Institute of Electrical and Electronics Engineers (IEEE)

IEEE Sensors Journal

, volume 20 , issue 14 , pages 7646-7652

Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures

Mikhail Basov ¹

Denis M Prigodskiy ¹

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VNIIA, Moscow, Russia |

Publication type: Journal Article

Publication date: 2020-07-15

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Sensors Journal

scimago Q1

wos Q1

SJR: 1.039

CiteScore: 8.2

Impact factor: 4.5

ISSN: 1530437X, 15581748, 23799153

DOI: 10.1109/jsen.2020.2980326

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Electrical and Electronic Engineering

Instrumentation

Abstract

The investigation of the pressure sensor chip's design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a diaphragm has been defined using available technological resources. The pressure sensor chip with an area of 6.15 × 6.15 mm has an average sensitivity S of 34.5 mV/ κPa/V at nonlinearity 2K _NL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 κPa. The developed pressure sensor can be used in medicine, automotive industry and highly specialized scientific developments.

Found

7 citations

Basov Mikhail

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PhD in Engineering

13 publications, 288 citations, 431 reviews

h-index: 10

Dukhov Research Institute of Automatics

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GOST |

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Basov M. et al. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures // IEEE Sensors Journal. 2020. Vol. 20. No. 14. pp. 7646-7652.

GOST all authors (up to 50) Copy

Basov M., Prigodskiy D. M. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures // IEEE Sensors Journal. 2020. Vol. 20. No. 14. pp. 7646-7652.

RIS |

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RIS Copy

TY - JOUR

DO - 10.1109/jsen.2020.2980326

UR - https://ieeexplore.ieee.org/document/9034142/

TI - Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures

T2 - IEEE Sensors Journal

AU - Basov, Mikhail

AU - Prigodskiy, Denis M

PY - 2020

DA - 2020/07/15

PB - Institute of Electrical and Electronics Engineers (IEEE)

SP - 7646-7652

IS - 14

VL - 20

SN - 1530-437X

SN - 1558-1748

SN - 2379-9153

ER -

BibTex |

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BibTex (up to 50 authors) Copy

@article{2020_Basov,

author = {Mikhail Basov and Denis M Prigodskiy},

title = {Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures},

journal = {IEEE Sensors Journal},

year = {2020},

volume = {20},

publisher = {Institute of Electrical and Electronics Engineers (IEEE)},

month = {jul},

url = {https://ieeexplore.ieee.org/document/9034142/},

number = {14},

pages = {7646--7652},

doi = {10.1109/jsen.2020.2980326}

}

MLA

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MLA Copy

Basov, Mikhail, et al. “Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures.” IEEE Sensors Journal, vol. 20, no. 14, Jul. 2020, pp. 7646-7652. https://ieeexplore.ieee.org/document/9034142/.