Element analysis of thin films and liquid dry residue by X-ray and ion beam methods

V.K. Egorov ¹

E. V. Egorov, ²

M S Afanasev ³

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IMT RAS, Chernogolovka, Moscow district, 142432 Russia |

Financial University under the Government of the Russian Federation, Moscow, Russia |

IRE RAS, Fryazino, Moscow district, Russia |

Publication type: Journal Article

Publication date: 2019-07-01

IOP Publishing

Journal: Journal of Physics: Conference Series

SJR: 0.180

CiteScore: 1.2

Impact factor: —

ISSN: 17426588, 17426596

DOI: 10.1088/1742-6596/1281/1/012011

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General Physics and Astronomy

Abstract

The work discusses procedure peculiarities of thin films, surface layers and liquid dry residue elements diagnostics. There are showed that the ion beam analysis embellished by TXRF method is necessary and sufficient for element analysis of material surface layers. Experimental data of thin film surface layers obtained by TXRF, RBS and PIXE methods are presented.

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