Journal of Micromechanics and Microengineering, volume 30, issue 6, pages 65001

Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier

Publication typeJournal Article
Publication date2020-04-27
Quartile SCImago
Q2
Quartile WOS
Q3
Impact factor2.3
ISSN09601317, 13616439
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Mechanical Engineering
Mechanics of Materials
Abstract
A mathematical model of a high-sensitivity pressure sensor with a novel electrical circuit utilizing piezosensitive transistor differential amplifier with negative feedback loop (PDA-NFL) is presented. Circuits utilizing differential transistor amplifiers based on vertical n-p-n and lateral p-n-p transistors are analyzed and optimized for sensitivity to pressure and stability of output signal in operating temperature range. Parameters of fabrication process necessary for modeling of I-V characteristics of transistors are discussed. The results of the model are sufficiently close to the experimental data.

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GOST Copy
Basov M. Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier // Journal of Micromechanics and Microengineering. 2020. Vol. 30. No. 6. p. 65001.
GOST all authors (up to 50) Copy
Basov M. Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier // Journal of Micromechanics and Microengineering. 2020. Vol. 30. No. 6. p. 65001.
RIS |
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RIS Copy
TY - JOUR
DO - 10.1088/1361-6439/ab82f1
UR - https://doi.org/10.1088%2F1361-6439%2Fab82f1
TI - Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier
T2 - Journal of Micromechanics and Microengineering
AU - Basov, Mikhail
PY - 2020
DA - 2020/04/27 00:00:00
PB - IOP Publishing
SP - 65001
IS - 6
VL - 30
SN - 0960-1317
SN - 1361-6439
ER -
BibTex |
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BibTex Copy
@article{2020_Basov,
author = {Mikhail Basov},
title = {Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier},
journal = {Journal of Micromechanics and Microengineering},
year = {2020},
volume = {30},
publisher = {IOP Publishing},
month = {apr},
url = {https://doi.org/10.1088%2F1361-6439%2Fab82f1},
number = {6},
pages = {65001},
doi = {10.1088/1361-6439/ab82f1}
}
MLA
Cite this
MLA Copy
Basov, Mikhail. “Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier.” Journal of Micromechanics and Microengineering, vol. 30, no. 6, Apr. 2020, p. 65001. https://doi.org/10.1088%2F1361-6439%2Fab82f1.
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