IEEE Sensors Journal, volume 20, issue 14, pages 7646-7652

Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures

Basov Mikhail

Prigodskiy Denis M

Publication type: Journal Article

Publication date: 2020-07-15

IEEE

Journal: IEEE Sensors Journal

Quartile SCImago

Quartile WOS

Impact factor: 4.3

ISSN: 1530437X

DOI: 10.1109/jsen.2020.2980326

Copy DOI

Electrical and Electronic Engineering

Instrumentation

Abstract

The investigation of the pressure sensor chip's design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a diaphragm has been defined using available technological resources. The pressure sensor chip with an area of 6.15 × 6.15 mm has an average sensitivity S of 34.5 mV/ κPa/V at nonlinearity 2K _NL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 κPa. The developed pressure sensor can be used in medicine, automotive industry and highly specialized scientific developments.

By date By citations

Citations by journals

	1 2 3 4 5 6 7
IEEE Sensors Journal	IEEE Sensors Journal, 7, 26.92% IEEE Sensors Journal 7 publications, 26.92%
Measurement: Journal of the International Measurement Confederation	Measurement: Journal of the International Measurement Confederation, 2, 7.69% Measurement: Journal of the International Measurement Confederation 2 publications, 7.69%
Journal of Micromechanics and Microengineering	Journal of Micromechanics and Microengineering, 2, 7.69% Journal of Micromechanics and Microengineering 2 publications, 7.69%
Journal of Microelectromechanical Systems	Journal of Microelectromechanical Systems, 2, 7.69% Journal of Microelectromechanical Systems 2 publications, 7.69%
Journal of Imaging	Journal of Imaging, 1, 3.85% Journal of Imaging 1 publication, 3.85%
Bioinspiration and Biomimetics	Bioinspiration and Biomimetics, 1, 3.85% Bioinspiration and Biomimetics 1 publication, 3.85%
Physica Scripta	Physica Scripta, 1, 3.85% Physica Scripta 1 publication, 3.85%
Smart Materials and Structures	Smart Materials and Structures, 1, 3.85% Smart Materials and Structures 1 publication, 3.85%
Sensors and Actuators, A: Physical	Sensors and Actuators, A: Physical, 1, 3.85% Sensors and Actuators, A: Physical 1 publication, 3.85%
IEEE Transactions on Electron Devices	IEEE Transactions on Electron Devices, 1, 3.85% IEEE Transactions on Electron Devices 1 publication, 3.85%
IEEE Electron Device Letters	IEEE Electron Device Letters, 1, 3.85% IEEE Electron Device Letters 1 publication, 3.85%
Measurement Science and Technology	Measurement Science and Technology, 1, 3.85% Measurement Science and Technology 1 publication, 3.85%
Micromachines	Micromachines, 1, 3.85% Micromachines 1 publication, 3.85%
Microsystems and Nanoengineering	Microsystems and Nanoengineering, 1, 3.85% Microsystems and Nanoengineering 1 publication, 3.85%
	1 2 3 4 5 6 7

Citations by publishers

	2 4 6 8 10 12
IEEE	IEEE, 11, 42.31% IEEE 11 publications, 42.31%
IOP Publishing	IOP Publishing, 6, 23.08% IOP Publishing 6 publications, 23.08%
Elsevier	Elsevier, 3, 11.54% Elsevier 3 publications, 11.54%
Multidisciplinary Digital Publishing Institute (MDPI)	Multidisciplinary Digital Publishing Institute (MDPI), 2, 7.69% Multidisciplinary Digital Publishing Institute (MDPI) 2 publications, 7.69%
Springer Nature	Springer Nature, 1, 3.85% Springer Nature 1 publication, 3.85%
	2 4 6 8 10 12

We do not take into account publications that without a DOI.
Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
Statistics recalculated weekly.

{"yearsCitations":{"type":"bar","data":{"show":true,"labels":[2020,2021,2022,2023,2024],"ids":[0,0,0,0,0],"codes":[0,0,0,0,0],"imageUrls":["","","","",""],"datasets":[{"label":"Citations number","data":[2,6,7,9,2],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":["7.69","23.08","26.92","34.62","7.69"],"barThickness":null}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"}},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"}}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"journals":{"type":"bar","data":{"show":true,"labels":["IEEE Sensors Journal","Measurement: Journal of the International Measurement Confederation","Journal of Micromechanics and Microengineering","Journal of Microelectromechanical Systems","Journal of Imaging","Bioinspiration and Biomimetics","Physica Scripta","Smart Materials and Structures","Sensors and Actuators, A: Physical","IEEE Transactions on Electron Devices","IEEE Electron Device Letters","Measurement Science and Technology","Micromachines","Microsystems and Nanoengineering"],"ids":[11552,858,25161,20197,17161,17480,19105,4214,22011,25183,5727,17063,1083,18378],"codes":[0,0,0,0,0,0,0,0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp"],"datasets":[{"label":"","data":[7,2,2,2,1,1,1,1,1,1,1,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[26.92,7.69,7.69,7.69,3.85,3.85,3.85,3.85,3.85,3.85,3.85,3.85,3.85,3.85],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"}},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"}}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Journals","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"publishers":{"type":"bar","data":{"show":true,"labels":["IEEE","IOP Publishing","Elsevier","Multidisciplinary Digital Publishing Institute (MDPI)","Springer Nature"],"ids":[6953,2075,17,202,8],"codes":[0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp"],"datasets":[{"label":"","data":[11,6,3,2,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[42.31,23.08,11.54,7.69,3.85],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"}},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"}}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Publishers","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}}}

Metrics

Cite this

GOST |

Cite this

GOST Copy

Basov M., Prigodskiy D. M. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures // IEEE Sensors Journal. 2020. Vol. 20. No. 14. pp. 7646-7652.

GOST all authors (up to 50) Copy

Basov M., Prigodskiy D. M. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures // IEEE Sensors Journal. 2020. Vol. 20. No. 14. pp. 7646-7652.

RIS |

Cite this

RIS Copy

TY - JOUR

DO - 10.1109/jsen.2020.2980326

UR - https://doi.org/10.1109%2Fjsen.2020.2980326

TI - Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures

T2 - IEEE Sensors Journal

AU - Basov, Mikhail

AU - Prigodskiy, Denis M

PY - 2020

DA - 2020/07/15 00:00:00

PB - IEEE

SP - 7646-7652

IS - 14

VL - 20

SN - 1530-437X

ER -

BibTex |

Cite this

BibTex Copy

@article{2020_Basov,

author = {Mikhail Basov and Denis M Prigodskiy},

title = {Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures},

journal = {IEEE Sensors Journal},

year = {2020},

volume = {20},

publisher = {IEEE},

month = {jul},

url = {https://doi.org/10.1109%2Fjsen.2020.2980326},

number = {14},

pages = {7646--7652},

doi = {10.1109/jsen.2020.2980326}

}

MLA

Cite this

MLA Copy

Basov, Mikhail, and Denis M Prigodskiy. “Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures.” IEEE Sensors Journal, vol. 20, no. 14, Jul. 2020, pp. 7646-7652. https://doi.org/10.1109%2Fjsen.2020.2980326.

Found error?

Publisher

IEEE

Journal

IEEE Sensors Journal

Quartile SCImago

Quartile WOS

Impact factor

4.3

ISSN

1530437X (Print)

Labs

Development and research of microelectromechanical systems and semiconductor sensors

Profiles

Basov, Mikhail Viktorovich