1063/1.2801404

UR - https://doi.org/10.1063/1.2801404

TI - Effect of the density of collision cascades on ion implantation damage in ZnO

T2 - Journal of Applied Physics

AU - Azarov, A Yu

AU - Kucheyev, S. O.

AU - TITOV, A. I.

AU - Karaseov, P A

PY - 2007

DA - 2007/10/15

PB - AIP Publishing

SP - 83547

IS - 8

VL - 102

SN - 0021-8979

SN - 1089-7550

ER -

BibTex |

Cite this

BibTex (up to 50 authors) Copy

@article{2007_Azarov,

author = {A Yu Azarov and S. O. Kucheyev and A. I. TITOV and P A Karaseov},

title = {Effect of the density of collision cascades on ion implantation damage in ZnO},

journal = {Journal of Applied Physics},

year = {2007},

volume = {102},

publisher = {AIP Publishing},

month = {oct},

url = {https://doi.org/10.1063/1.2801404},

number = {8},

pages = {83547},

doi = {10.1063/1.2801404}

}

MLA

Cite this

MLA Copy

Azarov, A. Yu., et al. “Effect of the density of collision cascades on ion implantation damage in ZnO.” Journal of Applied Physics, vol. 102, no. 8, Oct. 2007, p. 83547. https://doi.org/10.1063/1.2801404.

Publisher

AIP Publishing

Journal

Journal of Applied Physics

scimago Q2

wos Q3

SJR

0.580

CiteScore

5.1

Impact factor

2.5

ISSN

00218979 (Print)

10897550 (Electronic)

Labs

Laboratory of Physics of Interaction of Radiation with Matter

Profiles