Journal of Micromechanics and Microengineering

, volume 30 , issue 6 , pages 65001

Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier

Mikhail Basov ¹

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Dukhov Automatics Research Institute (VNIIA), Moscow, Russia |

Publication type: Journal Article

Publication date: 2020-04-27

IOP Publishing

Journal of Micromechanics and Microengineering

scimago Q2

wos Q3

SJR: 0.496

CiteScore: 5.0

Impact factor: 2.1

ISSN: 09601317, 13616439

DOI: 10.1088/1361-6439/ab82f1

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Electronic, Optical and Magnetic Materials

Electrical and Electronic Engineering

Mechanical Engineering

Mechanics of Materials

Abstract

A mathematical model of a high-sensitivity pressure sensor with a novel electrical circuit utilizing piezosensitive transistor differential amplifier with negative feedback loop (PDA-NFL) is presented. Circuits utilizing differential transistor amplifiers based on vertical n-p-n and lateral p-n-p transistors are analyzed and optimized for sensitivity to pressure and stability of output signal in operating temperature range. Parameters of fabrication process necessary for modeling of I-V characteristics of transistors are discussed. The results of the model are sufficiently close to the experimental data.

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6 citations

Basov Mikhail

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PhD in Engineering

13 publications, 288 citations, 431 reviews

h-index: 10

Dukhov Research Institute of Automatics

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Basov M. Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier // Journal of Micromechanics and Microengineering. 2020. Vol. 30. No. 6. p. 65001.

GOST all authors (up to 50) Copy

Basov M. Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier // Journal of Micromechanics and Microengineering. 2020. Vol. 30. No. 6. p. 65001.

RIS |

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RIS Copy

TY - JOUR

DO - 10.1088/1361-6439/ab82f1

UR - https://iopscience.iop.org/article/10.1088/1361-6439/ab82f1

TI - Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier

T2 - Journal of Micromechanics and Microengineering

AU - Basov, Mikhail

PY - 2020

DA - 2020/04/27

PB - IOP Publishing

SP - 65001

IS - 6

VL - 30

SN - 0960-1317

SN - 1361-6439

ER -

BibTex |

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@article{2020_Basov,

author = {Mikhail Basov},

title = {Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier},

journal = {Journal of Micromechanics and Microengineering},

year = {2020},

volume = {30},

publisher = {IOP Publishing},

month = {apr},

url = {https://iopscience.iop.org/article/10.1088/1361-6439/ab82f1},

number = {6},

pages = {65001},

doi = {10.1088/1361-6439/ab82f1}

}

MLA

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MLA Copy

Basov, Mikhail. “Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier.” Journal of Micromechanics and Microengineering, vol. 30, no. 6, Apr. 2020, p. 65001. https://iopscience.iop.org/article/10.1088/1361-6439/ab82f1.