Institute of Electrical and Electronics Engineers (IEEE)

IEEE Sensors Journal

, том 20 , издание 14 , страницы 7646-7652

Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures

Mikhail Basov ¹

Denis M Prigodskiy ¹

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VNIIA, Moscow, Russia |

Тип публикации: Journal Article

Дата публикации: 2020-07-15

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Sensors Journal

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SJR: 1.039

CiteScore: 8.2

Impact factor: 4.5

ISSN: 1530437X, 15581748, 23799153

DOI: 10.1109/jsen.2020.2980326

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Electrical and Electronic Engineering

Instrumentation

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The investigation of the pressure sensor chip's design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a diaphragm has been defined using available technological resources. The pressure sensor chip with an area of 6.15 × 6.15 mm has an average sensitivity S of 34.5 mV/ κPa/V at nonlinearity 2K _NL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 κPa. The developed pressure sensor can be used in medicine, automotive industry and highly specialized scientific developments.

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Басов Михаил

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13 публикаций, 281 цитирование, 427 рецензий

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Всероссийский научно-исследовательский институт автоматики имени Н. Л. Духова

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Basov M. et al. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures // IEEE Sensors Journal. 2020. Vol. 20. No. 14. pp. 7646-7652.

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Basov M., Prigodskiy D. M. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures // IEEE Sensors Journal. 2020. Vol. 20. No. 14. pp. 7646-7652.

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TY - JOUR

DO - 10.1109/jsen.2020.2980326

UR - https://ieeexplore.ieee.org/document/9034142/

TI - Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures

T2 - IEEE Sensors Journal

AU - Basov, Mikhail

AU - Prigodskiy, Denis M

PY - 2020

DA - 2020/07/15

PB - Institute of Electrical and Electronics Engineers (IEEE)

SP - 7646-7652

IS - 14

VL - 20

SN - 1530-437X

SN - 1558-1748

SN - 2379-9153

ER -

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@article{2020_Basov,

author = {Mikhail Basov and Denis M Prigodskiy},

title = {Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures},

journal = {IEEE Sensors Journal},

year = {2020},

volume = {20},

publisher = {Institute of Electrical and Electronics Engineers (IEEE)},

month = {jul},

url = {https://ieeexplore.ieee.org/document/9034142/},

number = {14},

pages = {7646--7652},

doi = {10.1109/jsen.2020.2980326}

}

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Basov, Mikhail, et al. “Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures.” IEEE Sensors Journal, vol. 20, no. 14, Jul. 2020, pp. 7646-7652. https://ieeexplore.ieee.org/document/9034142/.