X-ray fluorescence material analysis initiated by high energy proton beams

The work presents short characteristics of X-ray fluorescence method for the material element composite diagnostics in conditions of characteristic fluorescence excitation by hard X-ray beams and high energy proton beams (PIXE). There are discussed comparative data of X-ray and ion beams excitation. Specific attention is devoted to X-ray exciting beam total reflection method (TXRF) and its adaptation to the ion beam excitation by the planar X-ray waveguide-resonator application. It is shown that the modified PIXE method allows to analyze the element composition of thin surface layer and is very effective for the light element diagnostics in it.