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Journal of Physics: Conference Series, volume 1281, issue 1, pages 12011

Element analysis of thin films and liquid dry residue by X-ray and ion beam methods

Egorov V.K. 1
, 
Egorov, E. V. 2
, 
Afanasev M S 3
1
 
IMT RAS, Chernogolovka, Moscow district, 142432 Russia | 
2
 
3
 
IRE RAS, Fryazino, Moscow district, Russia | 
Publication type: Journal Article
Publication date: 2019-07-01
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ISSN: 17426588, 17426596
General Physics and Astronomy
Abstract

The work discusses procedure peculiarities of thin films, surface layers and liquid dry residue elements diagnostics. There are showed that the ion beam analysis embellished by TXRF method is necessary and sufficient for element analysis of material surface layers. Experimental data of thin film surface layers obtained by TXRF, RBS and PIXE methods are presented.

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Egorov V., Egorov, E. V., Afanasev M. S. Element analysis of thin films and liquid dry residue by X-ray and ion beam methods // Journal of Physics: Conference Series. 2019. Vol. 1281. No. 1. p. 12011.
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Egorov V., Egorov, E. V., Afanasev M. S. Element analysis of thin films and liquid dry residue by X-ray and ion beam methods // Journal of Physics: Conference Series. 2019. Vol. 1281. No. 1. p. 12011.
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TY - JOUR
DO - 10.1088/1742-6596/1281/1/012011
UR - https://doi.org/10.1088%2F1742-6596%2F1281%2F1%2F012011
TI - Element analysis of thin films and liquid dry residue by X-ray and ion beam methods
T2 - Journal of Physics: Conference Series
AU - Egorov, V.K.
AU - Egorov,, E. V.
AU - Afanasev, M S
PY - 2019
DA - 2019/07/01 00:00:00
PB - IOP Publishing
SP - 12011
IS - 1
VL - 1281
SN - 1742-6588
SN - 1742-6596
ER -
BibTex |
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BibTex Copy
@article{2019_Egorov,
author = {V.K. Egorov and E. V. Egorov, and M S Afanasev},
title = {Element analysis of thin films and liquid dry residue by X-ray and ion beam methods},
journal = {Journal of Physics: Conference Series},
year = {2019},
volume = {1281},
publisher = {IOP Publishing},
month = {jul},
url = {https://doi.org/10.1088%2F1742-6596%2F1281%2F1%2F012011},
number = {1},
pages = {12011},
doi = {10.1088/1742-6596/1281/1/012011}
}
MLA
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Egorov, V.K., et al. “Element analysis of thin films and liquid dry residue by X-ray and ion beam methods.” Journal of Physics: Conference Series, vol. 1281, no. 1, Jul. 2019, p. 12011. https://doi.org/10.1088%2F1742-6596%2F1281%2F1%2F012011.
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