Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures
Publication type: Journal Article
Publication date: 2013-07-01
scimago Q4
wos Q4
SJR: 0.165
CiteScore: 0.8
Impact factor: 0.4
ISSN: 10274510, 18197094
Surfaces, Coatings and Films
Abstract
The possibilities of the nondestructive ion-beam diagnostics of planar nanostructures by the Rutherford backscattering (RBS) of H+ and He+ ion beams with energies of 0.9–1.6 MeV is briefly reviewed. The results of the ion-beam testing of Ba1−x Sr x TiO3 deposited onto Si (100), MgO (100), and NdGaO3 (100) single-crystal substrates are discussed. The degree of element inhomogeneity over the thickness of the coatings under study and the level of the diffuse contamination of the films by substrate atoms are determined by means of RBS measurements.
Found
Nothing found, try to update filter.
Found
Nothing found, try to update filter.
Top-30
Journals
|
1
|
|
|
Instruments and Experimental Techniques
1 publication, 50%
|
|
|
Journal of Physics: Conference Series
1 publication, 50%
|
|
|
1
|
Publishers
|
1
|
|
|
Pleiades Publishing
1 publication, 50%
|
|
|
IOP Publishing
1 publication, 50%
|
|
|
1
|
- We do not take into account publications without a DOI.
- Statistics recalculated weekly.
Are you a researcher?
Create a profile to get free access to personal recommendations for colleagues and new articles.
Metrics
2
Total citations:
2
Citations from 2024:
0
Cite this
GOST |
RIS |
BibTex |
MLA
Cite this
GOST
Copy
Egorov V., Egorov, E. V., Afanasev M. S. Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures // Journal of Surface Investigation. 2013. Vol. 7. No. 4. pp. 640-648.
GOST all authors (up to 50)
Copy
Egorov V., Egorov, E. V., Afanasev M. S. Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures // Journal of Surface Investigation. 2013. Vol. 7. No. 4. pp. 640-648.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1134/S1027451013040083
UR - https://doi.org/10.1134/S1027451013040083
TI - Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures
T2 - Journal of Surface Investigation
AU - Egorov, V.K.
AU - Egorov,, E. V.
AU - Afanasev, M S
PY - 2013
DA - 2013/07/01
PB - Pleiades Publishing
SP - 640-648
IS - 4
VL - 7
SN - 1027-4510
SN - 1819-7094
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2013_Egorov,
author = {V.K. Egorov and E. V. Egorov, and M S Afanasev},
title = {Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures},
journal = {Journal of Surface Investigation},
year = {2013},
volume = {7},
publisher = {Pleiades Publishing},
month = {jul},
url = {https://doi.org/10.1134/S1027451013040083},
number = {4},
pages = {640--648},
doi = {10.1134/S1027451013040083}
}
Cite this
MLA
Copy
Egorov, V.K., et al. “Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures.” Journal of Surface Investigation, vol. 7, no. 4, Jul. 2013, pp. 640-648. https://doi.org/10.1134/S1027451013040083.
Profiles