Russian Microelectronics, volume 52, issue S1, pages S267-S273

Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics

V. Egorov ¹

E. Egorov ^{1, 2, 3}

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Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka, Russia |

Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Fryazino, Russia |

Financial University under the Government of the Russian Federation, Moscow, Russia |

Publication type: Journal Article

Publication date: 2023-12-01

Pleiades Publishing

Journal: Russian Microelectronics

scimago Q4

SJR: 0.182

CiteScore: 0.7

Impact factor: —

ISSN: 10637397, 16083415

DOI: 10.1134/s1063739723600644

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Materials Chemistry

Electronic, Optical and Magnetic Materials

Condensed Matter Physics

Electrical and Electronic Engineering

Abstract

The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered.